JP5130398B2 - ガス成分の濃度測定装置及び濃度測定方法 - Google Patents

ガス成分の濃度測定装置及び濃度測定方法 Download PDF

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Publication number
JP5130398B2
JP5130398B2 JP2011505466A JP2011505466A JP5130398B2 JP 5130398 B2 JP5130398 B2 JP 5130398B2 JP 2011505466 A JP2011505466 A JP 2011505466A JP 2011505466 A JP2011505466 A JP 2011505466A JP 5130398 B2 JP5130398 B2 JP 5130398B2
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JP
Japan
Prior art keywords
layer
sensor
gas
sensor element
coating
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Expired - Fee Related
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JP2011505466A
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English (en)
Japanese (ja)
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JP2011519024A (ja
Inventor
シュネル フランク
トロイトラー クリストフ
シュミット ラルフ
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—Specially adapted to detect a particular component
    • G01N33/0037—Specially adapted to detect a particular component for NOx
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—Specially adapted to detect a particular component
    • G01N33/0054—Specially adapted to detect a particular component for ammonia
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

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  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2011505466A 2008-04-25 2009-04-16 ガス成分の濃度測定装置及び濃度測定方法 Expired - Fee Related JP5130398B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008001394.3 2008-04-25
DE102008001394A DE102008001394A1 (de) 2008-04-25 2008-04-25 Abgastaugliche Schutzschichten für Hochtemperatursensoren
PCT/EP2009/054527 WO2009130158A1 (de) 2008-04-25 2009-04-16 Abgastaugliche schutzschichten für hochtemperatursensoren

Publications (2)

Publication Number Publication Date
JP2011519024A JP2011519024A (ja) 2011-06-30
JP5130398B2 true JP5130398B2 (ja) 2013-01-30

Family

ID=40749168

Family Applications (1)

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JP2011505466A Expired - Fee Related JP5130398B2 (ja) 2008-04-25 2009-04-16 ガス成分の濃度測定装置及び濃度測定方法

Country Status (5)

Country Link
EP (1) EP2271921A1 (de)
JP (1) JP5130398B2 (de)
CN (1) CN102016558A (de)
DE (1) DE102008001394A1 (de)
WO (1) WO2009130158A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014007753A1 (de) * 2014-05-23 2015-11-26 Steinmüller Babcock Environment Gmbh Korrosionssonde und Verfahren zum Einbau einer Korrosionssonde
CN107063324A (zh) * 2017-04-21 2017-08-18 士彩材料科技（苏州）有限公司 一种防水透气的传感器保护机构
CN112924515A (zh) * 2021-01-20 2021-06-08 南方科技大学 一种气体传感器及其制备方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2407110C3 (de) * 1974-02-14 1981-04-23 Siemens AG, 1000 Berlin und 8000 München Sensor zum Nachweis einer in einem Gas oder einer Flüssigkeit einthaltenen Substanz
US4020830A (en) * 1975-03-12 1977-05-03 The University Of Utah Selective chemical sensitive FET transducers
JPH02212759A (ja) * 1989-02-14 1990-08-23 Ngk Spark Plug Co Ltd 酸素吸蔵物質含有保護層を備えた空燃比制御用酸素センサ及びその製法
JPH04131756A (ja) * 1990-09-21 1992-05-06 Orc Mfg Co Ltd 半導体ガスセンサおよびガス濃度測定方法
DE4243733C2 (de) * 1992-12-23 2003-03-27 Bosch Gmbh Robert Sensor zur Bestimmung von Gaskomponenten und/oder Gaskonzentrationen von Gasgemischen
DE19652968C2 (de) * 1996-09-02 2003-11-13 Bosch Gmbh Robert Meßanordnung zur Bestimmung von Gasbestandteilen in Gasgemischen
GB2321336B (en) * 1997-01-15 2001-07-25 Univ Warwick Gas-sensing semiconductor devices
JPH10239271A (ja) * 1997-02-28 1998-09-11 Ngk Spark Plug Co Ltd ガスセンサ
JP4131756B2 (ja) * 1998-03-25 2008-08-13 北陸電気工業株式会社 メンブレンスイッチ
DE10048195C2 (de) * 2000-09-28 2002-11-14 Siemens Ag Gassensor
US20060137979A1 (en) * 2004-11-30 2006-06-29 Walter Strassner Sensor element for determining gas components in gas mixtures and method for manufacturing the same
DE102005056522A1 (de) 2005-11-28 2007-06-06 Robert Bosch Gmbh Sensorelement zur Bestimmung von Gaskomponenten in Gasgemischen und Verfahren zur Herstellung desselben
US7127935B2 (en) * 2005-02-07 2006-10-31 Honeywell International Inc. Wireless gas composition sensor system
DE102005033639A1 (de) * 2005-07-19 2007-01-25 Robert Bosch Gmbh Sensor zur Detektion von Medien
DE102006017172A1 (de) * 2006-04-12 2007-10-18 Robert Bosch Gmbh Gassensor
JP2007285961A (ja) * 2006-04-19 2007-11-01 Denso Corp ガスセンサ素子及びその製造方法

Also Published As

Publication number Publication date
CN102016558A (zh) 2011-04-13
DE102008001394A1 (de) 2009-10-29
WO2009130158A1 (de) 2009-10-29
EP2271921A1 (de) 2011-01-12
JP2011519024A (ja) 2011-06-30

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