JP4990439B2 - 超音波発振装置及び超音波発振方法、洗浄装置及び洗浄方法 - Google Patents

超音波発振装置及び超音波発振方法、洗浄装置及び洗浄方法 Download PDF

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Publication number
JP4990439B2
JP4990439B2 JP2001050575A JP2001050575A JP4990439B2 JP 4990439 B2 JP4990439 B2 JP 4990439B2 JP 2001050575 A JP2001050575 A JP 2001050575A JP 2001050575 A JP2001050575 A JP 2001050575A JP 4990439 B2 JP4990439 B2 JP 4990439B2
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Japan
Prior art keywords
frequency
cleaning
oscillation
khz
cleaned
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Expired - Fee Related
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JP2001050575A
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Japanese (ja)
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JP2002248429A5 (enrdf_load_stackoverflow
JP2002248429A (ja
Inventor
大輔 松嶋
佐藤　　修
直哉 速水
晃一 樋口
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Toshiba Corp
Shibaura Mechatronics Corp
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Toshiba Corp
Shibaura Mechatronics Corp
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Priority to JP2001050575A priority Critical patent/JP4990439B2/ja
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Publication of JP2002248429A5 publication Critical patent/JP2002248429A5/ja
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  • Cleaning By Liquid Or Steam (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2001050575A 2001-02-26 2001-02-26 超音波発振装置及び超音波発振方法、洗浄装置及び洗浄方法 Expired - Fee Related JP4990439B2 (ja)

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JP2001050575A JP4990439B2 (ja) 2001-02-26 2001-02-26 超音波発振装置及び超音波発振方法、洗浄装置及び洗浄方法

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JP2001050575A JP4990439B2 (ja) 2001-02-26 2001-02-26 超音波発振装置及び超音波発振方法、洗浄装置及び洗浄方法

Publications (3)

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JP2002248429A JP2002248429A (ja) 2002-09-03
JP2002248429A5 JP2002248429A5 (enrdf_load_stackoverflow) 2008-04-10
JP4990439B2 true JP4990439B2 (ja) 2012-08-01

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JP2001050575A Expired - Fee Related JP4990439B2 (ja) 2001-02-26 2001-02-26 超音波発振装置及び超音波発振方法、洗浄装置及び洗浄方法

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005286068A (ja) 2004-03-29 2005-10-13 Canon Inc 露光装置及び方法
JP2007054743A (ja) * 2005-08-25 2007-03-08 Pre-Tech Co Ltd 超音波発振器及び超音波洗浄機
JP4493675B2 (ja) * 2007-03-14 2010-06-30 株式会社カイジョー 超音波洗浄装置
JP2011165911A (ja) * 2010-02-10 2011-08-25 Pre-Tech Co Ltd 洗浄装置及び被洗浄物の洗浄方法並びに超音波の発振方法
KR101339614B1 (ko) 2012-09-27 2014-01-03 조경근 초음파 발진기
KR101885566B1 (ko) * 2016-07-11 2018-09-07 세메스 주식회사 진동 소자, 그 제조 방법, 그리고 그를 포함하는 기판 처리 장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5959278A (ja) * 1982-09-29 1984-04-05 株式会社日立製作所 超音波洗浄機
US4736130A (en) * 1987-01-09 1988-04-05 Puskas William L Multiparameter generator for ultrasonic transducers
JPH06296942A (ja) * 1993-02-22 1994-10-25 Yoshihide Shibano 超音波洗浄における超音波振動子の発振方法及びその装置
JPH10180202A (ja) * 1996-12-24 1998-07-07 Shibaura Eng Works Co Ltd 超音波洗浄装置及び振動子の劣化検知方法
JPH10180204A (ja) * 1996-12-24 1998-07-07 Shibaura Eng Works Co Ltd 超音波洗浄装置及び駆動方法

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