JP5011110B2 - 静電容量型圧力計のダイヤフラム取付構造 - Google Patents
静電容量型圧力計のダイヤフラム取付構造 Download PDFInfo
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- JP5011110B2 JP5011110B2 JP2007529506A JP2007529506A JP5011110B2 JP 5011110 B2 JP5011110 B2 JP 5011110B2 JP 2007529506 A JP2007529506 A JP 2007529506A JP 2007529506 A JP2007529506 A JP 2007529506A JP 5011110 B2 JP5011110 B2 JP 5011110B2
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- diaphragm
- outer peripheral
- peripheral edge
- pressure gauge
- cylindrical case
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- 230000002093 peripheral effect Effects 0.000 claims description 26
- 239000012530 fluid Substances 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 9
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- 238000004519 manufacturing process Methods 0.000 description 10
- 238000009530 blood pressure measurement Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
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- 230000035515 penetration Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
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- 235000013372 meat Nutrition 0.000 description 2
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- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Description
さらに、筒状ケースの外周面部に開先溝が設けられ、前記肉厚外周縁部分を熱溶融させて前記肉厚外周縁部分と前記筒状ケースの一端開口周りの前記端面部を溶接し固着していることを特徴とするものである。
2 円筒状ケース
2e 開口周りの端面部
3 ダイヤフラム
3a 肉厚外周縁部分
3b 中央部分
4 固定側電極
t 中央部分の厚み
t1 外周縁部分の厚み
sc. 対称の中心
図1は、本発明に係る静電容量型圧力計の一例を示す断面図であり、この静電容量型圧力計1は、ステンレス鋼等の耐腐食性素材から構成された円筒状ケース2の一端開口側にガス等の流体圧受圧用のダイヤフラム3が張設されているとともに、このダイヤフラム3の受圧面とは反対側の円筒状ケース2内の中央部には該ダイヤフラム3の撓み変位を電気容量の変化として取り出す固定側の電極4が設けられている。
Claims (2)
- その外周縁部分を中央部分よりも肉厚に形成された流体圧受圧用のダイヤフラムを有し、筒状ケースの一端開口周りの端面部に前記肉厚外周縁部分が押し当てられた状態で前記ダイヤフラムが張設されているとともに、このダイヤフラムの受圧面とは反対側の筒状ケース内には該ダイヤフラムの撓み変位を電気容量の変化として取り出す固定側電極が設けられており、
さらに、筒状ケースの外周面部に開先溝が設けられ、前記肉厚外周縁部分を熱溶融させて前記肉厚外周縁部分と前記筒状ケースの一端開口周りの前記端面部を溶接し固着していることを特徴とする静電容量型圧力計のダイヤフラム取付構造。 - 前記ダイヤフラムの肉厚外周縁部分が、該ダイヤフラムの厚みの中央を対称の中心として表裏対称形状に形成されている請求項1に記載の静電容量型圧力計のダイヤフラム取付構造。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007529506A JP5011110B2 (ja) | 2005-08-10 | 2006-08-02 | 静電容量型圧力計のダイヤフラム取付構造 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005231916 | 2005-08-10 | ||
JP2005231916 | 2005-08-10 | ||
JP2007529506A JP5011110B2 (ja) | 2005-08-10 | 2006-08-02 | 静電容量型圧力計のダイヤフラム取付構造 |
PCT/JP2006/315296 WO2007018088A1 (ja) | 2005-08-10 | 2006-08-02 | 静電容量型圧力計のダイヤフラム取付構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007018088A1 JPWO2007018088A1 (ja) | 2009-02-19 |
JP5011110B2 true JP5011110B2 (ja) | 2012-08-29 |
Family
ID=37727275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007529506A Active JP5011110B2 (ja) | 2005-08-10 | 2006-08-02 | 静電容量型圧力計のダイヤフラム取付構造 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7802482B2 (ja) |
EP (1) | EP1923685A1 (ja) |
JP (1) | JP5011110B2 (ja) |
KR (1) | KR101260271B1 (ja) |
CN (1) | CN101233400B (ja) |
WO (1) | WO2007018088A1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8656787B2 (en) * | 2009-03-30 | 2014-02-25 | Azbil Corporation | Electrostatic capacitive pressure sensor |
DE102009002990A1 (de) * | 2009-05-11 | 2010-11-18 | Robert Bosch Gmbh | Hochdrucksensor |
DE102011077829A1 (de) * | 2011-06-20 | 2012-12-20 | Endress + Hauser Gmbh + Co. Kg | Verfahren zur Herstellung eines Drucksensors: |
US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
