JP5018250B2 - Semiconductor device and manufacturing method thereof - Google Patents

Semiconductor device and manufacturing method thereof Download PDF

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JP5018250B2
JP5018250B2 JP2007148277A JP2007148277A JP5018250B2 JP 5018250 B2 JP5018250 B2 JP 5018250B2 JP 2007148277 A JP2007148277 A JP 2007148277A JP 2007148277 A JP2007148277 A JP 2007148277A JP 5018250 B2 JP5018250 B2 JP 5018250B2
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temperature
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brazing material
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JP2008300792A (en
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祐二 飯塚
良成 池田
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Fuji Electric Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001—Core members of the layer connector
    • H01L2224/29075—Plural core members
    • H01L2224/29076—Plural core members being mutually engaged together, e.g. through inserts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001—Core members of the layer connector
    • H01L2224/29075—Plural core members
    • H01L2224/2908—Plural core members being stacked
    • H01L2224/29083—Three-layer arrangements
    • H—ELECTRICITY
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    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/83801—Soldering or alloying
    • H01L2224/83815—Reflow soldering
    • H—ELECTRICITY
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    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/8384—Sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H01L2924/13055—Insulated gate bipolar transistor [IGBT]

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Description

この発明は、パワー用ＩＧＢＴモジュールなどを対象とする混相分散型接合材を用いた半導体装置およびその製造方法に関する。   The present invention relates to a semiconductor device using a mixed phase dispersion type bonding material intended for power IGBT modules and the like, and a method for manufacturing the same.

図８は、従来のＩＧＢＴモジュールの要部断面図である。図８において、１は放熱用銅ベース、２はセラミック板２ａの上面，下面に銅回路パターン２ｂ，銅箔２ｃを成層して銅ベース１に搭載した絶縁基板、３，４はＩＧＢＴ，ＦＷＤの半導体素子、５５は銅ベース１／絶縁基板の銅箔２ｃ，および絶縁基板の銅回路パターン２ｂ／半導体素子３，４の間を接合した半田接合層、６は銅ベース１の下面にサーマルコンパウンド７を挟んで伝熱的に接合し冷却体（ヒートシンク）であり、銅ベース１／銅箔２ｃ，および銅回路パターン２ｂ／半導体素子（半導体チップ３，４）の間を接合する半田材には板半田あるいはクリーム半田を使用し、リフロー法により接合して半田接合層５５を形成している。なお、図８では半導体素子３の上面電極に接合した配線部材、モジュール外囲ケースなどは省略して描かれてない。   FIG. 8 is a cross-sectional view of a main part of a conventional IGBT module. In FIG. 8, 1 is a heat-dissipating copper base, 2 is an insulating substrate mounted on the copper base 1 with a copper circuit pattern 2b and a copper foil 2c formed on the upper and lower surfaces of the ceramic plate 2a, and 3 and 4 are IGBTs and FWDs. A semiconductor element 55 is a copper base 1 / a copper foil 2c of an insulating substrate and a copper circuit pattern 2b of the insulating substrate / a solder bonding layer joining the semiconductor elements 3 and 4, and 6 is a thermal compound 7 on the lower surface of the copper base 1. It is a cooling body (heat sink) that is heat-transferred and sandwiched between the copper base 1 / copper foil 2c and the copper circuit pattern 2b / semiconductor element (semiconductor chips 3 and 4). Solder or cream solder is used and bonded by a reflow method to form the solder bonding layer 55. In FIG. 8, the wiring member joined to the upper surface electrode of the semiconductor element 3, the module enclosing case, and the like are omitted and not drawn.

一方、最近では環境問題からＳｎ−Ｐｂ系半田の代替として鉛成分を含まない鉛フリー半田が採用されるようになっており、前記のＩＧＢＴモジュール（パワーモジュール）に適用する半田材（低温金属ロウ材）としては、現在知られている各種組成の鉛フリー半田の中でも、取りわけ接合性（半田濡れ性）、機械的特性，伝熱抵抗などの面で比較的バランスがよく、かつ製品への実績もあるＳｎ−Ａｇ系の鉛（Ｐｂ）フリー半田が多く使われている（例えば、非特許文献１参照）。   On the other hand, lead-free solder containing no lead component has recently been adopted as an alternative to Sn—Pb solder due to environmental problems, and a solder material (low-temperature metal solder) applied to the IGBT module (power module). Among the currently known lead-free solders of various compositions, the material has a relatively good balance in terms of jointability (solder wettability), mechanical properties, heat transfer resistance, etc. Sn-Ag lead (Pb) -free solder, which has a proven track record, is often used (see Non-Patent Document 1, for example).

また、特許文献１において、第１の金属と第２の金属とを接合するに当たり、２つの金属の間にＣｕポーラス板を介在させ、第１の金属とＣｕポーラス板との間、第２の金属とＣｕポーラス板との間にそれぞれＡｇナノペーストを配置して加熱して接合することが記載されている。
両角，他２名，「パワー半導体モジュールにおける信頼性設計技術」，富士時報，富士電機株式会社，平成１３年２月１０日，第７４巻，第２号，ｐ１４５〜１４８ 特開２００６−２０２９４４号公報 Moreover, in patent document 1, in joining a 1st metal and a 2nd metal, a Cu porous board is interposed between two metals, and between a 1st metal and a Cu porous board, 2nd It is described that an Ag nano paste is disposed between a metal and a Cu porous plate and bonded by heating.
Both corners, two others, "Reliability design technology in power semiconductor modules", Fuji Jiho, Fuji Electric Co., Ltd. February 10, 2001, Vol. 74, No. 2, p145-148 JP 2006-202944 A

ところで、先記のようにＳｎ−Ａｇ系の鉛フリー半田にて半導体素子／絶縁基板間を接合した半導体モジュールについて、そのパワーサイクル寿命を明らかにするために行ったパワーサイクル試験（モジュールの実動作を模擬した断続通電試験）で半田接合部に発生した亀裂（欠陥）の進展形態を観察したところ、Ｐｂ系の半田とは亀裂発生の形態が異なりＳｎＡｇ系の鉛フリー半田では、図９で表すように発熱密度が集中する半導体チップ３の中央部下付近を起点としてほぼ同心円状に亀裂２４が進展することが認められている。また、この亀裂２４の特徴は、半田接合層５５の厚さ方向に対して平行な縦割れ，または網目状を呈してＳｎの結晶粒界を選択的に進展している。このことから、ＳｎＡｇ系の鉛フリー半田では熱劣化（組織変化）によって亀裂２４が進行するものと想定される（非特許文献１のｐ１４７参照）。   By the way, the power cycle test (actual operation of the module) performed to clarify the power cycle life of the semiconductor module in which the semiconductor element / insulating substrate is joined with Sn-Ag lead-free solder as described above. 9), the progress of cracks (defects) occurring in the solder joints was observed. The SnAg lead-free solder is different from the Pb solder in the form of cracks, and is shown in FIG. Thus, it is recognized that the crack 24 progresses substantially concentrically starting from the vicinity of the central portion of the semiconductor chip 3 where the heat generation density is concentrated. The crack 24 is characterized by a vertical crack parallel to the thickness direction of the solder bonding layer 55 or a network shape, and the Sn crystal grain boundary is selectively advanced. For this reason, it is assumed that the crack 24 proceeds due to thermal deterioration (structural change) in SnAg-based lead-free solder (see p147 of Non-Patent Document 1).

つまり、この場合の半田接合層５５内部の破壊進展は、作業性の容易さから半田の融点が２００〜３００℃程度と低いことと、線膨張係数の半導体素子（シリコン：α≒３．０ｐｐｍ／Ｋ）及び絶縁基板の配線素材（銅など：α≒１８．０ｐｐｍ／Ｋ）のミスマッチによる熱応力が半田に加わることと、半田接合材自体の再結晶化に伴う組織変化が起こることにより、特にＳｎリッチな鉛フリー半田において寿命を著しく損なわれるものと想定される。   That is, in this case, the breakage progress in the solder bonding layer 55 is that the melting point of the solder is as low as about 200 to 300 ° C. for ease of workability, and that the semiconductor element having a linear expansion coefficient (silicon: α≈3.0 ppm / K) and the wiring material of the insulating substrate (copper, etc .: α≈18.0 ppm / K) due to the thermal stress applied to the solder and the structural change caused by recrystallization of the solder bonding material itself, It is assumed that the life is significantly impaired in Sn-rich lead-free solder.

