JP5054990B2 - 走査形電子顕微鏡 - Google Patents
走査形電子顕微鏡 Download PDFInfo
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- JP5054990B2 JP5054990B2 JP2007018654A JP2007018654A JP5054990B2 JP 5054990 B2 JP5054990 B2 JP 5054990B2 JP 2007018654 A JP2007018654 A JP 2007018654A JP 2007018654 A JP2007018654 A JP 2007018654A JP 5054990 B2 JP5054990 B2 JP 5054990B2
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- electron
- electrons
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
- H01J2237/24465—Sectored detectors, e.g. quadrants
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24475—Scattered electron detectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24495—Signal processing, e.g. mixing of two or more signals
Description
本例ではセミインレンズ型の対物レンズで構成された例を示したが、レンズの形状はセミインレンズ型に限らず効果は同じである。
eV相当の速度が最大である。
eVのエネルギーを持って対物レンズより上方に導かれる。
eVの反射電子は70度に開き角が圧縮される。これは本特許に基づく二次電子/反射電子弁別を実現するのに十分な角度差である。
17に衝突し、二次電子が再発生する。再発生した二次電子は二次電子検出器12前面に印加された電圧に起因する電界に牽引され、二次電子検出器12に到達する。
19aからは主に二次電子7の信号が、外周部のシンチレーター19bからは主に反射電子8の情報が得られる。このようにして二次電子/反射電子の弁別検出を行うことが出来る。
23によって、加速される。加速された状態の電子ビーム2は、加速円筒23と、試料6との電位差によって減速され、試料6に到達する。
2 一次電子線
3a,3b 偏向器
4 対物レンズ
5 減速電圧印加電源
6 試料
7,11,13 二次電子
8 反射電子
9 検出電極
9a 検出電極内周部
9b 検出電極外周部
10 電圧印加機構
12 二次電子検出器
14 信号処理手段
15 表示装置
16 E×B偏向器
17 可動式検出板
18 可動機構
Claims (5)
- 電子源と、当該電子源から放出された電子ビームを集束する対物レンズと、試料に負電圧を印加する負電圧印加電源及び/又は電子ビーム光軸に沿って正電圧が印加された加速円筒を備えた走査電子顕微鏡において、
前記負電圧及び/又は前記正電圧により前記電子ビームを減速する電界によって加速され、かつ前記電子ビームの前記試料への照射により前記試料から放出される、二次電子の軌道上に配置された第一の二次電子変換電極と、
前記二次電子の軌道外であって、前記電子ビームの光軸から見て前記二次電子の軌道の外側を通過する、前記電子ビームが前記試料の表面で弾性散乱されることにより発生する後方散乱電子の軌道上に配置された第二の二次電子変換電極と、
前記第一の二次電子変換電極に電圧を印加する電源とを備え、
前記第一の二次電子変換電極と、前記第二の二次電子変換電極は、同じ高さに配置されていることを特徴とする走査電子顕微鏡。 - 請求項1の走査電子顕微鏡において、
前記第一の二次電子変換電極に零又は負電圧を印加し、前記第一および第二の二次電子変換電極から放出される電子を検出する検出器を備えたことを特徴とする走査電子顕微鏡。 - 請求項1の走査電子顕微鏡において、
前記第一の二次電子変換電極に正電圧を印加し、前記第二の二次電子変換電極から放出される電子を検出する検出器を備えたことを特徴とする走査電子顕微鏡。 - 請求項1の走査電子顕微鏡において、
前記後方散乱電子を受ける前記第二の二次電子変換電極と、前記二次電子を受ける前記第一の二次電子変換電極との間は、電気的に絶縁されていることを特徴とする走査電子顕微鏡。 - 請求項1の走査電子顕微鏡において、
前記電子ビームの光軸上に直交磁界発生器を備え、
前記第一または第二の二次電子変換電極で発生した電子を当該直交磁界発生器で偏向し、当該偏向された電子を検出する検出器を備えたことを特徴とする走査電子顕微鏡。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007018654A JP5054990B2 (ja) | 2007-01-30 | 2007-01-30 | 走査形電子顕微鏡 |
US12/021,810 US7705302B2 (en) | 2007-01-30 | 2008-01-29 | Scanning electron microscope |
Applications Claiming Priority (1)
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JP2007018654A JP5054990B2 (ja) | 2007-01-30 | 2007-01-30 | 走査形電子顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008186689A JP2008186689A (ja) | 2008-08-14 |
JP5054990B2 true JP5054990B2 (ja) | 2012-10-24 |
Family
ID=39685039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007018654A Active JP5054990B2 (ja) | 2007-01-30 | 2007-01-30 | 走査形電子顕微鏡 |
Country Status (2)
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US (1) | US7705302B2 (ja) |
JP (1) | JP5054990B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11282671B2 (en) | 2016-07-28 | 2022-03-22 | Hitachi High-Tech Corporation | Charged-particle beam apparatus |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8080790B2 (en) | 2008-03-05 | 2011-12-20 | Hitachi High-Technologies Corporation | Scanning electron microscope |
JP2010055756A (ja) | 2008-08-26 | 2010-03-11 | Hitachi High-Technologies Corp | 荷電粒子線の照射方法及び荷電粒子線装置 |
JP5492405B2 (ja) * | 2008-12-02 | 2014-05-14 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
US8629395B2 (en) * | 2010-01-20 | 2014-01-14 | Hitachi High-Technologies Corporation | Charged particle beam apparatus |
JP5542537B2 (ja) * | 2010-06-16 | 2014-07-09 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