MX2018002494A (es) * | 2015-08-27 | 2018-11-29 | Equinox Ophthalmic Inc | Identificacion y modificacion de presion intracorporal relacionada con los ojos. |
US10983538B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
GB2567610B (en) * | 2017-03-21 | 2021-07-21 | Nuron Ltd | Optical fibre pressure sensing apparatus employing longitudinal diaphragm |
WO2019150750A1 (ja) * | 2018-01-30 | 2019-08-08 | 日本電産コパル電子株式会社 | 圧力センサとその製造方法 |
DE102018131357A1 (de) * | 2018-12-07 | 2020-06-10 | Carl Freudenberg Kg | Sensorelement mit Befestigungsabschnitt |
KR102142649B1 (ko) * | 2018-12-28 | 2020-08-07 | 주식회사 현대케피코 | 근접센서 이용한 압력센서 |
CN113739989B (zh) * | 2021-11-01 | 2022-02-08 | 季华实验室 | 一种电容式薄膜真空计的感应膜片焊后张紧力控制方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07260617A (ja) * | 1994-03-23 | 1995-10-13 | Riken Corp | 圧力センサ及びそれを使用する圧力測定システム |
JPH08159900A (ja) * | 1994-12-05 | 1996-06-21 | Fuji Electric Co Ltd | 圧力センサ用感圧ダイアフラムの製造方法 |
JP2001050835A (ja) * | 1999-08-05 | 2001-02-23 | Tadahiro Omi | 圧力検出器の取付け構造 |
WO2004086457A2 (en) * | 2003-03-22 | 2004-10-07 | Horiba Stec, Inc. | Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4229723A (en) * | 1979-04-04 | 1980-10-21 | S&C Electric Company | Diaphragm having a pattern of reduced thickness in a high voltage, circuit-interrupting device |
US4617607A (en) * | 1985-12-10 | 1986-10-14 | Kavlico Corporation | High pressure capacitive transducer |
US4996627A (en) * | 1989-01-30 | 1991-02-26 | Dresser Industries, Inc. | High sensitivity miniature pressure transducer |
US5186055A (en) * | 1991-06-03 | 1993-02-16 | Eaton Corporation | Hermetic mounting system for a pressure transducer |
JPH0552737A (ja) | 1991-08-21 | 1993-03-02 | Kawasaki Steel Corp | 粒状性物体の粒度測定方法 |
JP2548932Y2 (ja) * | 1991-12-19 | 1997-09-24 | エヌオーケー株式会社 | 圧力センサ |
JPH07128170A (ja) * | 1993-11-05 | 1995-05-19 | Fuji Electric Co Ltd | 差圧検出装置 |
US5528452A (en) * | 1994-11-22 | 1996-06-18 | Case Western Reserve University | Capacitive absolute pressure sensor |
JP3265191B2 (ja) * | 1996-08-06 | 2002-03-11 | 株式会社山武 | ダイアフラムの溶接補助部材及び溶接方法 |
JPH11248583A (ja) * | 1998-03-04 | 1999-09-17 | Omron Corp | 静電容量型圧力センサ及びその製造方法 |
CN100367527C (zh) * | 2003-07-11 | 2008-02-06 | 友达光电股份有限公司 | 电容式半导体压力传感器 |
-
2006
- 2006-08-02 WO PCT/JP2006/315296 patent/WO2007018088A1/ja active Application Filing
- 2006-08-02 EP EP06782165A patent/EP1923685A1/en not_active Withdrawn
- 2006-08-02 JP JP2007529506A patent/JP5011110B2/ja active Active
- 2006-08-02 US US11/995,234 patent/US7802482B2/en active Active
- 2006-08-02 CN CN2006800274306A patent/CN101233400B/zh not_active Expired - Fee Related
-
2008
- 2008-01-18 KR KR1020087001431A patent/KR101260271B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07260617A (ja) * | 1994-03-23 | 1995-10-13 | Riken Corp | 圧力センサ及びそれを使用する圧力測定システム |
JPH08159900A (ja) * | 1994-12-05 | 1996-06-21 | Fuji Electric Co Ltd | 圧力センサ用感圧ダイアフラムの製造方法 |
JP2001050835A (ja) * | 1999-08-05 | 2001-02-23 | Tadahiro Omi | 圧力検出器の取付け構造 |
WO2004086457A2 (en) * | 2003-03-22 | 2004-10-07 | Horiba Stec, Inc. | Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis |
Also Published As
Publication number | Publication date |
---|---|
JPWO2007018088A1 (ja) | 2009-02-19 |
KR101260271B1 (ko) | 2013-05-03 |
US7802482B2 (en) | 2010-09-28 |
CN101233400A (zh) | 2008-07-30 |
US20090260447A1 (en) | 2009-10-22 |
WO2007018088A1 (ja) | 2007-02-15 |
KR20080041181A (ko) | 2008-05-09 |
CN101233400B (zh) | 2011-05-04 |
EP1923685A1 (en) | 2008-05-21 |
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