前記のように、半導体素子（半導体チップ３）と絶縁基板２との間をＳｎＡｇ系の鉛フリー半田で接合した半導体装置では、実使用時のヒートサイクルにより半導体チップ３の中央部下付近の半田接合層５５が熱劣化（組織変化）して亀裂２４，割れが生じ、これが原因で半導体素子／絶縁基板間の熱抵抗が増加して半導体素子のジャンクション温度（Ｔｊ）が動作を保証する最高保証温度(最大定格)を超えるようになって素子機能がダウンするおそれがあり、このことが製品のパワーサイクル寿命を縮める要因になっている。   As described above, in the semiconductor device in which the semiconductor element (semiconductor chip 3) and the insulating substrate 2 are joined with SnAg-based lead-free solder, the solder joint near the lower part of the center of the semiconductor chip 3 is caused by the heat cycle in actual use. The layer 55 is thermally deteriorated (organizational change) to generate cracks 24 and cracks. This causes an increase in the thermal resistance between the semiconductor element and the insulating substrate, and the junction temperature (Tj) of the semiconductor element guarantees the maximum operation temperature. There is a risk that the device function will be lowered when the value exceeds (maximum rating), and this is a factor that shortens the power cycle life of the product.

また、特許文献１によれば、金属粒子を塗布硬化させることなどでポーラス層を形成することやポーラス層を半田接合に用いることなどについては開示がされていない。   Further, according to Patent Document 1, there is no disclosure about forming a porous layer by applying and curing metal particles or using the porous layer for solder bonding.

この発明の目的は、前記の課題を解決して、実使用中に半導体素子の中央部付近を起点に発生する接合層の熱劣化、亀裂を防止して、高いパワーサイクル耐性と信頼性の向上が図れるように改良した半導体装置およびその製造方法を提供することにある。   The object of the present invention is to solve the above-mentioned problems and prevent thermal degradation and cracking of the bonding layer that occurs from the vicinity of the central portion of the semiconductor element during actual use, thereby improving high power cycle resistance and reliability. An object of the present invention is to provide an improved semiconductor device and a method for manufacturing the same.

前記の目的を達成するために、半導体チップの主面と導体を固着してなる半導体装置において、前記半導体チップの主面に金属粒子ペーストを塗布して高温にて硬化した第１の下地層と、前記導体の表面に金属粒子ペーストを塗布して高温にて硬化した第２の下地層と、前記第１の下地層に金属粒子ペーストを塗布して低温にて硬化した第１の表面膜および前記第２の下地層に金属粒子ペーストを塗布して低温にて硬化した第２の表面膜の間で低温金属ロウ材を溶融し、第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材に分散吸収させて形成した高温化金属ロウ材の層と、を少なくとも備える接合層で前記半導体チップの主面と前記導体を固着した構成とする。 In order to achieve the above object, in a semiconductor device in which a main surface of a semiconductor chip and a conductor are fixed, a first undercoat layer coated with a metal particle paste on the main surface of the semiconductor chip and cured at a high temperature; A second base layer coated with a metal particle paste on the surface of the conductor and cured at a high temperature; a first surface film coated with the metal particle paste on the first base layer and cured at a low temperature; The low temperature metal brazing material is melted between the second surface films coated with the metal particle paste on the second underlayer and cured at low temperature, and the metal particles of the first surface film and the second surface film are melted. The main surface of the semiconductor chip and the conductor are fixed to each other by a bonding layer including at least a high temperature metal brazing material layer formed by dispersing and absorbing the low temperature metal brazing material .

また、半導体チップの主面と導体を固着してなる半導体装置において、前記半導体チップの主面に金属粒子ペーストを塗布して高温にて硬化した第１の下地層と、前記導体の表面に金属粒子ペーストを塗布して高温にて硬化した第２の下地層と、前記第１の下地層に金属粒子ペーストを塗布して低温にて硬化した第１の表面膜および前記第２の下地層に金属粒子ペーストを塗布して低温にて硬化した第２の表面膜の間で低温金属ロウ材を溶融し、第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材に分散吸収させて形成した高温化金属ロウ材の層と、前記金属微粒子が分散しておらず、かつ、前記高温化金属ロウ材の層を囲むように配置された低温金属ロウ材の層と、を備える接合層で前記半導体チップの主面と前記導体を固着した構成とする。 Further, in a semiconductor device in which a main surface of a semiconductor chip and a conductor are fixed, a first underlayer that is coated with a metal particle paste on the main surface of the semiconductor chip and cured at a high temperature, and a metal is applied to the surface of the conductor. A second base layer coated with a particle paste and cured at a high temperature; a first surface film coated with a metal particle paste on the first base layer and cured at a low temperature; and the second base layer The metal particle paste is applied and the low temperature metal brazing material is melted between the second surface films cured at a low temperature, and the metal particles of the first surface film and the second surface film are dispersed in the low temperature metal brazing material. A layer of high-temperature metal brazing material formed by absorption, and a layer of low-temperature metal brazing material that is disposed so as to surround the layer of high-temperature metal brazing material and in which the metal fine particles are not dispersed. The main surface of the semiconductor chip and the conductor are fixed with a bonding layer provided. And configuration.

また、半導体チップの主面と導体を固着してなる半導体装置において、前記半導体チップの主面と前記導体の表面を、前記半導体チップの主面に金属粒子ペーストを塗布して硬化した第１の表面膜および前記導体の表面に金属粒子ペーストを塗布して硬化した第２の表面膜の間で低温金属ロウ材を溶融し、第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材に分散吸収させて形成した高温化金属ロウ材の層と、前記高温化金属ロウ材の層を囲むように配置された前記低温金属ロウ材と、を備える接合層で固着した構成とする。 Further, in the semiconductor device in which the main surface of the semiconductor chip and the conductor are fixed, the first surface obtained by applying a metal particle paste to the main surface of the semiconductor chip and curing the main surface of the semiconductor chip and the surface of the conductor. The low temperature metal brazing material is melted between the surface film and the second surface film that is cured by applying a metal particle paste to the surface of the conductor, and the metal particles of the first surface film and the second surface film are moved to the low temperature. A structure in which a layer of a high temperature metal brazing material formed by being dispersed and absorbed in a metal brazing material and the low temperature metal brazing material arranged so as to surround the layer of the high temperature metal brazing material are fixed by a joining layer. To do.

また、前記金属粒子ペーストを構成する金属粒子が１００μｍ以下の粒径のＺｎ粒子、Ａｕ粒子、Ａｇ粒子、Ａｌ粒子、Ｎｉ粒子、Ｓｂ粒子、Ｂｉ粒子、Ｓｎ粒子、Ｐｄ粒子およびＣｕ粒子のいずれか含むとよい。 The metal particles constituting the metal particle paste are any one of Zn particles, Au particles, Ag particles, Al particles, Ni particles, Sb particles, Bi particles, Sn particles, Pd particles, and Cu particles having a particle size of 100 μm or less. It is good to include.

また、前記低温金属ロウ材が、Ｓｎ−Ａｇ，Ｓｎ−Ａｇ−Ｃｕ，Ｓｎ−Ｃｕ，Ｓｎ−Ｚｎ，Ｓｎ−Ｉｎ，Ｓｎ−ＳｂおよびＳｎ−Ｂｉから選ばれるいずれかのＳｎリッチな鉛フリー半田、または、Ｉｎ、Ｂｉ、Ｓｂ、ＡｇおよびＣｕのいずれかを含む半田であるとよい。 The low-temperature metal brazing material may be any Sn-rich lead-free solder selected from Sn-Ag, Sn-Ag-Cu, Sn-Cu, Sn-Zn, Sn-In, Sn-Sb and Sn-Bi. Or a solder containing any of In, Bi, Sb, Ag, and Cu.

また、半導体チップの主面と導体を固着してなる半導体装置の製造方法において、
絶縁基板の回路パターン上と半導体チップの裏面に金属粒子ペーストをそれぞれ塗布する工程と、
該金属粒子ペーストを所定の温度で高温硬化させて、前記半導体チップの主面にポーラスな第１の下地層を、前記導体の表面にポーラスな第２の下地層を、それぞれ形成する工程と、
該第１の下地層および第２の下地層上にそれぞれ金属粒子ペーストを塗布し、前記高温硬化温度より低い所定の温度で低温硬化させて、前記第１の下地層上にポーラスな第１の表面膜を、前記第２の下地層上にポーラスな第２の表面膜を、それぞれ形成する工程と、
前記半導体チップ裏面に低温金属ロウ材の層を配置し、はんだリフロー炉で低温金属ロウ材の層を所定の温度で溶融させ、前記第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材の層に分散吸収させ該低温金属ロウ材より融点を高くした高温化金属ロウ材の層を形成し、前記半導体チップの裏面と回路パターンを前記第１の下地層、第２の下地層および前記高温化金属ロウ材の層を少なくとも備える接合層で接合する工程と、
を含む製造方法とする。 Further, in the method of manufacturing a semiconductor device formed by fixing the main surface of the semiconductor chip and the conductor,
Applying metal particle paste on the circuit pattern of the insulating substrate and on the back surface of the semiconductor chip,
Curing the metal particle paste at a predetermined temperature to form a porous first underlayer on the main surface of the semiconductor chip, and forming a porous second underlayer on the surface of the conductor;
A metal particle paste is applied to each of the first underlayer and the second underlayer, and is cured at a low temperature at a predetermined temperature lower than the high temperature curing temperature, so that a porous first layer is formed on the first underlayer. Forming a surface film, a porous second surface film on the second underlayer, and
A layer of low-temperature metal brazing material is disposed on the back surface of the semiconductor chip, the low-temperature metal brazing material layer is melted at a predetermined temperature in a solder reflow furnace, and the metal particles of the first surface film and the second surface film are A layer of a high temperature metal brazing material having a melting point higher than that of the low temperature metal brazing material is formed by dispersing and absorbing in the layer of the low temperature metal brazing material, and the back surface and circuit pattern of the semiconductor chip are connected to the first underlayer and the second layer. Bonding with a bonding layer comprising at least a foundation layer and a layer of the high-temperature metal brazing material;
It is set as the manufacturing method containing.