DE102011080341A1 (de) * | 2011-08-03 | 2013-02-07 | Carl Zeiss Nts Gmbh | Verfahren und Teilchenstrahlgerät zur Erzeugung eines Bildes eines Objekts |
JP5814741B2 (ja) * | 2011-10-20 | 2015-11-17 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
JP5478683B2 (ja) * | 2012-08-27 | 2014-04-23 | 株式会社日立ハイテクノロジーズ | 荷電粒子線の照射方法及び荷電粒子線装置 |
US10541103B2 (en) | 2014-12-10 | 2020-01-21 | Hitachi High-Technologies Corporation | Charged particle beam device |
DE112017006802B4 (de) | 2017-03-24 | 2021-03-25 | Hitachi High-Tech Corporation | Ladungsteilchenstrahl-vorrichtung |
DE112017007822B4 (de) | 2017-09-29 | 2023-06-01 | Hitachi High-Technologies Corporation | Rasterelektronenmikroskop |
WO2019100600A1 (en) | 2017-11-21 | 2019-05-31 | Focus-Ebeam Technology (Beijing) Co., Ltd. | Low voltage scanning electron microscope and method for specimen observation |
CN114256043B (zh) * | 2020-12-02 | 2024-04-05 | 聚束科技(北京)有限公司 | 一种电子束系统 |
Family Cites Families (18)
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US4897545A (en) | 1987-05-21 | 1990-01-30 | Electroscan Corporation | Electron detector for use in a gaseous environment |
US5493116A (en) * | 1993-10-26 | 1996-02-20 | Metrologix, Inc. | Detection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devices |
JP3291880B2 (ja) * | 1993-12-28 | 2002-06-17 | 株式会社日立製作所 | 走査形電子顕微鏡 |
US5644132A (en) | 1994-06-20 | 1997-07-01 | Opan Technologies Ltd. | System for high resolution imaging and measurement of topographic and material features on a specimen |
EP0721201B1 (en) | 1994-12-19 | 1998-08-26 | Opal Technologies Ltd. | System for high resolution imaging and measurement of topographic and material features on a specimen |
JPH0935679A (ja) * | 1995-07-24 | 1997-02-07 | Jeol Ltd | 走査電子顕微鏡 |
JP3774953B2 (ja) * | 1995-10-19 | 2006-05-17 | 株式会社日立製作所 | 走査形電子顕微鏡 |
EP0769799B1 (en) * | 1995-10-19 | 2010-02-17 | Hitachi, Ltd. | Scanning electron microscope |
JPH11273808A (ja) | 1998-03-18 | 1999-10-08 | Next:Kk | 端子部構造および端子部の製造方法 |
JPH11273608A (ja) * | 1998-03-23 | 1999-10-08 | Hitachi Ltd | 走査電子顕微鏡 |
WO2000019482A1 (fr) * | 1998-09-25 | 2000-04-06 | Hitachi, Ltd. | Microscope electronique a balayage |
US6642520B2 (en) | 1999-04-13 | 2003-11-04 | Kabushiki Kaisha Topcon | Scanning electron microscope |
JP2000299078A (ja) * | 1999-04-13 | 2000-10-24 | Topcon Corp | 走査型電子顕微鏡 |
US6633034B1 (en) * | 2000-05-04 | 2003-10-14 | Applied Materials, Inc. | Method and apparatus for imaging a specimen using low profile electron detector for charged particle beam imaging apparatus including electrostatic mirrors |
JP2002324510A (ja) * | 2001-04-25 | 2002-11-08 | Jeol Ltd | 走査電子顕微鏡 |
US6946656B2 (en) * | 2001-07-12 | 2005-09-20 | Hitachi, Ltd. | Sample electrification measurement method and charged particle beam apparatus |
JP2003157790A (ja) * | 2001-11-20 | 2003-05-30 | Advantest Corp | 微細凹凸量測定装置及び走査型電子顕微鏡 |
DE10301579A1 (de) | 2003-01-16 | 2004-07-29 | Leo Elektronenmikroskopie Gmbh | Elektronenstrahlgerät und Detektoranordnung |
-
2007
- 2007-01-30 JP JP2007018654A patent/JP5054990B2/ja active Active
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2008
- 2008-01-29 US US12/021,810 patent/US7705302B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11282671B2 (en) | 2016-07-28 | 2022-03-22 | Hitachi High-Tech Corporation | Charged-particle beam apparatus |
Also Published As
Publication number | Publication date |
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US7705302B2 (en) | 2010-04-27 |
US20080191135A1 (en) | 2008-08-14 |
JP2008186689A (ja) | 2008-08-14 |
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