JP5019824B2 - 部材の接合手段及び/又ははんだ付け手段の形成方法 - Google Patents
部材の接合手段及び/又ははんだ付け手段の形成方法 Download PDFInfo
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- JP5019824B2 JP5019824B2 JP2006224827A JP2006224827A JP5019824B2 JP 5019824 B2 JP5019824 B2 JP 5019824B2 JP 2006224827 A JP2006224827 A JP 2006224827A JP 2006224827 A JP2006224827 A JP 2006224827A JP 5019824 B2 JP5019824 B2 JP 5019824B2
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- 238000005476 soldering Methods 0.000 title description 6
- 239000000463 material Substances 0.000 claims description 41
- 229910000679 solder Inorganic materials 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 15
- 238000005530 etching Methods 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
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- 229910052710 silicon Inorganic materials 0.000 description 4
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
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- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 229910001174 tin-lead alloy Inorganic materials 0.000 description 1
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- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
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Description
多層基板上にチップをハイブリッド形成することにより、導電性はんだバンプを用いてチップの相互接続を行なうことは、このような小型化を可能にした技術的成果の一つである。「フリップチップ」としてよく知られるこの技術は、セラミック基板上に多数のチップをハイブリッド形成することを可能にする。
同じ分野での異なる応用例では、パッケージ、保護カバー、又はこれらと等価な構造体の内部に多数の超小型部材を封入し、これにより、超小型部材を衝撃、腐食、浮遊電磁放射等から保護することを可能にする。
このようなパッケージ又は保護カバーは、従来、当該部材の周囲に設けられた接合シーム又は封入シームを用いて、一般に接着面とも呼ばれる濡れ性の領域又は表面上に封着される。
現在、このようなはんだシームの製造又はハイブリッド形成のためのバンプ又はマイクロバンプの設置を可能にする複数の技術が既知である。
以下の技術が例として挙げられる。
− マスキングとはんだを使用した蒸着法
− 「はんだジェット方式」、インクジェットプリンタに使用されるインク液滴と同様な、はんだの液滴を噴射する方式。
− 電気分解法
− スクリーン印刷法
また、これらの技術の多くは、特にそれらに必要な操作のために、実施にかかる費用が大きい。
本発明は、基板上に部材を接合及び/又ははんだ付け、或いは封入する手段を形成する方法に関する。
− 前記基板上に、必要であれば導電性を有する、延性材料からなる層を堆積し、
− このようにして製造した層を、エッチングしたダイを使用して打抜き加工し、
エッチングは、前記接合手段及び/又ははんだ付け手段に所望の形状に応じて行う。
換言すれば、本発明は、製造段階において、特に周囲温度で、コインの鋳造に使用されている周知の技術と類似の方式を用いて、延性を有して変形可能な材料を単一工程で成型するか、或いは前記材料の融点に近い温度、場合によっては融点温度より高い温度で同工程を行う。
以前に堆積された延性材料の層の厚さが適切なもので、ダイによる正確な打抜き加工を行うことが可能であれば、結果として異なる高さの材料を実現できることは明らかである。
本発明の第一の実施形態において、これらの濡れ性領域又は表面は、はんだ付け手段又は接合手段に所望される形状に応じて正確に形成される。即ち、濡れ性領域又は表面は、本発明の方法によって形成される接合エレメント及び/又ははんだエレメントが同一基板上で占める表面と、略、対応する基板の表面に形成される。
本発明によれば、形状成形又は打ち抜き処理の後、最後に、延性材料の融点を越える温度で再溶解することにより、延性材料に所望の形状を付与する。
本発明の実施方法、及びその結果得られる利点は、添付図面を参照し、例示のみを目的とする以下の実施形態の説明により更に明らかになる。
この原理によれば、基板1は通常シリコンを素材とし、例えば300mmのウエハから構成される。