また、半導体チップの主面と導体を固着してなる半導体装置の製造方法において、
半導体チップの裏面の中央部と絶縁基板の回路パターン上に金属粒子ペーストをそれぞれ塗布する工程と、
該金属粒子ペーストを所定の温度で低温硬化させて、前記半導体チップの裏面の中央部にポーラスな第１の表面膜を、前記回路パターン上にポーラスな第２の表面膜を、それぞれ形成する工程と、
前記半導体チップ裏面全体に低温金属ロウ材の層を配置し、はんだリフロー炉で低温金属ロウ材を所定の温度で溶融させ、前記第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材の層に分散吸収させ該低温金属ロウ材より融点を高くした高温化金属ロウ材の層を形成し、前記半導体チップの裏面と回路パターンを前記高温化金属ロウ材の層と、前記高温化金属ロウ材の層を囲むように配置された前記低温金属ロウ材と、を備える接合層で接合する工程と、
を含む製造方法とする。 Further, in the method of manufacturing a semiconductor device formed by fixing the main surface of the semiconductor chip and the conductor,
A step of applying a metal particle paste on the center part of the back surface of the semiconductor chip and the circuit pattern of the insulating substrate, and
The metal particle paste is cured at a low temperature at a predetermined temperature to form a porous first surface film on the center of the back surface of the semiconductor chip and a porous second surface film on the circuit pattern. When,
A layer of a low-temperature metal brazing material is disposed on the entire back surface of the semiconductor chip, a low-temperature metal brazing material is melted at a predetermined temperature in a solder reflow furnace, and the metal particles of the first surface film and the second surface film are formed at the low temperature. Forming a high-temperature metal brazing material layer having a melting point higher than that of the low-temperature metal brazing material by being dispersed and absorbed in the metal brazing material layer; Bonding with a bonding layer comprising the low temperature metal brazing material disposed so as to surround the layer of the high temperature metal brazing material;
It is set as the manufacturing method containing.

また、半導体チップの主面と導体を固着してなる半導体装置の製造方法において、
半導体チップの裏面の全面と絶縁基板の回路パターン上に金属粒子ペーストをそれぞれ塗布する工程と、
該金属粒子ペーストを所定の温度で高温硬化させて、前記半導体チップの主面にポーラスな第１の下地層を、前記導体の表面にポーラスな第２の下地層を、それぞれ形成する工程と、
該第１の下地層および第２の下地層上にそれぞれ金属粒子ペーストを塗布し、前記高温硬化温度より低い所定の温度で低温硬化させ、前記第１の下地層上にポーラスな第１の表面膜を、前記第２の下地層上にポーラスな第２の表面膜を、それぞれ形成する工程と、
前記半導体チップ裏面全体に低温金属ロウ材の層を配置し、はんだリフロー炉で低温金属ロウ材の層を所定の温度で溶融させ、前記表面膜の金属粒子を前記低温金属ロウ材の層に分散吸収させ該低温金属ロウ材より融点を高くした高温化金属ロウ材の層を形成し、前記半導体チップの裏面と回路パターンを前記第１の下地層、第２の下地層および前記高温化金属ロウ材の層を備える接合層で接合する工程と、
を含む製造方法とする。 Further, in the method of manufacturing a semiconductor device formed by fixing the main surface of the semiconductor chip and the conductor,
Applying metal particle paste on the entire back surface of the semiconductor chip and on the circuit pattern of the insulating substrate,
Curing the metal particle paste at a predetermined temperature to form a porous first underlayer on the main surface of the semiconductor chip, and forming a porous second underlayer on the surface of the conductor;
A metal particle paste is applied to each of the first underlayer and the second underlayer, cured at a low temperature at a predetermined temperature lower than the high temperature curing temperature, and a porous first surface on the first underlayer. Forming a porous second surface film on the second underlayer, respectively,
A layer of low-temperature metal brazing material is disposed on the entire back surface of the semiconductor chip, the low-temperature metal brazing material layer is melted at a predetermined temperature in a solder reflow furnace, and the metal particles of the surface film are dispersed in the low-temperature metal brazing material layer. A layer of a high temperature metal brazing material having a melting point higher than that of the low temperature metal brazing material is formed, and the back surface and circuit pattern of the semiconductor chip are formed on the first base layer, the second base layer, and the high temperature metal brazing material. Joining with a joining layer comprising a layer of material;
It is set as the manufacturing method containing.

また、金属粒子ペーストを所定の温度で高温硬化させて、前記半導体チップの主面にポーラスな第１の下地層を、前記導体の表面にポーラスな第２の下地層を、それぞれ形成する工程の代わりに、金属粒子を噴霧して、前記半導体チップの主面にポーラスな第１の下地層を、前記導体の表面にポーラスな第２の下地層を、それぞれ形成してもよい。または、金属粒子ペーストを所定の温度で低温硬化させて、前記半導体チップの裏面の中央部にポーラスな第１の表面膜を、前記回路パターン上にポーラスな第２の表面膜を、それぞれ形成する工程の代わりに、金属粒子を噴霧して、前記半導体チップの裏面の中央部にポーラスな第１の表面膜を、前記回路パターン上にポーラスな第２の表面膜を、それぞれ形成
してもよい。 A step of curing the metal particle paste at a high temperature at a predetermined temperature to form a porous first underlayer on the main surface of the semiconductor chip and a porous second underlayer on the surface of the conductor; Instead, metal particles may be sprayed to form a porous first underlayer on the main surface of the semiconductor chip and a porous second underlayer on the surface of the conductor . Alternatively, the metal particle paste is cured at a low temperature at a predetermined temperature to form a porous first surface film on the center of the back surface of the semiconductor chip and a porous second surface film on the circuit pattern, respectively. Instead of a process, metal particles are sprayed to form a porous first surface film on the center of the back surface of the semiconductor chip and a porous second surface film on the circuit pattern, respectively.
May be.

この発明によれば、半導体チップの裏側と銅配線パターンおよび半導体チップの表側とヒートスプレッダとの固着に本発明の接合層を用いることで、耐熱性およびパワーサイクル性に強い接合性を確保し、半導体装置の信頼性を向上させることができる。   According to the present invention, the bonding layer of the present invention is used for fixing the back side of the semiconductor chip to the copper wiring pattern and the front side of the semiconductor chip to the heat spreader, thereby ensuring a bonding property having high heat resistance and power cycle characteristics. The reliability of the apparatus can be improved.

この接合層は、金属粒子ペーストを高温硬化させて形成した下地層と、金属粒子ペーストを低温硬化させて形成した表面膜の金属粒子が低温金属ロウ材に分散吸収されて形成された高温化金属ロウ材の層で構成される。   This bonding layer consists of an underlayer formed by high-temperature curing of a metal particle paste, and a high temperature metal formed by dispersing and absorbing metal particles of a surface film formed by low-temperature curing of a metal particle paste into a low-temperature metal brazing material. It consists of a layer of brazing material.

または、この接合層は、金属粒子ペーストを低温硬化させて形成した表面膜の金属粒子が低温金属ロウ材に分散吸収されて形成された高温化金属ロウ材の層である。   Alternatively, this bonding layer is a layer of a high temperature metal brazing material formed by dispersing and absorbing metal particles of a surface film formed by curing a metal particle paste at a low temperature into a low temperature metal brazing material.

この高温化金属ロウ材の層を実動作で高温になる半導体チップの中央部に形成すると効果的である。   It is effective to form this high-temperature metal brazing material layer in the central portion of the semiconductor chip that becomes hot during actual operation.

