JP5022164B2 - 角速度センサ - Google Patents

角速度センサ Download PDF

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Publication number
JP5022164B2
JP5022164B2 JP2007261220A JP2007261220A JP5022164B2 JP 5022164 B2 JP5022164 B2 JP 5022164B2 JP 2007261220 A JP2007261220 A JP 2007261220A JP 2007261220 A JP2007261220 A JP 2007261220A JP 5022164 B2 JP5022164 B2 JP 5022164B2
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JP
Japan
Prior art keywords
axis direction
angular velocity
vibrator
velocity sensor
pair
Prior art date
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Expired - Fee Related
Application number
JP2007261220A
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English (en)
Japanese (ja)
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JP2009092430A (ja
JP2009092430A5 (enExample
Inventor
雅英 田村
秀和 矢野
肇 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hokuriku Electric Industry Co Ltd
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Hokuriku Electric Industry Co Ltd
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Publication date
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Priority to JP2007261220A priority Critical patent/JP5022164B2/ja
Publication of JP2009092430A publication Critical patent/JP2009092430A/ja
Publication of JP2009092430A5 publication Critical patent/JP2009092430A5/ja
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Publication of JP5022164B2 publication Critical patent/JP5022164B2/ja
Expired - Fee Related legal-status Critical Current
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JP2007261220A 2007-10-04 2007-10-04 角速度センサ Expired - Fee Related JP5022164B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007261220A JP5022164B2 (ja) 2007-10-04 2007-10-04 角速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007261220A JP5022164B2 (ja) 2007-10-04 2007-10-04 角速度センサ

Publications (3)

Publication Number Publication Date
JP2009092430A JP2009092430A (ja) 2009-04-30
JP2009092430A5 JP2009092430A5 (enExample) 2010-06-03
JP5022164B2 true JP5022164B2 (ja) 2012-09-12

Family

ID=40664566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007261220A Expired - Fee Related JP5022164B2 (ja) 2007-10-04 2007-10-04 角速度センサ

Country Status (1)

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JP (1) JP5022164B2 (enExample)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05240874A (ja) * 1991-12-06 1993-09-21 Canon Inc 角速度センサ
JPH07131280A (ja) * 1993-10-28 1995-05-19 Toyota Motor Corp 振動子の支持構造
JPH0823258A (ja) * 1994-07-06 1996-01-23 Murata Mfg Co Ltd 振動子および振動ジャイロ
JPH10213440A (ja) * 1997-01-29 1998-08-11 Japan Aviation Electron Ind Ltd 振動ジャイロの製造方法及びその方法により製造された振動ジャイロ
JP3579015B2 (ja) * 2000-10-10 2004-10-20 日本電信電話株式会社 マイクロミラー装置およびその製造方法
US6935759B1 (en) * 2002-02-19 2005-08-30 Glimmerglass Networks, Inc. Folded longitudinal torsional hinge for gimbaled MEMS mirror

Also Published As

Publication number Publication date
JP2009092430A (ja) 2009-04-30

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