JP5090080B2 - 板状物の切削方法 - Google Patents
板状物の切削方法 Download PDFInfo
- Publication number
- JP5090080B2 JP5090080B2 JP2007169910A JP2007169910A JP5090080B2 JP 5090080 B2 JP5090080 B2 JP 5090080B2 JP 2007169910 A JP2007169910 A JP 2007169910A JP 2007169910 A JP2007169910 A JP 2007169910A JP 5090080 B2 JP5090080 B2 JP 5090080B2
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- JP
- Japan
- Prior art keywords
- cutting
- resin substrate
- plate
- adhesive tape
- dicing frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005520 cutting process Methods 0.000 title claims description 132
- 238000000034 method Methods 0.000 title claims description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 37
- 239000002390 adhesive tape Substances 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 8
- 239000011347 resin Substances 0.000 description 78
- 229920005989 resin Polymers 0.000 description 78
- 239000000758 substrate Substances 0.000 description 78
- 239000002699 waste material Substances 0.000 description 20
- 238000004140 cleaning Methods 0.000 description 9
- 238000003384 imaging method Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000011109 contamination Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Landscapes
- Dicing (AREA)
Description
30 樹脂基板
34 粘着テープ
35 樹脂基板アセンブリ
36 ダイシングフレーム
36a テーパー状傾斜部
50 段差部
58,60,62 テープ
66,68 穴(排水口)
70,72 切欠
Claims (1)
- 環状のダイシングフレームに貼着された粘着テープを介して該ダイシングフレームに支持された板状物を保持するチャックテーブルと、該チャックテーブルに保持された板状物を切削する切削ブレードを回転可能に支持する切削手段と、該切削ブレードに切削水を供給する切削水供給手段とを備えた切削装置を用いた板状物の切削方法であって、
前記切削ブレードの回転に起因して切削水が飛散しダイシングフレームと粘着テープとの間の段差部に切削水が滞留して切削屑が粘着テープに付着しないように、少なくとも切削水が飛散する側のダイシングフレームと粘着テープとの境界領域に前記段差部を覆うようにテープを配設して板状物の切削を遂行することを特徴とする板状物の切削方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007169910A JP5090080B2 (ja) | 2007-06-28 | 2007-06-28 | 板状物の切削方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007169910A JP5090080B2 (ja) | 2007-06-28 | 2007-06-28 | 板状物の切削方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009010150A JP2009010150A (ja) | 2009-01-15 |
JP5090080B2 true JP5090080B2 (ja) | 2012-12-05 |
Family
ID=40324948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007169910A Active JP5090080B2 (ja) | 2007-06-28 | 2007-06-28 | 板状物の切削方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5090080B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015079828A (ja) * | 2013-10-16 | 2015-04-23 | 株式会社ディスコ | フレームクランプ装置 |
JP2017196709A (ja) * | 2016-04-28 | 2017-11-02 | 株式会社ディスコ | ワークユニット及び研削方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3070075B2 (ja) * | 1990-07-17 | 2000-07-24 | 株式会社ディスコ | ダイシング装置 |
JP3505827B2 (ja) * | 1994-12-28 | 2004-03-15 | 松下電器産業株式会社 | ダイシング方法 |
-
2007
- 2007-06-28 JP JP2007169910A patent/JP5090080B2/ja active Active
Also Published As
Publication number | Publication date |
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JP2009010150A (ja) | 2009-01-15 |
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