実施の形態を以下の実施例で説明する。本発明のポイントは、半導体チップと導体を接合する接合層の材質を低温金属ロウ材にこれより高融点の金属粒子を微細分散させることで低融点の低温金属ロウ材を高融点化した高温化金属ロウ材に変質させて混相分散型接合材にしたことである。尚、下記の図において、従来構造と同一の部位には同一の符号を付した。   Embodiments will be described in the following examples. The point of the present invention is that the material of the bonding layer that joins the semiconductor chip and the conductor is finely dispersed in the low-temperature metal brazing material, thereby increasing the temperature of the low-melting low-temperature metal brazing material to a high melting point. That is, it is transformed into a metal brazing material to form a mixed phase dispersion type bonding material. In addition, in the following figure, the same code | symbol was attached | subjected to the site | part same as the conventional structure.

図１は、この発明の第１実施例の半導体装置の要部断面図である。図１において、１は放熱用銅ベース、２はセラミック板２ａの上面，下面に銅回路パターン２ｂ，銅箔２ｃを成層して銅ベース１に搭載した絶縁基板、３，４はＩＧＢＴ，ＦＷＤの半導体素子、５は絶縁基板の銅回路パターン２ｂ／半導体素子（半導体チップ３，４）の間を接合した接合層、６は銅ベース１の下面にサーマルコンパウンド７を挟んで伝熱的に接合し冷却体（ヒートシンク）、１５は銅ベース１／絶縁基板の銅箔２ｃの半田接合層である。なお、図２では半導体素子３の上面電極に接合した配線部材、モジュール外囲ケースなどは省略して描かれてない。   FIG. 1 is a cross-sectional view of a main part of a semiconductor device according to a first embodiment of the present invention. In FIG. 1, 1 is a heat-dissipating copper base, 2 is an insulating substrate mounted on the copper base 1 with a copper circuit pattern 2b and a copper foil 2c formed on the upper and lower surfaces of the ceramic plate 2a, and 3 and 4 are IGBTs and FWDs. A semiconductor element 5 is a bonding layer in which the copper circuit pattern 2b / semiconductor element (semiconductor chips 3 and 4) of the insulating substrate is bonded, and 6 is heat-transferably bonded to the lower surface of the copper base 1 with a thermal compound 7 interposed therebetween. A cooling body (heat sink), 15 is a solder joint layer of a copper base 1 / copper foil 2c of an insulating substrate. In FIG. 2, the wiring member bonded to the upper surface electrode of the semiconductor element 3, the module enclosing case, and the like are not omitted.

図２は、図１のうち半導体チップの裏面と絶縁基板２ａ表面側の銅回路パターン２ｂとの接合層５の図であり、同図（ａ）は要部断面図、同図（ｂ）は要部平面図である。接合層５は中央部に焼結された金属粒子のポーラス状（多孔質状）の下地層８ａと高温化金属ロウ材の層８ｂが配置され、その外周部に低温金属ロウ材の層９が配置されている。   FIG. 2 is a view of the bonding layer 5 between the back surface of the semiconductor chip and the copper circuit pattern 2b on the front surface side of the insulating substrate 2a in FIG. 1. FIG. 2 (a) is a cross-sectional view of the main part, and FIG. It is a principal part top view. The bonding layer 5 includes a porous (porous) base layer 8a of sintered metal particles and a high-temperature metal brazing material layer 8b disposed in the center, and a low-temperature metal brazing material layer 9 on the outer periphery thereof. Has been placed.

製造工程の途中においては、金属粒子の層は下地層８ａと表面膜８ｅ（図３参照）の２層となっており、半導体チップ３および銅回路パターン２ｂと接する側から順に下地層８ａと、この下地層８ａ上に表面膜８ｅが形成されている。半導体チップ３と銅回路パターン２ｂのそれぞれの表面膜８ｅの間に低温金属ロウ材の層９（図示せず）を挟み熱処理することで表面膜８ｅを形成する金属粒子が低温金属ロウ材の層９に分散し吸収されて硬化膜が形成される。この硬化膜は高温化した金属ロウ材の層（以下、高温化金属ロウ材の層８ｂという）となる。   In the middle of the manufacturing process, the metal particle layer is composed of two layers, an underlayer 8a and a surface film 8e (see FIG. 3), and the underlayer 8a in order from the side in contact with the semiconductor chip 3 and the copper circuit pattern 2b, A surface film 8e is formed on the base layer 8a. A layer 9 (not shown) of a low-temperature metal brazing material is sandwiched between the surface films 8e of the semiconductor chip 3 and the copper circuit pattern 2b, and the metal particles forming the surface film 8e are heat-treated layers. 9 is dispersed and absorbed to form a cured film. This cured film becomes a layer of metal brazing material having a high temperature (hereinafter referred to as a layer 8b of high temperature metal brazing material).

また、表面膜８ｅを取り囲むように低温金属ロウ材の層９が配置されているので、接合層５は金属粒子の下地層８ａと高温化金属ロウ材の層８および低温金属ロウ材の層９で構成されることになる。   Further, since the low-temperature metal brazing material layer 9 is disposed so as to surround the surface film 8 e, the bonding layer 5 includes the metal particle base layer 8 a, the high-temperature metal brazing material layer 8, and the low-temperature metal brazing material layer 9. It will consist of

高温硬化および低温硬化された金属粒子で形成される下地層８ａと表面膜８ｅおよび鉛フリー半田などの低温金属ロウ材の層９について説明する。まず、下地層８ａと表面膜８ｅについて説明する。   The underlayer 8a, the surface film 8e, and the layer 9 of a low-temperature metal brazing material such as lead-free solder, which are formed of high-temperature and low-temperature-cured metal particles, will be described. First, the underlayer 8a and the surface film 8e will be described.

下地層８ａと表面膜８ｅは金属粒子ペーストを用いて形成する。金属ペーストは、Ａｇなどの金属粒子（粒子径はｎｍ〜１００μｍのオーダー：金属粉体という場合もある）を樹脂や有機溶剤に分散させてペースト状にしたものである。金属粒子ペーストは、熱硬化性樹脂などで金属粒子間を充填したものと、揮発性の高いエタノール系溶剤で金属粒子間を充填したものに分類される。揮発性の高いエタノール系溶剤で金属粒子間を充填したものは加熱により粒子状の凝集物が焼結結合を形成しやすくまた溶剤が残留しない。このため、熱硬化性樹脂などで金属粒子間を充填したものより導電性、熱伝導性の面で有利である。   The underlayer 8a and the surface film 8e are formed using a metal particle paste. The metal paste is a paste obtained by dispersing metal particles such as Ag (particle size is on the order of nm to 100 μm: sometimes referred to as metal powder) in a resin or an organic solvent. Metal particle pastes are classified into those in which the space between metal particles is filled with a thermosetting resin or the like, and those in which the space between metal particles is filled with a highly volatile ethanol solvent. In the case where the metal particles are filled with a highly volatile ethanol-based solvent, the particulate aggregates easily form a sintered bond by heating, and the solvent does not remain. For this reason, it is more advantageous in terms of conductivity and thermal conductivity than those filled between metal particles with a thermosetting resin or the like.

図３は，半導体チップの裏面に金属粒子ペーストを塗布し加熱硬化させたときの状態を示し、同図（ａ）は高温硬化させた下地層８ａと低温硬化させた表面膜８ｅを示した図であり、同図（ｂ）は表面膜８ｅを微細に示した図であり、同図（ｃ）は下地層８ａを微細に示した図である。   FIG. 3 shows a state when a metal particle paste is applied to the back surface of the semiconductor chip and cured by heating. FIG. 3A shows a base layer 8a cured at a high temperature and a surface film 8e cured at a low temperature. FIG. 6B is a diagram showing the surface film 8e in detail, and FIG. 10C is a diagram showing the underlayer 8a in detail.

金属粒子ペーストは低い温度で加熱して溶剤を揮発させる（低温硬化させる）ことにより、図３（ｂ）に示したようにクラスター１１の硬化膜である中温金属ロウ材の層となるが、このままだとお互いの結合は強くなく容易に分解する。この状態を利用したのが表面膜８ｅである。   The metal particle paste is heated at a low temperature to volatilize the solvent (low-temperature curing), thereby forming a medium-temperature metal brazing material layer that is a cured film of the cluster 11 as shown in FIG. Then, the bond between each other is not strong and easily breaks down. The surface film 8e uses this state.

金属粒子ペーストを高温での熱処理で高温硬化させることにより、図３（ｃ）に示すようにクラスターが分解して小さなクラスター１２に微細化する一方、微細化したクラスター１２の間を架橋１３するような部分的な結合状態が生じ、形成された硬化膜は高温金属ロウ材の層８ａとなり、その接合強度を高くすることができる。   By curing the metal particle paste at a high temperature by heat treatment at a high temperature, as shown in FIG. 3C, the clusters are decomposed to be miniaturized into small clusters 12, while the micronized clusters 12 are cross-linked 13 to each other. Thus, a partially bonded state is generated, and the formed cured film becomes the high-temperature metal brazing material layer 8a, and the bonding strength can be increased.

