JP5107049B2 - 光デバイスと電子デバイスとを集積回路に集積する方法 - Google Patents
光デバイスと電子デバイスとを集積回路に集積する方法 Download PDFInfo
- Publication number
- JP5107049B2 JP5107049B2 JP2007541397A JP2007541397A JP5107049B2 JP 5107049 B2 JP5107049 B2 JP 5107049B2 JP 2007541397 A JP2007541397 A JP 2007541397A JP 2007541397 A JP2007541397 A JP 2007541397A JP 5107049 B2 JP5107049 B2 JP 5107049B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- region
- semiconductor substrate
- electronic device
- optical device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Optical Integrated Circuits (AREA)
- Electrodes Of Semiconductors (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/989,940 | 2004-11-15 | ||
| US10/989,940 US7109051B2 (en) | 2004-11-15 | 2004-11-15 | Method of integrating optical devices and electronic devices on an integrated circuit |
| PCT/US2005/041155 WO2006055476A2 (en) | 2004-11-15 | 2005-11-14 | Method of integrating optical devices and electronic devices on an integrated circuit |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008521216A JP2008521216A (ja) | 2008-06-19 |
| JP2008521216A5 JP2008521216A5 (enExample) | 2008-11-27 |
| JP5107049B2 true JP5107049B2 (ja) | 2012-12-26 |
Family
ID=36386883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007541397A Expired - Fee Related JP5107049B2 (ja) | 2004-11-15 | 2005-11-14 | 光デバイスと電子デバイスとを集積回路に集積する方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7109051B2 (enExample) |
| EP (1) | EP1854128A4 (enExample) |
| JP (1) | JP5107049B2 (enExample) |
| WO (1) | WO2006055476A2 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7080528B2 (en) * | 2002-10-23 | 2006-07-25 | Applied Materials, Inc. | Method of forming a phosphorus doped optical core using a PECVD process |
| US8274715B2 (en) | 2005-07-28 | 2012-09-25 | Omnivision Technologies, Inc. | Processing color and panchromatic pixels |
| US8139130B2 (en) | 2005-07-28 | 2012-03-20 | Omnivision Technologies, Inc. | Image sensor with improved light sensitivity |
| US7574090B2 (en) * | 2006-05-12 | 2009-08-11 | Toshiba America Electronic Components, Inc. | Semiconductor device using buried oxide layer as optical wave guides |
| US7916362B2 (en) | 2006-05-22 | 2011-03-29 | Eastman Kodak Company | Image sensor with improved light sensitivity |
| US8031258B2 (en) | 2006-10-04 | 2011-10-04 | Omnivision Technologies, Inc. | Providing multiple video signals from single sensor |
| US7785983B2 (en) | 2007-03-07 | 2010-08-31 | Freescale Semiconductor, Inc. | Semiconductor device having tiles for dual-trench integration and method therefor |
| US8211732B2 (en) * | 2008-09-11 | 2012-07-03 | Omnivision Technologies, Inc. | Image sensor with raised photosensitive elements |
| US8513037B2 (en) * | 2010-12-03 | 2013-08-20 | Bae Systems Information And Electronic Systems Integration Inc. | Method of integrating slotted waveguide into CMOS process |
| US8886925B2 (en) | 2011-10-11 | 2014-11-11 | Citrix Systems, Inc. | Protecting enterprise data through policy-based encryption of message attachments |
| US9280377B2 (en) | 2013-03-29 | 2016-03-08 | Citrix Systems, Inc. | Application with multiple operation modes |
| US9599561B2 (en) | 2011-10-13 | 2017-03-21 | Affymetrix, Inc. | Methods, systems and apparatuses for testing and calibrating fluorescent scanners |
| US8910239B2 (en) | 2012-10-15 | 2014-12-09 | Citrix Systems, Inc. | Providing virtualized private network tunnels |
| US9971585B2 (en) | 2012-10-16 | 2018-05-15 | Citrix Systems, Inc. | Wrapping unmanaged applications on a mobile device |
| EP2909715B1 (en) | 2012-10-16 | 2022-12-14 | Citrix Systems, Inc. | Application wrapping for application management framework |
| US9595629B2 (en) * | 2012-10-22 | 2017-03-14 | Mellanox Technologies Silicon Photonics Inc. | Enhancing planarization uniformity in optical devices |
| KR102007258B1 (ko) * | 2012-11-21 | 2019-08-05 | 삼성전자주식회사 | 광전 집적회로 기판의 제조방법 |
| US9989703B2 (en) * | 2012-11-30 | 2018-06-05 | International Business Machines Corporation | Semiconductor structure and method for manufacturing a semiconductor structure |
| KR20140095678A (ko) * | 2013-01-25 | 2014-08-04 | 삼성전자주식회사 | 광소자 및 전자소자를 포함하는 반도체 장치 및 그 제조 방법 |
| US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
| US9387815B2 (en) | 2013-02-28 | 2016-07-12 | Kevin Goldstein | Apparatus for collection of debris escaping around a vehicle tailgate |
| US8849978B1 (en) | 2013-03-29 | 2014-09-30 | Citrix Systems, Inc. | Providing an enterprise application store |
