JP5082885B2 - 水平多関節ロボットおよびそれを備えた製造装置 - Google Patents

水平多関節ロボットおよびそれを備えた製造装置 Download PDF

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Publication number
JP5082885B2
JP5082885B2 JP2008015528A JP2008015528A JP5082885B2 JP 5082885 B2 JP5082885 B2 JP 5082885B2 JP 2008015528 A JP2008015528 A JP 2008015528A JP 2008015528 A JP2008015528 A JP 2008015528A JP 5082885 B2 JP5082885 B2 JP 5082885B2
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arm
articulated robot
hand
horizontal articulated
cover
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Expired - Fee Related
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JP2008015528A
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Japanese (ja)
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JP2009172733A5 (enExample
JP2009172733A (ja
Inventor
健一 立花
政彦 龍
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Priority to JP2008015528A priority Critical patent/JP5082885B2/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2008015528A 2008-01-25 2008-01-25 水平多関節ロボットおよびそれを備えた製造装置 Expired - Fee Related JP5082885B2 (ja)

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JP2008015528A JP5082885B2 (ja) 2008-01-25 2008-01-25 水平多関節ロボットおよびそれを備えた製造装置

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JP2008015528A JP5082885B2 (ja) 2008-01-25 2008-01-25 水平多関節ロボットおよびそれを備えた製造装置

Publications (3)

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JP2009172733A JP2009172733A (ja) 2009-08-06
JP2009172733A5 JP2009172733A5 (enExample) 2011-10-20
JP5082885B2 true JP5082885B2 (ja) 2012-11-28

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JP2008015528A Expired - Fee Related JP5082885B2 (ja) 2008-01-25 2008-01-25 水平多関節ロボットおよびそれを備えた製造装置

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JP (1) JP5082885B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5527075B2 (ja) * 2010-02-12 2014-06-18 東京エレクトロン株式会社 搬送機構
CN105127985B (zh) * 2013-01-07 2017-09-01 日本电产三协株式会社 工业用机器人
JP6313963B2 (ja) * 2013-01-07 2018-04-18 日本電産サンキョー株式会社 産業用ロボット

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3719354B2 (ja) * 1999-09-06 2005-11-24 横河電機株式会社 搬送装置
JP2002307365A (ja) * 2001-04-11 2002-10-23 Aitec:Kk スカラロボットのアーム
JP4294984B2 (ja) * 2003-03-19 2009-07-15 東京エレクトロン株式会社 基板搬送装置及び基板処理装置
JP2006159372A (ja) * 2004-12-09 2006-06-22 Kawasaki Heavy Ind Ltd 産業用ロボット

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JP2009172733A (ja) 2009-08-06

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