つぎに、低温金属ロウ材の層９について説明する。この低温金属ロウ材は低温半田と言われるものであり、その中でもここでは鉛が含有されていない半田のことを示す。具体的にはＳｎ−Ａｇ，Ｓｎ−Ａｇ−Ｃｕ，Ｓｎ−Ｃｕ，Ｓｎ−Ｚｎ，Ｓｎ−Ｉｎ，Ｓｎ−ＳｂおよびＳｎ−ＢｉなどのＳｎリッチな鉛フリー半田やＩｎ、Ｂｉ、Ｓｂ、Ａｇ、Ｃｕなどの半田である。   Next, the layer 9 of the low-temperature metal brazing material will be described. This low-temperature metal brazing material is called a low-temperature solder, and among them, here, it indicates a solder containing no lead. Specifically, Sn-rich lead-free solders such as Sn-Ag, Sn-Ag-Cu, Sn-Cu, Sn-Zn, Sn-In, Sn-Sb and Sn-Bi, and In, Bi, Sb, Ag, It is a solder such as Cu.

つぎに，図４の半導体装置の製造方法を説明する。   Next, a method for manufacturing the semiconductor device of FIG. 4 will be described.

図４は、図１の半導体装置の製造方法であり、同図（ａ）〜同図（ｆ）は工程順に示した要部製造工程断面図である。ここでは図２に相当に部分の製造工程を示す。   FIG. 4 shows a manufacturing method of the semiconductor device of FIG. 1, and FIGS. 4A to 4F are cross-sectional views of main part manufacturing steps shown in the order of steps. Here, the manufacturing process of a part is shown in FIG.

同図（ａ）において、半導体チップ３の裏面上と図示しない絶縁基板の銅回路パターン２ｂ上の中央部に金属粒子ペースト８ｄをそれぞれ塗布する（図では半導体チップ３側のみ示した）。   In FIG. 2A, a metal particle paste 8d is applied to the back surface of the semiconductor chip 3 and to the central portion on the copper circuit pattern 2b of an insulating substrate (not shown) (only the semiconductor chip 3 side is shown in the figure).

同図（ｂ）において、低温硬化温度より高い４００℃以上の高温で高温硬化させ高温金属ロウ材の層である下地層８ａを形成する。この金属粒子ペースト８ｄは、粒子径が１００μｍ以下の粒径のＺｎ粒子、Ａｕ粒子、Ａｇ粒子、Ａｌ粒子、Ｎｉ粒子、Ｓｂ粒子、Ｂｉ粒子、Ｓｎ粒子、Ｐｄ粒子およびＣｕ粒子のいずれかの粒子を溶剤に混入してペースト状としたものでその粘度は３０Ｐａ・ｓである。勿論、金属粒子には粒子径がナノオーダの金属ナノ粒子も含む。   In FIG. 2B, the base layer 8a, which is a layer of a high-temperature metal brazing material, is formed by high-temperature curing at a high temperature of 400 ° C. or higher, which is higher than the low-temperature curing temperature. This metal particle paste 8d is made of any one of Zn particles, Au particles, Ag particles, Al particles, Ni particles, Sb particles, Bi particles, Sn particles, Pd particles, and Cu particles having a particle size of 100 μm or less. Is mixed in a solvent to form a paste, and its viscosity is 30 Pa · s. Of course, the metal particles include metal nanoparticles having a particle size of nano-order.

同図（ｃ）において、下地層８ａ上に金属粒子ペースト８ｄを塗布する。   In FIG. 2C, a metal particle paste 8d is applied on the base layer 8a.

同図（ｄ）において、３００℃以上の温度で低温硬化させ、中温金属ロウ材の層である表面膜８ｅを形成する。   In FIG. 4D, the surface film 8e, which is a layer of a medium temperature metal brazing material, is formed by low temperature curing at a temperature of 300 ° C. or higher.

同図（ｅ）において、半導体チップ３の裏面に形成された表面膜８ｅ上とそれ以外の全領域に鉛フリー半田などの低温金属ロウ材を塗布もしくは個形化したペレットを配置し低温金属ロウ材の層９とし、図示しない銅回路パターン２ｂ上にこの低温金属ロウ材の層９が付いた半導体チップ３を載せて、はんだリフロー炉２２（例えば、２５０℃／２ｍｉｎ）で中央部の低温金属ロウ材の層９を溶融させ、中温金属ロウ材の層で形成された表面膜８ｅ中の金属粒子を低温金属ロウ材の層９に微細分散させ、半導体チップ３の裏面と銅回路パターン２ｂを固着する。この工程で低温金属ロウ材の層９は表面膜８ｅの金属粒子を吸収して高温化金属ロウ材の層８ｂに変質し、表面膜８ｅは消滅する。そのため接合層５は下地層８ａと高温化金属ロウ材の層８および外周部の低温金属ロウ材９で構成される。前記の低温金属ロウ材としては、Ｓｎ−Ａｇ，Ｓｎ−Ａｇ−Ｃｕ，Ｓｎ−Ｃｕ，Ｓｎ−Ｚｎ，Ｓｎ−Ｉｎ，Ｓｎ−ＳｂおよびＳｎ−ＢｉなどのＳｎリッチな鉛フリー半田やＩｎ、ＢｉおよびＣｕなどの半田である。   In FIG. 4E, low temperature metal brazing is performed by placing pellets coated or singulated with a low temperature metal brazing material such as lead-free solder on the surface film 8e formed on the back surface of the semiconductor chip 3 and all other regions. A semiconductor chip 3 having the low-temperature metal brazing material layer 9 is placed on a copper circuit pattern 2b (not shown) as a material layer 9, and a low-temperature metal at the center in a solder reflow furnace 22 (for example, 250 ° C./2 min). The brazing material layer 9 is melted, and the metal particles in the surface film 8e formed of the intermediate temperature metal brazing material layer are finely dispersed in the low temperature metal brazing material layer 9, and the back surface of the semiconductor chip 3 and the copper circuit pattern 2b are formed. Stick. In this process, the low-temperature metal brazing material layer 9 absorbs the metal particles of the surface film 8e and transforms into a high-temperature metal brazing material layer 8b, and the surface film 8e disappears. Therefore, the bonding layer 5 is composed of the base layer 8a, the layer 8 of the high-temperature metal brazing material, and the low-temperature metal brazing material 9 on the outer periphery. Examples of the low-temperature metal brazing material include Sn-rich lead-free solder such as Sn—Ag, Sn—Ag—Cu, Sn—Cu, Sn—Zn, Sn—In, Sn—Sb, and Sn—Bi, and In, Bi. And solder such as Cu.

また、接合層５の中央部においては、接合層５を形成する過程で、ゆるい結合状態のクラスター状の高温融点を有する微細粒子（表面層８ｅの中温金属ロウ材中の金属粒子）が、凝集状態から溶融状態にある低温金属ロウ材の層９の内部に微細分散して微細粒子が密になる箇所が接合後に形成され高温化金属ロウ材の層８ｂとなる。   In the central portion of the bonding layer 5, in the process of forming the bonding layer 5, fine particles having a clustered high temperature melting point in a loosely bonded state (metal particles in the medium temperature metal brazing material of the surface layer 8e) are aggregated. A portion where the fine particles are finely dispersed and fine particles are densely formed inside the layer 9 of the low-temperature metal brazing material in a molten state from the state is formed after the joining, and becomes a high-temperature metal brazing material layer 8b.

また、低温金属ロウ材が前記したＳｎ−Ａｇ，Ｓｎ−Ａｇ−Ｃｕなどの鉛フリー半田であって、表面層８ｅの中温金属ロウ材の層の金属粒子が純Ａｇ、Ｃｕ、Ｚｎ、Ａｕ、、Ａｌ、Ｎｉ、Ｓｂ、Ｂｉ、Ｓｎ、ＰｄおよびＣｕなどであると、接合層５が形成される場合、凝集粒子が分散し、個別粒子の半田界面での固相反応が進展するので前記の図５に示すように、中央付近の接合層５では金属粒子の密度が高くなった状態での接合状態となる。すなわち、高温相の高密度箇所では合金組成として融点の高い構成となるので接合に用いた低温金属ロウ材の層９の実装温度よりも接合した後の耐熱温度が向上する高温化金属ロウ材の層８ｂとになり、先述した半導体チップ３の接合部の高温耐量を向上させ、高いパワーサイクル性が確保できて半導体装置の信頼性を向上させることとなる。   Further, the low-temperature metal brazing material is lead-free solder such as Sn-Ag, Sn-Ag-Cu described above, and the metal particles of the intermediate temperature metal brazing material layer of the surface layer 8e are pure Ag, Cu, Zn, Au, , Al, Ni, Sb, Bi, Sn, Pd, Cu, and the like, when the bonding layer 5 is formed, the aggregated particles are dispersed and the solid phase reaction at the solder interface of the individual particles proceeds. As shown in FIG. 5, the bonding layer 5 near the center is in a bonded state with the metal particles having a high density. That is, the high-temperature metal brazing material has a higher melting point as the alloy composition in the high-density portion of the high-temperature phase, so that the heat-resistant temperature after joining is higher than the mounting temperature of the low-temperature metal brazing material layer 9 used for joining. It becomes the layer 8b and improves the high-temperature tolerance of the joint portion of the semiconductor chip 3 described above, ensuring high power cycle performance and improving the reliability of the semiconductor device.

