JP5042038B2 - 半導体装置を製造する方法 - Google Patents
半導体装置を製造する方法 Download PDFInfo
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- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 5
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 229910006501 ZrSiO Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052756 noble gas Inorganic materials 0.000 claims description 2
- 239000011574 phosphorus Substances 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28079—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a single metal, e.g. Ta, W, Mo, Al
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
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- H01L21/02321—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment introduction of substances into an already existing insulating layer
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- H01L21/02107—Forming insulating materials on a substrate
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- H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/495—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a simple metal, e.g. W, Mo
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
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- H01L21/02107—Forming insulating materials on a substrate
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- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
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Description
またさらに、H2ガスの流量は、約5sccmと約30sccmとの間であっても良い。
Claims (28)
- 半導体装置のゲートスタックを処理する方法であって:
基板を用意する工程であって、この基板に形成される誘電体層と、この誘電体層に形成され金属含有ゲート電極層と、を有するゲートスタックを含む当該基板を用意する工程;
スロットプレーンアンテナプラズマ源により、プラズマ中でプロセスガスから低エネルギー励起ドーパント種を生成する工程;および
前記ゲートスタックにドーパントを取り込むため、前記ゲートスタックを前記励起ドーパント種に晒す工程;
を含む方法。 - 前記低エネルギー励起ドーパント種がラジカル若しくはイオン、または双方を含む、請求項1に記載の方法。
- 前記誘電体層がSiO2、SiON,若しくはhigh−κ層、またはこれらの2又は3以上の組み合わせを有する、請求項1に記載の方法。
- 前記high−κ層が、Ta2O5、TiO2、ZrO2、Al2O3、Y2O3、HfSiOx、HfO2、ZrO2、ZrSiOx、TaSiOx、SrOx、SrSiOx、LaOx、LaSiOx、YOx、若しくはYSiOx、または、これらの2又は3以上の組み合わせを有する、請求項3に記載の方法。
- 前記金属含有ゲート電極層が、W、WN、Al、Mo、Ta、TaN、TaSiN、HfN、HfSiN、Ti、TiN、TiSiN、Mo、MoN、Re、またはRuを有する、請求項1に記載の方法。
- 前記ゲート電極層、前記誘電体層、または双方に前記ドーパントを取り込む工程を更に有する、請求項1に記載の方法。
- 前記生成する工程が、窒素含有ガス、リン含有ガス、砒素含有ガス、炭素含有ガス、シリコン含有ガス、ゲルマニウム含有ガス、ボロン含有ガス、アンチモン含有ガス、チタン含有ガス、タンタル含有ガス、若しくはアルミニウム含有ガス、または、これらの2又は3以上の組み合わせを有するプロセスガスを提供するステップを有する、請求項1に記載の方法。
- 前記生成する工程が、NH3、N2、PH3、AsH3、SbH3、CH4、SiH4、Si2H6、B2H6、GeH4、TiCl4、TaCl5、若しくはAl2Cl6、または、これらの2又は3以上の組み合わせを含むプロセスガスを提供するステップを含む、請求項1に記載の方法。
- 前記ドーパントは、N、P、As、Sb、C、Si、B、Ge、Ti、Ta、若しくはAl、または、これらの2又は3以上の組み合わせを有する、請求項1に記載の方法。
- 前記ドーパントは、p型ドーパントまたはn型ドーパントを含む、請求項1に記載の方法。
- 前記生成する工程は、希ガスを含むプロセスガスの提供を含む、請求項1に記載の方法。
- 前記励起ドーパント種は、1000eVより低い運動エネルギーを有する、請求項1に記載の方法。
- 前記励起ドーパント種は、100eVより低い運動エネルギーを有する、請求項1に記載の方法。
- 前記励起ドーパント種は、2eVより低い運動エネルギーを有する、請求項1に記載の方法。
- 前記晒す工程が、プロセスチャンバの圧力を1mTorr(0.133Pa)と3,000mTorr(400Pa)との間に維持することにより行われる、請求項1に記載の方法。
- 前記晒す工程が、前記基板を0℃と1000℃との間の温度に維持することを含む、請求項1に記載の方法。