次いで、穿孔部4を有するダイ3(図1b)、或いは穿孔部4の内部に形成されて穿孔部4を画定する形状7、8を有するダイ3(図2及び図3a参照)を用いて打抜き加工処理が行われる。
しかしながら、ダイの操作は、ウエハの全域に対して一括して行うこともできる。この場合、ダイの大きさはウエハ1と同じであり、その打抜き加工処理は一回で行われる。
これを行うために、形状7、8の下方壁部及びダイの下側表面を、例えばポリテトラフルオロエチレン(PTFE)からなる非粘着性の被覆剤でコーティングし、次いで圧力P4で押圧される延性材料からなる層2の表面にダイを適用する。その後ダイを引き戻し、前記ダイの形状7、8に対応する形状を連続して画定する。
剥離処理が終了した後も、窪んだ部分にははんだの残渣が残ることが多いが、これらはエッチングによって除去される。
バンプの形状は、表面張力の減少という自然現象を利用して形成され、はんだシームを用いる場合、略、円形の断面が再溶融により形成される。
このために、はんだ層2を堆積させる前に、シリコンCMOSウエハを製造するファンドリ工程に引続き、特に無電解法を用いてオープンパッド上にニッケルからなるバリア層を形成する。
本発明によれば、二つの選択肢が存在する。第一の選択肢は、はんだエレメントがシームであるかマイクロバンプであるかに関係なく、はんだエレメントが最終的に配置される位置にのみ、ニッケル/金の二重層を形成することである(図2参照)。
この場合、濡れ性領域を予めエッチングし、はんだエレメント又は接合エレメントを構成する延性材料からなる層2の堆積及び形状化又は打抜き処理を上述のように行う。
いずれの場合も、打抜き加工後に形成された形状の間に延性材料の薄膜が残る。この場合、この残渣を除去するために、エッチング処理を行わねばならない。これを行うため、形状の上面及び形状間の、延性材料の薄い層をエッチングすることにより、表面全域をリフレッシュする。
第二の実施形態では、このエッチングの後に、形状間のバリア層を除去するための第二のエッチングを行う。
1cmの幅を有するチップ(表面積=108μm2)に対し、1.8μm厚のインジウム層を堆積させる。これにより、延性材料の体積は1.8x108μm3に等しくなる。次いで、60x60μmのパッドが1000個形成されるようにエッチングしたダイによってこのチップを打抜き加工する。はんだはパッドの全域を事実上完全に覆い、パッドの高さは約50μmである。
また、本方法によれは、封入シームと密封用の接合バンプとを同時に形成することが可能であり、特に保護カバー又はパッケージを使用して部材を気密に密封することができる。
2 延性材料の層
3 ダイ
4 打ち抜き部(突起)
5 矢印(加圧)
6 延性材料の層の残渣
7 形状1
8 形状2
9 円筒状バンプ(最終形状)
10 金/ニッケル層(濡れ性を有する層)
11 延性材形状1
12 延性材形状2
13 引き戻し
15 CMOSウエハ
16 導電性アルミニウムパッド
17 CMOSウエハ表面
18 はんだ
Claims (9)
- 基板(1)上に、部材を接合、或いは封入するための、複数のはんだエレメントを形成する方法であって、
− はんだ延性材料の層(2)を前記基板(1)上に堆積させること、及び、
− このようにして形成した前記はんだ延性材料の層(2)を、前記はんだエレメントの所望の形状に応じてエッチングされたダイ(3)を用いて型押しすること、を含むことを特徴とする方法。 - 前記はんだ延性材料が導電性であることを特徴とする、請求項1の方法。
- 前記型押しされた前記はんだ延性材料の層(2)の形状の間に残余する材料(6)を、前記型押しされた前記はんだ延性材料の層(2)に対するエッチング処理によって除去することを特徴とする、請求項1又は2に記載の方法。
- 前記ダイ(3)のエッチングの深さが同一であるか又は異なることを特徴とする、請求項1ないし3のいずれか1項に記載の方法。
- 前記はんだ延性材料の層(2)は、前記部材が装着される前記基板(1)上に予め形成した濡れ性を有する表面又は領域(10)上に堆積させることを特徴とする、請求項1ないし4のいずれか1項に記載の方法。
- 前記濡れ性を有する表面又は領域(10)は、ニッケルからなるバリア層上に、金の層を形成した二重層からなることを特徴とする、請求項5に記載の方法。
- 前記濡れ性を有する表面又は領域(10)は、前記はんだエレメントが最終的に配置される位置にのみ形成することを特徴とする、請求項5又は6に記載の方法。
- 前記基板(1)の、全面を覆うように前記濡れ性を有する表面又は領域(10)を形成すること、及び前記はんだ延性材料の層(2)を堆積させ、前記はんだ延性材料の層(2)を前記ダイ(3)を用いて型押しした後、前記はんだエレメントが最終的に配置される位置以外の領域から、前記濡れ性を有する表面又は領域(10)を構成する層を、前記はんだ延性材料の層(2)をマスクとして機能させて、エッチングにより除去することを特徴とする、請求項5又は6に記載の方法。
- 前記はんだエレメントの所望の形状は、はんだ延性材料の融点を超える温度で再溶融させることよって形成することを特徴とする、請求項1ないし8のいずれか1項に記載の方法。
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DE112011102924T5 (de) | 2010-09-03 | 2013-07-18 | Ntn Corporation | Lagerbaugruppe mit Rotationssensor |
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US7509733B2 (en) | 2009-03-31 |
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