また、高温化金属ロウ材の層８ｂは図５に示すように実動作の際に高温状態が想定される中央部に形成するとよい。   Further, as shown in FIG. 5, the high-temperature metal brazing material layer 8b is preferably formed in the central portion where a high-temperature state is assumed in actual operation.

同図（ｆ）において、リフロー炉２２から半導体チップ３と銅回路パターン２ｂが接合層５で固着した状態で取り出す。   In FIG. 8F, the semiconductor chip 3 and the copper circuit pattern 2b are taken out from the reflow furnace 22 in a state where they are fixed by the bonding layer 5.

尚、同図（ａ）〜同図（ｄ）の工程において、下地層８ａおよび表面膜８ｅの形成において、下地層８ａは金属粒子（金属粉体）を音速に近い噴流（ジェット流）で衝突させて形成し、表面膜８ｅは音速の半分から７割程度の速度にした噴流（ジェット流）で金属粒子（金属粉体）を衝突させて形成してもよい。この高温金属ロウ材で形成された下地層８ａおよび中温金属ロウ材で形成された表面膜８ｅはポーラス膜である。   In the steps of FIGS. 4A to 4D, in the formation of the base layer 8a and the surface film 8e, the base layer 8a collides metal particles (metal powder) with a jet (jet flow) close to the speed of sound. The surface film 8e may be formed by causing metal particles (metal powder) to collide with a jet (jet flow) at a speed of about half to 70% of the speed of sound. The base layer 8a formed of the high temperature metal brazing material and the surface film 8e formed of the medium temperature metal brazing material are porous films.

図６は、この発明の第２実施例の半導体装置の要部断面図である。図１との違いは、下地層８ａを形成しないで高温化金属ロウ材８ｂのみ形成した点である。この場合，下地層８ａがないために図１と比べて半導体チップ３や銅回路パターン２ｂとの界面の接合強度が弱まるが従来の低温金属ロウ材（低温半田）の層９のみの接合と比べれば接合強度は強くなる。以下にその製造方法を図４を参照しながら説明する。   FIG. 6 is a cross-sectional view of the main part of the semiconductor device according to the second embodiment of the present invention. The difference from FIG. 1 is that only the high-temperature metal brazing material 8b is formed without forming the base layer 8a. In this case, since there is no underlying layer 8a, the bonding strength at the interface with the semiconductor chip 3 and the copper circuit pattern 2b is weaker than in FIG. 1, but compared with the conventional bonding of only the layer 9 of the low-temperature metal brazing material (low-temperature solder). As a result, the bonding strength increases. The manufacturing method will be described below with reference to FIG.

銅回路パターン２ｂ上と半導体チップ３の裏面の中央部に金属粒子ペースト８ｄをそれぞれ塗布する。   A metal particle paste 8d is applied on the copper circuit pattern 2b and on the center of the back surface of the semiconductor chip 3, respectively.

つぎに、金属粒子ペースト８ｄを３００℃以上の温度で低温硬化させてポーラスな表面膜８ｅを形成する。   Next, the metal particle paste 8d is cured at a low temperature of 300 ° C. or more to form a porous surface film 8e.

つぎに、前記半導体チップ３裏面全体に低温金属ロウ材の層９を配置し、はんだリフロー炉２２で低温金属ロウ材の層９を溶融させ、表面膜８ｅの金属粒子を低温金属ロウ材の層９に分散吸収させ、硬化させて高温化金属ロウ材の層８ｂを形成し、前記半導体チップ３の裏面と銅回路パターン２ｂを下地層８ａと高温化金属ロウ材の８および周囲の低温金属ロウ材の層９で構成される接合層５で接合する。   Next, a layer 9 of low-temperature metal brazing material is disposed on the entire back surface of the semiconductor chip 3, and the layer 9 of low-temperature metal brazing material is melted in a solder reflow furnace 22, so that the metal particles of the surface film 8e are layered on the low-temperature metal brazing material. 9 is dispersed and absorbed and cured to form a layer 8b of high-temperature metal brazing material, and the back surface of the semiconductor chip 3 and the copper circuit pattern 2b are connected to the underlayer 8a, the high-temperature metal brazing material 8 and the surrounding low-temperature metal brazing material. It joins by the joining layer 5 comprised with the layer 9 of material.

図７は、この発明の第３実施例の半導体装置の要部断面図である。図１との違いは、全面に下地膜を形成した点である。全面に下地膜８ａを形成すると、下地層８ａはポーラス膜であるため、接合部分の空隙体積が増加して図１の場合に比べて接合強度の低下を招くが，従来の低温金属ロウ材（低温半田）の層９のみの接合に比べれば接合強度は高くなる。また、表面膜８ｅも製造工程途中で全面に形成するが、表面膜８ｅの金属粒子は低温金属ロウ材の層９中に分散吸収されて低温金属ロウ材の層９が高温化金属ロウ材の層８ｂに変質して表面膜８ｅは消滅する。   FIG. 7 is a fragmentary cross-sectional view of a semiconductor device according to a third embodiment of the present invention. The difference from FIG. 1 is that a base film is formed on the entire surface. When the base film 8a is formed on the entire surface, since the base layer 8a is a porous film, the void volume of the joint portion is increased and the joint strength is reduced as compared with the case of FIG. The bonding strength is higher than the bonding of only the low-temperature solder) layer 9. The surface film 8e is also formed on the entire surface during the manufacturing process. The metal particles of the surface film 8e are dispersed and absorbed in the layer 9 of the low-temperature metal brazing material, and the layer 9 of the low-temperature metal brazing material is made of the high-temperature metal brazing material. The surface film 8e disappears by changing to the layer 8b.

前記実施例は半導体チップ３の裏面側と銅配線パターン２ｂの固着に本発明の接合層５を用いた例を示したが、半導体チップ３の表側と図示しないヒートスプレッダの固着にこの接合層５を用いてもよい。以下にその製造方法を図４を参照しながら説明する。   In the above embodiment, the bonding layer 5 of the present invention is used for fixing the back side of the semiconductor chip 3 and the copper wiring pattern 2b. However, the bonding layer 5 is used for fixing the front side of the semiconductor chip 3 and a heat spreader (not shown). It may be used. The manufacturing method will be described below with reference to FIG.

銅回路パターン２ｂ上と半導体チップ３の裏面の全面に金属粒子ペースト８ｄをそれぞれ塗布する。   A metal particle paste 8d is applied on the copper circuit pattern 2b and the entire back surface of the semiconductor chip 3 respectively.

つぎに、金属粒子ペースト８ｄを低温硬化温度より高い４００℃以上の温度で高温硬化させてポーラスな下地層８ａをそれぞれ形成する。   Next, the metal particle paste 8d is cured at a high temperature at a temperature of 400 ° C. or higher, which is higher than the low temperature curing temperature, to form a porous base layer 8a.

つぎに、下地層８ａ上に金属粒子ペースト８ｄを塗布し、３００℃以上の温度で低温硬化させポーラスな表面膜８ｅを形成する。   Next, a metal particle paste 8d is applied on the base layer 8a and cured at a low temperature at a temperature of 300 ° C. or higher to form a porous surface film 8e.

つぎに、半導体チップ３裏面全体に低温金属ロウ材の層９を配置し、はんだリフロー炉２２で低温金属ロウ材の層９を溶融させ、表面膜８ｅの金属粒子を低温金属ロウ材の層９に分散吸収させ、硬化させて高温化金属ロウ材の層８ｂを形成し、半導体チップ３の裏面と銅回路パターン２ｂを下地層８ａと高温化金属ロウ材の層８ｂで構成される接合層で接合する。   Next, the low-temperature metal brazing material layer 9 is disposed on the entire back surface of the semiconductor chip 3, the low-temperature metal brazing material layer 9 is melted in the solder reflow furnace 22, and the metal particles of the surface film 8 e are transferred to the low-temperature metal brazing material layer 9. A high-temperature metal brazing material layer 8b is formed by being dispersed and absorbed into a bonding layer composed of a base layer 8a and a high-temperature metal brazing material layer 8b. Join.

