JP4989140B2 - エアスピンドル用駆動装置 - Google Patents
エアスピンドル用駆動装置 Download PDFInfo
- Publication number
- JP4989140B2 JP4989140B2 JP2006195470A JP2006195470A JP4989140B2 JP 4989140 B2 JP4989140 B2 JP 4989140B2 JP 2006195470 A JP2006195470 A JP 2006195470A JP 2006195470 A JP2006195470 A JP 2006195470A JP 4989140 B2 JP4989140 B2 JP 4989140B2
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- Prior art keywords
- air
- plate
- main body
- air bearing
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 238000005498 polishing Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
- F16C32/0685—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for radial load only
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
また、前記第1の空気排出路を、前記第1の空気軸受と前記第2の空気軸受との境界部、及び前記第1の空気軸受と前記第3の空気軸受との境界部の各々から前記本体の外表面に貫通するようにV字状に設けることで、空気の滞留しやすい上記両境界部から効率よく、また、第1乃至第3の空気軸受から同時に空気を本体の外部に排出することができる。
2 本体
2a〜2c 空気供給路
2d〜2f 空気排出路
3 回転軸
4 円板部材
4a〜4c 空気排出路
5 スラストプレート
6(6A〜6C) 空気軸受
7 カバー
7a 空気供給路
8(8A〜8C) 給気口
9 排気口
10 給気口
11A、11B ボルト
12 スペーサ
13 排気口
13a 空気排出路
Claims (5)
- 本体の中空部に挿嵌され、第1の空気軸受により浮動状態で支承される回転軸と、
該回転軸の一端に固定され、前記本体に対して浮動状態となるように、第2の空気軸受により支承される第1の板状部材と、
該第1の板状部材を囲繞し、前記本体に固定される蓋体と、
前記回転軸の他端に固定され、前記本体に対して浮動状態となるように、第3の空気軸受により支承される第2の板状部材と、
前記蓋体の外表面から、前記蓋体の前記第1の板状部材と相対向する面上の、前記回転軸の軸心を中心とする円形開口部まで貫通する第1の空気供給路と、
前記本体の外表面から前記第1の空気軸受、前記第2の空気軸受及び前記第3の空気軸受の各々まで貫通する第2の空気供給路と、
前記第1の空気軸受と前記第2の空気軸受との境界部、及び前記第1の空気軸受と前記第3の空気軸受との境界部の各々から前記本体の外表面に貫通するようにV字状に設けられる第1の空気排出路と、
前記第1の板状部材に、前記蓋体の前記円形開口部に連通するように設けられる第2の空気排出路とを備え、
前記第1の空気供給路を介して供給された空気が、前記第2空気排出路を通過した後、外部に噴出することにより、前記第1の板状部材、前記回転軸及び前記第2の板状部材が回転することを特徴とするエアスピンドル用駆動装置。 - 前記第1乃至第3の空気軸受は、多孔質焼結層を有することを特徴とする請求項1に記載のエアスピンドル用駆動装置。
- 前記回転軸と前記第1の板状部材とが、又は、前記回転軸と前記第2の板状部材とが一体に形成されることを特徴とする請求項1又は2に記載のエアスピンドル用駆動装置。
- 前記第2の空気供給路の一部は、前記本体の外表面から前記第2の空気軸受及び第3の空気軸受まで各々貫通するようにT字状に設けられることを特徴とする請求項1、2又は3に記載のエアスピンドル用駆動装置。
- 前記第2の空気排出路は、前記回転軸の軸線方向に対して垂直に延設されることを特徴とする請求項1乃至4のいずれかに記載のエアスピンドル用駆動装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006195470A JP4989140B2 (ja) | 2006-07-18 | 2006-07-18 | エアスピンドル用駆動装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006195470A JP4989140B2 (ja) | 2006-07-18 | 2006-07-18 | エアスピンドル用駆動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008025607A JP2008025607A (ja) | 2008-02-07 |
JP4989140B2 true JP4989140B2 (ja) | 2012-08-01 |
Family
ID=39116448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006195470A Active JP4989140B2 (ja) | 2006-07-18 | 2006-07-18 | エアスピンドル用駆動装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4989140B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101840006B1 (ko) * | 2017-09-27 | 2018-03-19 | 에프엠이 주식회사 | 다공성 세라믹 에어베어링 |
KR101879451B1 (ko) * | 2018-01-31 | 2018-07-17 | 에프엠이 주식회사 | 초음파 에어베어링 스핀들 시스템 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5934842B2 (ja) * | 1975-07-22 | 1984-08-24 | 東芝タンガロイ (株) | エア−タ−ビン |
JPH0571535A (ja) * | 1991-09-11 | 1993-03-23 | Canon Inc | 静圧流体軸受 |
JP3039738B2 (ja) * | 1992-12-08 | 2000-05-08 | キヤノン株式会社 | 静圧流体軸受 |
JP2008025604A (ja) * | 2006-07-18 | 2008-02-07 | Oiles Ind Co Ltd | エアスピンドル用駆動装置 |
-
2006
- 2006-07-18 JP JP2006195470A patent/JP4989140B2/ja active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101840006B1 (ko) * | 2017-09-27 | 2018-03-19 | 에프엠이 주식회사 | 다공성 세라믹 에어베어링 |
KR101879451B1 (ko) * | 2018-01-31 | 2018-07-17 | 에프엠이 주식회사 | 초음파 에어베어링 스핀들 시스템 |
Also Published As
Publication number | Publication date |
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JP2008025607A (ja) | 2008-02-07 |
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