JP5053085B2 - 高密度シリコンカーバイドの製造方法 - Google Patents
高密度シリコンカーバイドの製造方法 Download PDFInfo
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- JP5053085B2 JP5053085B2 JP2007519475A JP2007519475A JP5053085B2 JP 5053085 B2 JP5053085 B2 JP 5053085B2 JP 2007519475 A JP2007519475 A JP 2007519475A JP 2007519475 A JP2007519475 A JP 2007519475A JP 5053085 B2 JP5053085 B2 JP 5053085B2
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- JP
- Japan
- Prior art keywords
- silicon carbide
- porous
- preform
- sic
- pores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 221
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 163
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 49
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 78
- 239000011148 porous material Substances 0.000 claims abstract description 56
- 229910021426 porous silicon Inorganic materials 0.000 claims abstract description 56
- 239000007833 carbon precursor Substances 0.000 claims abstract description 46
- 239000007788 liquid Substances 0.000 claims abstract description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 38
- 239000010703 silicon Substances 0.000 claims abstract description 38
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 27
- 239000002243 precursor Substances 0.000 claims abstract description 13
- 229910002804 graphite Inorganic materials 0.000 claims description 48
- 239000010439 graphite Substances 0.000 claims description 48
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 22
- 239000003054 catalyst Substances 0.000 claims description 15
- XPFVYQJUAUNWIW-UHFFFAOYSA-N furfuryl alcohol Chemical compound OCC1=CC=CO1 XPFVYQJUAUNWIW-UHFFFAOYSA-N 0.000 claims description 15
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 claims description 9
- 238000003763 carbonization Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000002296 pyrolytic carbon Substances 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- 238000006116 polymerization reaction Methods 0.000 claims description 5
- 238000011049 filling Methods 0.000 claims description 4
- 238000003754 machining Methods 0.000 claims description 4
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000002202 Polyethylene glycol Substances 0.000 claims description 2
- 229920001223 polyethylene glycol Polymers 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000005475 siliconizing Methods 0.000 claims 6
- 238000010000 carbonizing Methods 0.000 claims 2
- 239000011184 SiC–SiC matrix composite Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 230000000379 polymerizing effect Effects 0.000 claims 1
- 239000000203 mixture Substances 0.000 abstract description 7
- 238000000197 pyrolysis Methods 0.000 abstract description 3
- 238000005470 impregnation Methods 0.000 abstract 1
- 229910003465 moissanite Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 14
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000000280 densification Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000005011 phenolic resin Substances 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 239000004927 clay Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920000673 poly(carbodihydridosilane) Polymers 0.000 description 2
- 238000001272 pressureless sintering Methods 0.000 description 2
- 238000000518 rheometry Methods 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000002902 bimodal effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000012705 liquid precursor Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002006 petroleum coke Substances 0.000 description 1
- 229920003257 polycarbosilane Polymers 0.000 description 1
- 238000009700 powder processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000008247 solid mixture Substances 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000010671 solid-state reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/0022—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof obtained by a chemical conversion or reaction other than those relating to the setting or hardening of cement-like material or to the formation of a sol or a gel, e.g. by carbonising or pyrolysing preformed cellular materials based on polymers, organo-metallic or organo-silicon precursors