この発明の第１実施例の半導体装置の要部断面図Sectional drawing of the principal part of the semiconductor device of 1st Example of this invention. 図１のうち半導体チップの裏面と絶縁基板２表面側の銅回路パターン２ｂとの接合層５の図であり、（ａ）は要部断面図、（ｂ）は要部平面図1A and 1B are diagrams of a bonding layer 5 between a back surface of a semiconductor chip and a copper circuit pattern 2b on the front surface side of an insulating substrate 2, in which FIG. 半導体チップの裏面に金属粒子ペーストを塗布し加熱硬化させたときの状態を示し、（ａ）は高温硬化させた下地層８ａと低温硬化させた表面膜８ｅを示した図であり、（ｂ）は表面膜８ｅを微細に示した図であり、（ｃ）は下地層８ａを微細に示した図The state when the metal particle paste is applied to the back surface of the semiconductor chip and cured by heating is shown, (a) is a diagram showing the base layer 8a cured at high temperature and the surface film 8e cured at low temperature, (b) Is a diagram showing the surface film 8e in detail, and (c) is a diagram showing the underlying layer 8a in detail. 図１の半導体装置の製造方法であり、（ａ）〜（ｆ）は工程順に示した要部製造工程断面図FIG. 2 is a manufacturing method of the semiconductor device of FIG. 半導体チップの中央部に高温化金属ロウ材の層８ｂを形成した図The figure which formed the layer 8b of the high temperature metal brazing material in the center part of the semiconductor chip この発明の第２実施例の半導体装置の要部断面図Sectional drawing of the principal part of the semiconductor device of 2nd Example of this invention この発明の第３実施例の半導体装置の要部断面図Sectional drawing of the principal part of the semiconductor device of 3rd Example of this invention. 従来のＩＧＢＴモジュールの要部断面図Sectional view of the main part of a conventional IGBT module 半導体チップ３の中央部下付近の半田接合層に亀裂が進展した様子を示す図The figure which shows a mode that the crack extended to the solder joint layer near the center part of the semiconductor chip 3

符号の説明Explanation of symbols

１ 放熱用ベース
２ 絶縁基板
２ａ セラミック板
２ｂ 銅回路パターン
２ｃ 銅箔
３ 半導体チップ（ＩＧＢＴ）
４ 半導体チップ（ＦＷＤ）
５ 接合層
６ 冷却体
７ サーマルコンパウンド
８ａ 下地層
８ｂ 高温化金属ロウ材の層
８ｄ 金属粒子ペースト
８ｅ 表面膜
９ 低温金属ロウ材の層
１１ クラスター（大きい）
１２ クラスター（小さい）
１３ 架橋
１５ 半田層
２２ リフロー炉

DESCRIPTION OF SYMBOLS 1 Base for heat dissipation 2 Insulating substrate 2a Ceramic board 2b Copper circuit pattern 2c Copper foil 3 Semiconductor chip (IGBT)
4 Semiconductor chip (FWD)
5 Bonding layer 6 Cooling body 7 Thermal compound 8a Underlayer 8b High temperature metal brazing material layer 8d Metal particle paste 8e Surface film 9 Low temperature metal brazing material layer 11 Cluster (large)
12 clusters (small)
13 Crosslink 15 Solder layer 22 Reflow furnace

Claims (10)

