JP5106807B2 - 光学式エンコーダ - Google Patents

光学式エンコーダ Download PDF

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Publication number
JP5106807B2
JP5106807B2 JP2006207397A JP2006207397A JP5106807B2 JP 5106807 B2 JP5106807 B2 JP 5106807B2 JP 2006207397 A JP2006207397 A JP 2006207397A JP 2006207397 A JP2006207397 A JP 2006207397A JP 5106807 B2 JP5106807 B2 JP 5106807B2
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JP
Japan
Prior art keywords
scanning
scale
partial
encoder
graduation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2006207397A
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English (en)
Japanese (ja)
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JP2007040996A5 (enExample
JP2007040996A (ja
Inventor
ミヒャエル・ヘルマン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication of JP2007040996A publication Critical patent/JP2007040996A/ja
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2006207397A 2005-08-02 2006-07-31 光学式エンコーダ Expired - Fee Related JP5106807B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005036180.3 2005-08-02
DE102005036180.3A DE102005036180B4 (de) 2005-08-02 2005-08-02 Optische Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2007040996A JP2007040996A (ja) 2007-02-15
JP2007040996A5 JP2007040996A5 (enExample) 2009-08-27
JP5106807B2 true JP5106807B2 (ja) 2012-12-26

Family

ID=37669905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006207397A Expired - Fee Related JP5106807B2 (ja) 2005-08-02 2006-07-31 光学式エンコーダ

Country Status (3)

Country Link
US (1) US7404259B2 (enExample)
JP (1) JP5106807B2 (enExample)
DE (1) DE102005036180B4 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7608813B1 (en) * 2008-11-18 2009-10-27 Mitutoyo Corporation Scale track configuration for absolute optical encoder including a detector electronics with plurality of track detector portions
JP6032924B2 (ja) * 2011-04-13 2016-11-30 キヤノン株式会社 エンコーダ
JP5755010B2 (ja) 2011-04-14 2015-07-29 キヤノン株式会社 エンコーダ
US10452025B2 (en) * 2013-11-04 2019-10-22 Luminit Llc Substrate-guided wave-based transparent holographic center high mounted stop light and method of fabrication thereof
JP6593868B2 (ja) * 2015-07-28 2019-10-23 株式会社ミツトヨ 変位検出装置
DE102017201257A1 (de) * 2017-01-26 2018-07-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
ES2928745T3 (es) * 2018-02-14 2022-11-22 Hohner Automation S L Métodos para calcular la forma de rendijas de una máscara de un codificador incremental óptico
DE102019206937A1 (de) * 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
EP4421454B1 (de) * 2023-02-23 2025-04-30 Dr. Johannes Heidenhain GmbH Skalenelement für eine induktive positionsmesseinrichtung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH669457A5 (enExample) * 1986-02-18 1989-03-15 Mettler Instrumente Ag
US5237391A (en) * 1988-11-23 1993-08-17 The Boeing Company Multitrack multilevel sensing system
DE3905730C2 (de) * 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
GB2230666B (en) * 1989-04-19 1993-04-28 Mitutoyo Corp Displacement detector
DE4040794A1 (de) * 1990-12-17 1992-06-25 Ems Technik Gmbh Verfahren und lagegeber zur lagebestimmung eines positionierkoerpers relativ zu einem bezugskoerper
EP0547270B1 (de) * 1991-12-20 1995-05-17 Dr. Johannes Heidenhain GmbH Fotoelektrische Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
US6178653B1 (en) * 1998-11-20 2001-01-30 Lucent Technologies Inc. Probe tip locator
DE50105554D1 (de) * 2000-09-14 2005-04-14 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
US20040135076A1 (en) * 2003-01-15 2004-07-15 Xerox Corporation Method and apparatus for obtaining a high quality sine wave from an analog quadrature encoder

Also Published As

Publication number Publication date
DE102005036180B4 (de) 2020-08-27
JP2007040996A (ja) 2007-02-15
DE102005036180A1 (de) 2007-02-08
US7404259B2 (en) 2008-07-29
US20070028476A1 (en) 2007-02-08

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