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- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/0022—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof obtained by a chemical conversion or reaction other than those relating to the setting or hardening of cement-like material or to the formation of a sol or a gel, e.g. by carbonising or pyrolysing preformed cellular materials based on polymers, organo-metallic or organo-silicon precursors
- C04B38/0032—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof obtained by a chemical conversion or reaction other than those relating to the setting or hardening of cement-like material or to the formation of a sol or a gel, e.g. by carbonising or pyrolysing preformed cellular materials based on polymers, organo-metallic or organo-silicon precursors one of the precursor materials being a monolithic element having approximately the same dimensions as the final article, e.g. a paper sheet which after carbonisation will react with silicon to form a porous silicon carbide porous body
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00905—Uses not provided for elsewhere in C04B2111/00 as preforms
-
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- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/20—Resistance against chemical, physical or biological attack
- C04B2111/2084—Thermal shock resistance
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
- C04B2235/483—Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/614—Gas infiltration of green bodies or pre-forms
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/616—Liquid infiltration of green bodies or pre-forms
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
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- C—CHEMISTRY; METALLURGY
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/95—Products characterised by their size, e.g. microceramics
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US58424404P | 2004-06-30 | 2004-06-30 | |
| US60/584,244 | 2004-06-30 | ||
| PCT/US2005/023490 WO2006004999A1 (en) | 2004-06-30 | 2005-06-30 | A process for the manufacturing of dense silicon carbide |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008505045A JP2008505045A (ja) | 2008-02-21 |
| JP2008505045A5 JP2008505045A5 (enExample) | 2012-05-31 |
| JP5053085B2 true JP5053085B2 (ja) | 2012-10-17 |
Family
ID=35094472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007519475A Expired - Fee Related JP5053085B2 (ja) | 2004-06-30 | 2005-06-30 | 高密度シリコンカーバイドの製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7799375B2 (enExample) |
| EP (1) | EP1761475B1 (enExample) |
| JP (1) | JP5053085B2 (enExample) |
| AT (1) | ATE499333T1 (enExample) |
| DE (1) | DE602005026523D1 (enExample) |
| ES (1) | ES2359412T3 (enExample) |
| WO (1) | WO2006004999A1 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009210266A (ja) * | 2008-02-29 | 2009-09-17 | Ibiden Co Ltd | 管状体 |
| WO2009140791A1 (en) * | 2008-05-21 | 2009-11-26 | Dalian Institute Of Chemical Physics, Chinese Academy Of Sciences | Process for producing silicon carbide |
| KR20110044195A (ko) | 2008-06-09 | 2011-04-28 | 포코 그래파이트, 인코포레이티드 | 서브-애퍼쳐 반응성 원자 식각을 이용하는 성분의 전처리에 의해 반도체 제조 유닛의 수율을 증가시키고 고장 시간을 저감하는 방법 |
| CN103688343B (zh) | 2011-03-07 | 2016-09-07 | 恩特格里公司 | 化学机械抛光垫修整器 |
| US8642214B2 (en) * | 2011-08-25 | 2014-02-04 | Uchicago Argonne, Llc | Silicon-carbonaceous encapsulated materials |
| RU2513497C1 (ru) * | 2012-09-04 | 2014-04-20 | Открытое Акционерное Общество "Уральский научно-исследовательский институт композиционных материалов" | Способ изготовления изделий из углерод-карбидокремниевого материала в форме оболочек |
| JP5981570B2 (ja) * | 2013-01-31 | 2016-08-31 | ＡｖａｎＳｔｒａｔｅ株式会社 | ガラス基板の製造方法 |
| WO2014150394A2 (en) | 2013-03-15 | 2014-09-25 | Rolls-Royce Corporation | Ceramic matrix composites and methods for producing ceramic matrix composites |
| US9708226B2 (en) | 2013-03-15 | 2017-07-18 | Rolls-Royce Corporation | Method for producing high strength ceramic matrix composites |
| EP2860015B1 (en) * | 2013-10-10 | 2017-12-20 | Discma AG | Method of delivering a liquid volume and associated apparatus |