半導体チップの主面と導体を固着してなる半導体装置において、前記半導体チップの主面に金属粒子ペーストを塗布して高温にて硬化した第１の下地層と、前記導体の表面に金属粒子ペーストを塗布して高温にて硬化した第２の下地層と、前記第１の下地層に金属粒子ペーストを塗布して低温にて硬化した第１の表面膜および前記第２の下地層に金属粒子ペーストを塗布して低温にて硬化した第２の表面膜の間で低温金属ロウ材を溶融し、第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材に分散吸収させて形成した高温化金属ロウ材の層と、を少なくとも備える接合層で前記半導体チップの主面と前記導体を固着したことを特徴とする半導体装置。 In a semiconductor device in which a main surface of a semiconductor chip and a conductor are fixed, a first underlayer cured by applying a metal particle paste to the main surface of the semiconductor chip and cured at a high temperature, and a metal particle paste on the surface of the conductor A second base layer cured at a high temperature, a first surface film coated with a metal particle paste on the first base layer and cured at a low temperature, and a metal particle on the second base layer The low-temperature metal brazing material is melted between the second surface films coated with paste and cured at a low temperature, and the metal particles of the first surface film and the second surface film are dispersed and absorbed in the low-temperature metal brazing material. A semiconductor device , wherein the main surface of the semiconductor chip and the conductor are fixed by a bonding layer including at least a layer of a high-temperature metal brazing material formed in the above . 半導体チップの主面と導体を固着してなる半導体装置において、前記半導体チップの主面に金属粒子ペーストを塗布して高温にて硬化した第１の下地層と、前記導体の表面に金属粒子ペーストを塗布して高温にて硬化した第２の下地層と、前記第１の下地層に金属粒子ペーストを塗布して低温にて硬化した第１の表面膜および前記第２の下地層に金属粒子ペーストを塗布して低温にて硬化した第２の表面膜の間で低温金属ロウ材を溶融し、第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材に分散吸収させて形成した高温化金属ロウ材の層と、前記金属微粒子が分散しておらず、かつ、前記高温化金属ロウ材の層を囲むように配置された低温金属ロウ材の層と、を備える接合層で前記半導体チップの主面と前記導体を固着したことを特徴とする半導体装置。 In a semiconductor device in which a main surface of a semiconductor chip and a conductor are fixed, a first underlayer cured by applying a metal particle paste to the main surface of the semiconductor chip and cured at a high temperature, and a metal particle paste on the surface of the conductor A second base layer cured at a high temperature, a first surface film coated with a metal particle paste on the first base layer and cured at a low temperature, and a metal particle on the second base layer The low-temperature metal brazing material is melted between the second surface films coated with paste and cured at a low temperature, and the metal particles of the first surface film and the second surface film are dispersed and absorbed in the low-temperature metal brazing material. a layer of high temperature metal brazing material formed Te, the metal particles are not dispersed, and junction and a layer of low-temperature metal brazing material disposed to surround said layer of high temperature brazing filler metal It was fixed to the main surface and the conductor of the semiconductor chip with a layer Wherein a and. 半導体チップの主面と導体を固着してなる半導体装置において、前記半導体チップの主面と前記導体の表面を、前記半導体チップの主面に金属粒子ペーストを塗布して硬化した第１の表面膜および前記導体の表面に金属粒子ペーストを塗布して硬化した第２の表面膜の間で低温金属ロウ材を溶融し、第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材に分散吸収させて形成した高温化金属ロウ材の層と、前記高温化金属ロウ材の層を囲むように配置された前記低温金属ロウ材と、を備える接合層で固着したことを特徴とする半導体装置。 In a semiconductor device formed by fixing a main surface of a semiconductor chip and a conductor, a first surface film obtained by applying a metal particle paste to the main surface of the semiconductor chip and curing the main surface of the semiconductor chip and the surface of the conductor. And a low-temperature metal brazing material is melted between the second surface films cured by applying a metal particle paste to the surface of the conductor, and the metal particles of the first surface film and the second surface film are fused with the low-temperature metal braze. A high-temperature metal brazing material layer dispersed and absorbed in a material and the low-temperature metal brazing material disposed so as to surround the high- temperature metal brazing material layer are fixed by a bonding layer. Semiconductor device. 前記金属粒子ペーストを構成する金属粒子が１００μｍ以下の粒径のＺｎ粒子、Ａｕ粒子、Ａｇ粒子、Ａｌ粒子、Ｎｉ粒子、Ｓｂ粒子、Ｂｉ粒子、Ｓｎ粒子、Ｐｄ粒子およびＣｕ粒子のいずれか含むことを特徴とする請求項１〜３のいずれか一項に記載の半導体装置。 The metal particles constituting the metal particle paste include any of Zn particles, Au particles, Ag particles, Al particles, Ni particles, Sb particles, Bi particles, Sn particles, Pd particles, and Cu particles having a particle size of 100 μm or less. The semiconductor device according to claim 1 , wherein: 前記低温金属ロウ材が、Ｓｎ−Ａｇ，Ｓｎ−Ａｇ−Ｃｕ，Ｓｎ−Ｃｕ，Ｓｎ−Ｚｎ，Ｓｎ−Ｉｎ，Ｓｎ−ＳｂおよびＳｎ−Ｂｉから選ばれるいずれかの鉛フリー半田、または、Ｉｎ、Ｂｉ、Ｓｂ、ＡｇおよびＣｕのいずれかを含む半田であることを特徴とする請求項１〜３のいずれか一項に記載の半導体装置。 The low-temperature metal brazing material is any one of lead-free solder selected from Sn-Ag, Sn-Ag-Cu, Sn-Cu, Sn-Zn, Sn-In, Sn-Sb and Sn-Bi , or In, The semiconductor device according to claim 1 , wherein the semiconductor device is solder containing any one of Bi, Sb, Ag, and Cu. 半導体チップの主面と導体を固着してなる半導体装置の製造方法において、
絶縁基板の回路パターン上と半導体チップの裏面に金属粒子ペーストをそれぞれ塗布する工程と、
該金属粒子ペーストを所定の温度で高温硬化させて、前記半導体チップの主面にポーラスな第１の下地層を、前記導体の表面にポーラスな第２の下地層を、それぞれ形成する工程と、
該第１の下地層および第２の下地層上にそれぞれ金属粒子ペーストを塗布し、前記高温硬化温度より低い所定の温度で低温硬化させて、前記第１の下地層上にポーラスな第１の表面膜を、前記第２の下地層上にポーラスな第２の表面膜を、それぞれ形成する工程と、
前記半導体チップ裏面に低温金属ロウ材の層を配置し、はんだリフロー炉で低温金属ロウ材の層を所定の温度で溶融させ、前記第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材の層に分散吸収させ該低温金属ロウ材より融点を高くした高温化金属ロウ材の層を形成し、前記半導体チップの裏面と回路パターンを前記第１の下地層、第２の下地層および前記高温化金属ロウ材の層を少なくとも備える接合層で接合する工程と、
を含むことを特徴とする半導体装置の製造方法。 In the manufacturing method of the semiconductor device formed by fixing the main surface of the semiconductor chip and the conductor,
Applying metal particle paste on the circuit pattern of the insulating substrate and on the back surface of the semiconductor chip,
Curing the metal particle paste at a predetermined temperature to form a porous first underlayer on the main surface of the semiconductor chip, and forming a porous second underlayer on the surface of the conductor ;
Each coating a metal particle paste to the first base layer and second base layer, wherein at a predetermined temperature lower than the high temperature curing temperature by low-temperature curing, porous first to said first base layer Forming a surface film, a porous second surface film on the second underlayer , and
A layer of low-temperature metal brazing material is disposed on the back surface of the semiconductor chip , the low-temperature metal brazing material layer is melted at a predetermined temperature in a solder reflow furnace, and the metal particles of the first surface film and the second surface film are A layer of a high temperature metal brazing material having a melting point higher than that of the low temperature metal brazing material is formed by dispersing and absorbing in the layer of the low temperature metal brazing material, and the back surface and circuit pattern of the semiconductor chip are connected to the first underlayer and the second layer . Bonding with a bonding layer comprising at least a foundation layer and a layer of the high-temperature metal brazing material;
A method for manufacturing a semiconductor device, comprising: 半導体チップの主面と導体を固着してなる半導体装置の製造方法において、
半導体チップの裏面の中央部と絶縁基板の回路パターン上に金属粒子ペーストをそれぞれ塗布する工程と、
該金属粒子ペーストを所定の温度で低温硬化させて、前記半導体チップの裏面の中央部にポーラスな第１の表面膜を、前記回路パターン上にポーラスな第２の表面膜を、それぞれ形成する工程と、
前記半導体チップ裏面全体に低温金属ロウ材の層を配置し、はんだリフロー炉で低温金属ロウ材を所定の温度で溶融させ、前記第１の表面膜および第２の表面膜の金属粒子を前記低温金属ロウ材の層に分散吸収させ該低温金属ロウ材より融点を高くした高温化金属ロウ材の層を形成し、前記半導体チップの裏面と回路パターンを前記高温化金属ロウ材の層と、前記高温化金属ロウ材の層を囲むように配置された前記低温金属ロウ材と、を備える接合層で接合する工程と、
を含むことを特徴とする半導体装置の製造方法。 In the manufacturing method of the semiconductor device formed by fixing the main surface of the semiconductor chip and the conductor,
A step of applying a metal particle paste on the center part of the back surface of the semiconductor chip and the circuit pattern of the insulating substrate, and
The metal particle paste is cured at a low temperature at a predetermined temperature to form a porous first surface film on the center of the back surface of the semiconductor chip and a porous second surface film on the circuit pattern. When,
A layer of a low-temperature metal brazing material is disposed on the entire back surface of the semiconductor chip, a low-temperature metal brazing material is melted at a predetermined temperature in a solder reflow furnace, and the metal particles of the first surface film and the second surface film are formed at the low temperature. Forming a high-temperature metal brazing material layer having a melting point higher than that of the low-temperature metal brazing material by being dispersed and absorbed in the metal brazing material layer, and connecting the back surface of the semiconductor chip and the circuit pattern to the high-temperature metal brazing material layer; Bonding with a bonding layer comprising the low temperature metal brazing material disposed so as to surround the layer of the high temperature metal brazing material ;
A method for manufacturing a semiconductor device, comprising: 半導体チップの主面と導体を固着してなる半導体装置の製造方法において、
半導体チップの裏面の全面と絶縁基板の回路パターン上に金属粒子ペーストをそれぞれ塗布する工程と、
該金属粒子ペーストを所定の温度で高温硬化させて、前記半導体チップの主面にポーラスな第１の下地層を、前記導体の表面にポーラスな第２の下地層を、それぞれ形成する工程と、
該第１の下地層および第２の下地層上にそれぞれ金属粒子ペーストを塗布し、前記高温硬化温度より低い所定の温度で低温硬化させ、前記第１の下地層上にポーラスな第１の表面膜を、前記第２の下地層上にポーラスな第２の表面膜を、それぞれ形成する工程と、
前記半導体チップ裏面全体に低温金属ロウ材の層を配置し、はんだリフロー炉で低温金属ロウ材の層を所定の温度で溶融させ、前記表面膜の金属粒子を前記低温金属ロウ材の層に分散吸収させ該低温金属ロウ材より融点を高くした高温化金属ロウ材の層を形成し、前記半導体チップの裏面と回路パターンを前記第１の下地層、第２の下地層および前記高温化金属ロウ材の層を備える接合層で接合する工程と、
を含むことを特徴とする半導体装置の製造方法。 In the manufacturing method of the semiconductor device formed by fixing the main surface of the semiconductor chip and the conductor,
Applying metal particle paste on the entire back surface of the semiconductor chip and on the circuit pattern of the insulating substrate ,
Curing the metal particle paste at a predetermined temperature to form a porous first underlayer on the main surface of the semiconductor chip, and forming a porous second underlayer on the surface of the conductor ;
The respective first underlayer and the second underlayer coating a metal particle paste, the high temperature curing temperature lower than the predetermined temperature is a low temperature cure, the first porous first surface on the underlayer Forming a porous second surface film on the second underlayer, respectively ,
A layer of low-temperature metal brazing material is disposed on the entire back surface of the semiconductor chip, the low-temperature metal brazing material layer is melted at a predetermined temperature in a solder reflow furnace, and the metal particles of the surface film are dispersed in the low-temperature metal brazing material layer. A layer of a high temperature metal brazing material having a melting point higher than that of the low temperature metal brazing material is formed, and the back surface and circuit pattern of the semiconductor chip are formed on the first base layer , the second base layer, and the high temperature metal brazing material. Joining with a joining layer comprising a layer of material;
A method for manufacturing a semiconductor device, comprising: 請求項６または８において、金属粒子ペーストを所定の温度で高温硬化させて、前記半導体チップの主面にポーラスな第１の下地層を、前記導体の表面にポーラスな第２の下地層を、それぞれ形成する工程の代わりに、金属粒子を噴霧して、前記半導体チップの主面にポーラスな第１の下地層を、前記導体の表面にポーラスな第２の下地層を、それぞれ形成することを特徴とする半導体装置の製造方法。 In Claim 6 or 8, the metal particle paste is cured at a high temperature at a predetermined temperature, and a porous first underlayer is formed on the main surface of the semiconductor chip, and a porous second underlayer is formed on the surface of the conductor. Instead of each forming step , metal particles are sprayed to form a porous first underlayer on the main surface of the semiconductor chip and a porous second underlayer on the conductor surface. A method of manufacturing a semiconductor device. 請求項７において、金属粒子ペーストを所定の温度で低温硬化させて、前記半導体チップの裏面の中央部にポーラスな第１の表面膜を、前記回路パターン上にポーラスな第２の表面膜を、それぞれ形成する工程の代わりに、金属粒子を噴霧して、前記半導体チップの裏面の中央部にポーラスな第１の表面膜を、前記回路パターン上にポーラスな第２の表面膜を、それぞれ形成することを特徴とする半導体装置の製造方法。In Claim 7, low temperature curing metal particle paste at a predetermined temperature, a porous first surface film on the center of the back surface of the semiconductor chip, a porous second surface film on the circuit pattern, Instead of the respective forming steps, metal particles are sprayed to form a porous first surface film on the center of the back surface of the semiconductor chip and a porous second surface film on the circuit pattern. A method for manufacturing a semiconductor device.
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