- 前記励起ドーパント種へ晒した後に引き続く前記ゲートスタックをアニールする工程であって、当該アニール中に前記ゲートスタックを700℃と1000℃との間の温度に維持するアニール工程を更に含む、請求項1に記載の方法。
- 前記晒す工程が、ゲートスタックの各層へ取り込まれるドーパントの量を制御し、前記ゲートスタックの仕事関数を制御することを更に有する、請求項1に記載の方法。
- 前記ゲートスタックが、前記誘電体層と前記基板との間に位置する表面界面層を更に有する、請求項1に記載の方法。
- 前記晒す工程が、前記基板上に前記誘電体層を堆積するよう構成される第1のプロセスシステムと、前記誘電体層上に前記金属含有ゲート電極層を堆積するよう構成される第2のプロセスシステムとに作動可能に結合されるプラズマプロセスシステムで実施される、請求項1に記載の方法。
- 半導体装置のゲートスタックを処理するシステムであって:
イオンビーム源を有しないプラズマプロセスチャンバ;
基板を提供するよう構成される基板ホルダであって、該基板に形成される誘電体層と該誘電体層に形成される金属含有ゲート電極層とを有するゲートスタックを含む当該基板を提供するよう構成される基板ホルダ;および
プラズマ中でプロセスガスから低エネルギー励起ドーパント種を生成するよう構成されるスロットプレーンアンテナプラズマ源、
を備えるシステム。 - 前記ドーパントを前記ゲート電極層のサブレーヤのみに取り込む工程を更に含む、請求項1に記載の方法。
- 前記ドーパントを前記誘電体層および前記ゲート電極層の双方に取り込む工程を更に含む、請求項1に記載の方法。
- 前記生成する工程が、1×1012/cm3より大きいプラズマ密度と、1.5eVより低い電子温度とを有するプラズマを生成するステップを含む、請求項1に記載の方法。
- バイアスが付与されない基板ホルダに前記基板を用意する工程を更に含む、請求項1に記載の方法。
- 前記晒す工程が、前記ゲートスタックを非イオン性のドーパント励起種に晒すステップを含む、請求項1に記載の方法。
- 前記スロットプレーンアンテナプラズマ源が、1×1012/cm3より大きいプラズマ密度と、1.5eVより低い電子温度とを有するプラズマを生成するように構成される、請求項21に記載のシステム。
- 前記基板を支持する、バイアス源に結合されない基板ホルダを更に備える、請求項21に記載のシステム。
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US11/045,124 US7393761B2 (en) | 2005-01-31 | 2005-01-31 | Method for fabricating a semiconductor device |
US11/045,124 | 2005-01-31 | ||
PCT/US2005/043293 WO2006083380A2 (en) | 2005-01-31 | 2005-11-30 | Method for fabricating a semiconductor device |
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JP2008532262A5 JP2008532262A5 (ja) | 2009-02-19 |
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JP (1) | JP5042038B2 (ja) |
KR (1) | KR101161468B1 (ja) |
CN (1) | CN101128922B (ja) |
WO (1) | WO2006083380A2 (ja) |
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JP2007088199A (ja) * | 2005-09-22 | 2007-04-05 | Canon Inc | 処理装置 |
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WO2011145633A1 (en) * | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
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US8003503B1 (en) | 2010-09-30 | 2011-08-23 | Tokyo Electron Limited | Method of integrating stress into a gate stack |
US20130149852A1 (en) * | 2011-12-08 | 2013-06-13 | Tokyo Electron Limited | Method for forming a semiconductor device |
JP2013165254A (ja) * | 2012-01-13 | 2013-08-22 | Tokyo Electron Ltd | プラズマドーピング装置、プラズマドーピング方法、半導体素子の製造方法、および半導体素子 |
WO2013164940A1 (ja) * | 2012-05-01 | 2013-11-07 | 東京エレクトロン株式会社 | 被処理基体にドーパントを注入する方法、及びプラズマドーピング装置 |
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JP4198903B2 (ja) * | 2001-08-31 | 2008-12-17 | 株式会社東芝 | 半導体記憶装置 |
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CN101128922B (zh) | 2010-06-09 |
US20060172474A1 (en) | 2006-08-03 |
JP2008532262A (ja) | 2008-08-14 |
CN101128922A (zh) | 2008-02-20 |
KR101161468B1 (ko) | 2012-07-02 |
WO2006083380A2 (en) | 2006-08-10 |
US7393761B2 (en) | 2008-07-01 |
WO2006083380A3 (en) | 2007-06-21 |
KR20070100719A (ko) | 2007-10-11 |
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