| KR102304574B1 (ko) | 2014-03-21 | 2021-09-27 | 엔테그리스, 아이엔씨. | 세장형 절삭 에지를 갖는 화학 기계 평탄화 패드 컨디셔너 |
| FR3026961B1 (fr) * | 2014-10-10 | 2016-12-09 | Commissariat Energie Atomique | Dispositif de conversion catalytique presentant un temps d'activation reduit |
| CN104446656B (zh) * | 2014-12-15 | 2016-10-05 | 航天特种材料及工艺技术研究所 | 一种多孔碳材料抗氧化涂层的制备方法 |
| JP2016150873A (ja) * | 2015-02-18 | 2016-08-22 | 株式会社Ihi | セラミックス基複合材の製造方法 |
| US10227264B2 (en) | 2015-07-13 | 2019-03-12 | Rolls-Royce High Temperature Composites, Inc. | Method for making ceramic matrix composite articles |
| KR101941232B1 (ko) * | 2016-12-20 | 2019-01-22 | 주식회사 티씨케이 | 반도체 제조용 부품, 복합체 코팅층을 포함하는 반도체 제조용 부품 및 그 제조방법 |
| WO2019010169A1 (en) | 2017-07-06 | 2019-01-10 | Entegris, Inc. | Silicon carbide filter membrane and methods of use |
| US12023896B2 (en) | 2019-04-16 | 2024-07-02 | Corning Incorporated | Filled-pore decorative layer for ion exchange and automotive glass |
| CN110092381B (zh) * | 2019-05-22 | 2021-04-16 | 浙江工业大学 | 一种高纯碳化硅材料的制备方法 |
| RU2740984C1 (ru) * | 2019-10-23 | 2021-01-22 | Федеральное государственное бюджетное учреждение науки Институт физики твердого тела Российской академии наук (ИФТТ РАН) | Способ получения изделий из карбидокремниевой керамики |
| CN115894069B (zh) * | 2022-11-29 | 2023-07-14 | 厦门大学 | 一种多孔碳化硅高温隔热瓦及其制备方法 |
| CN115594514B (zh) * | 2022-11-30 | 2023-03-21 | 常熟通乐电子材料有限公司 | 一种三维SiC骨架增强SiC的高致密陶瓷及制备方法 |
| US20240275246A1 (en) * | 2023-02-13 | 2024-08-15 | Honeywell International Inc. | Thermal management in electric machines using near net shape formation of silicon carbide potting material |
| CN119390452B (zh) * | 2025-01-02 | 2025-03-28 | 中南大学 | 一种不含B的常压烧结高纯SiC及应用 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3205043A (en) * | 1962-04-04 | 1965-09-07 | Carborundum Co | Cold molded dense silicon carbide articles and method of making the same |
| FR2741063B1 (fr) * | 1995-11-14 | 1998-02-13 | Europ Propulsion | Procede pour l'introduction dans des substrats poreux d'une composition en fusion a base de silicium |
| EP0835853A1 (fr) * | 1996-10-14 | 1998-04-15 | Societe Europeenne De Propulsion | Elément de friction en matériau composite carbone/carbone-carbure de silicium et procédé pour sa fabrication |
| US5981002A (en) * | 1998-02-09 | 1999-11-09 | Textron Systems Corporation | Method for densifying the edges and surfaces of a preform using a liquid precursor |
| US6743393B1 (en) * | 1998-06-17 | 2004-06-01 | Coi Ceramics, Inc. | Method for producing ceramic matrix composites |
| US6162543A (en) * | 1998-12-11 | 2000-12-19 | Saint-Gobain Industrial Ceramics, Inc. | High purity siliconized silicon carbide having high thermal shock resistance |
| US6841273B2 (en) * | 2000-12-27 | 2005-01-11 | Toshiba Ceramics Co., Ltd. | Silicon/silicon carbide composite and process for manufacturing the same |
| DE10143015C2 (de) * | 2001-09-03 | 2003-11-13 | Deutsch Zentr Luft & Raumfahrt | Verfahren zur Herstellung eines Verbundwerkstoffes |
| US6953605B2 (en) * | 2001-12-26 | 2005-10-11 | Messier-Bugatti | Method for densifying porous substrates by chemical vapour infiltration with preheated gas |
| US20040067316A1 (en) * | 2002-10-04 | 2004-04-08 | Paul Gray | Method for processing silicon-carbide materials using organic film formers |
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- 2005-06-30 AT AT05770502T patent/ATE499333T1/de not_active IP Right Cessation
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- 2005-06-30 JP JP2007519475A patent/JP5053085B2/ja not_active Expired - Fee Related
- 2005-06-30 DE DE602005026523T patent/DE602005026523D1/de not_active Expired - Lifetime
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| WO2006004999A1 (en) | 2006-01-12 |
| US8142845B2 (en) | 2012-03-27 |
| ATE499333T1 (de) | 2011-03-15 |
| ES2359412T3 (es) | 2011-05-23 |
| DE602005026523D1 (de) | 2011-04-07 |
| EP1761475A1 (en) | 2007-03-14 |
| US20060003098A1 (en) | 2006-01-05 |
| US20110059240A1 (en) | 2011-03-10 |
| US7799375B2 (en) | 2010-09-21 |
| EP1761475B1 (en) | 2011-02-23 |
| JP2008505045A (ja) | 2008-02-21 |
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