| US10284627B2 (en) | 2013-03-29 | 2019-05-07 | Citrix Systems, Inc. | Data management for an application with multiple operation modes |
| US9985850B2 (en) | 2013-03-29 | 2018-05-29 | Citrix Systems, Inc. | Providing mobile device management functionalities |
| US9355223B2 (en) | 2013-03-29 | 2016-05-31 | Citrix Systems, Inc. | Providing a managed browser |
| US9772461B2 (en) * | 2013-10-02 | 2017-09-26 | Photonics Electronics Technology Research Association | Semiconductor integrated circuit and method for manufacturing the same |
| KR102590996B1 (ko) * | 2018-10-17 | 2023-10-17 | 삼성전자주식회사 | 반도체 장치 |
| US10884192B1 (en) * | 2019-12-16 | 2021-01-05 | Hewlett Packard Enterprise Development Lp | Single-etch wide-bandwidth grating couplers with individually-tuned grating sections |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3569997A (en) * | 1967-07-13 | 1971-03-09 | Inventors And Investors Inc | Photoelectric microcircuit components monolythically integrated with zone plate optics |
| US5483085A (en) * | 1994-05-09 | 1996-01-09 | Motorola, Inc. | Electro-optic integrated circuit with diode decoder |
| US5535231A (en) * | 1994-11-08 | 1996-07-09 | Samsung Electronics Co., Ltd. | Optoelectronic circuit including heterojunction bipolar transistor laser and photodetector |
| US5937274A (en) * | 1995-01-31 | 1999-08-10 | Hitachi, Ltd. | Fabrication method for AlGaIn NPAsSb based devices |
| US5963788A (en) * | 1995-09-06 | 1999-10-05 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
| KR100216593B1 (ko) * | 1996-12-06 | 1999-08-16 | 정선종 | 화합물 반도체 소자 제조 방법 |
| US6096591A (en) * | 1997-06-30 | 2000-08-01 | Advanced Micro Devices, Inc. | Method of making an IGFET and a protected resistor with reduced processing steps |
| JPH11274467A (ja) * | 1998-03-26 | 1999-10-08 | Murata Mfg Co Ltd | 光電子集積回路素子 |
| EP1107044A1 (en) * | 1999-11-30 | 2001-06-13 | Hitachi Europe Limited | Photonic device |
| JP2002014242A (ja) | 2000-06-28 | 2002-01-18 | Oki Electric Ind Co Ltd | 光導波路装置 |
| AU2001281623A1 (en) | 2000-08-17 | 2002-02-25 | Mcmaster University | Silicon-on-insulator optical waveguide fabrication by local oxidation of silicon |
| US6594422B2 (en) | 2001-05-02 | 2003-07-15 | Motorola, Inc. | Opto-coupling device structure and method therefor |
| US6654511B2 (en) | 2001-05-17 | 2003-11-25 | Sioptical, Inc. | Optical modulator apparatus and associated method |
| US6608945B2 (en) | 2001-05-17 | 2003-08-19 | Optronx, Inc. | Self-aligning modulator method and associated apparatus |
| US6585424B2 (en) * | 2001-07-25 | 2003-07-01 | Motorola, Inc. | Structure and method for fabricating an electro-rheological lens |
| US6917727B2 (en) | 2001-09-10 | 2005-07-12 | California Institute Of Technology | Strip loaded waveguide integrated with electronics components |
| US7120338B2 (en) | 2001-09-10 | 2006-10-10 | California Institute Of Technology | Tuning the index of a waveguide structure |
| US6746948B2 (en) * | 2001-09-17 | 2004-06-08 | Matsushita Electric Industrial Co., Ltd. | Method for fabricating semiconductor light-emitting device |
| GB0208255D0 (en) | 2002-04-10 | 2002-05-22 | Imec Inter Uni Micro Electr | Photonic crystal based fiber-to-waveguide coupler for polarisation independent photonic integrated circuits |
| US6566722B1 (en) * | 2002-06-26 | 2003-05-20 | United Microelectronics Corp. | Photo sensor in a photo diode on a semiconductor wafer |
| EP1625615B1 (en) * | 2003-04-21 | 2017-07-26 | Cisco Technology, Inc. | Cmos-compatible integration of silicon-based optical devices with electronic devices |
| US20050016446A1 (en) * | 2003-07-23 | 2005-01-27 | Abbott John S. | CaF2 lenses with reduced birefringence |
| US20050214989A1 (en) * | 2004-03-29 | 2005-09-29 | Honeywell International Inc. | Silicon optoelectronic device |
| EP1585171A1 (en) * | 2004-04-07 | 2005-10-12 | Andrea Pizzarulli | An SOI circuit having reduced crosstalk interference and a method for forming the same |
-
2004
- 2004-11-15 US US10/989,940 patent/US7109051B2/en not_active Expired - Fee Related
-
2005
- 2005-11-14 WO PCT/US2005/041155 patent/WO2006055476A2/en not_active Ceased
- 2005-11-14 EP EP05822578A patent/EP1854128A4/en not_active Ceased
- 2005-11-14 JP JP2007541397A patent/JP5107049B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1854128A4 (en) | 2010-12-15 |
| US7109051B2 (en) | 2006-09-19 |
| JP2008521216A (ja) | 2008-06-19 |
| WO2006055476A2 (en) | 2006-05-26 |
| EP1854128A2 (en) | 2007-11-14 |
| WO2006055476A3 (en) | 2009-05-14 |
| US20060105479A1 (en) | 2006-05-18 |
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