JP4983281B2 - アクチュエータ、光スキャナ、および画像形成装置 - Google Patents

アクチュエータ、光スキャナ、および画像形成装置 Download PDF

Info

Publication number
JP4983281B2
JP4983281B2 JP2007027362A JP2007027362A JP4983281B2 JP 4983281 B2 JP4983281 B2 JP 4983281B2 JP 2007027362 A JP2007027362 A JP 2007027362A JP 2007027362 A JP2007027362 A JP 2007027362A JP 4983281 B2 JP4983281 B2 JP 4983281B2
Authority
JP
Japan
Prior art keywords
movable plate
shaft member
shaft
magnetic body
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007027362A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008191513A (ja
JP2008191513A5 (enExample
Inventor
雅彦 仙道
安志 溝口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007027362A priority Critical patent/JP4983281B2/ja
Publication of JP2008191513A publication Critical patent/JP2008191513A/ja
Publication of JP2008191513A5 publication Critical patent/JP2008191513A5/ja
Application granted granted Critical
Publication of JP4983281B2 publication Critical patent/JP4983281B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
JP2007027362A 2007-02-06 2007-02-06 アクチュエータ、光スキャナ、および画像形成装置 Expired - Fee Related JP4983281B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007027362A JP4983281B2 (ja) 2007-02-06 2007-02-06 アクチュエータ、光スキャナ、および画像形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007027362A JP4983281B2 (ja) 2007-02-06 2007-02-06 アクチュエータ、光スキャナ、および画像形成装置

Publications (3)

Publication Number Publication Date
JP2008191513A JP2008191513A (ja) 2008-08-21
JP2008191513A5 JP2008191513A5 (enExample) 2010-06-17
JP4983281B2 true JP4983281B2 (ja) 2012-07-25

Family

ID=39751657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007027362A Expired - Fee Related JP4983281B2 (ja) 2007-02-06 2007-02-06 アクチュエータ、光スキャナ、および画像形成装置

Country Status (1)

Country Link
JP (1) JP4983281B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5402124B2 (ja) 2009-03-18 2014-01-29 セイコーエプソン株式会社 光学デバイス、光スキャナー及び画像形成装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
JPH09243942A (ja) * 1996-03-04 1997-09-19 Brother Ind Ltd 光走査装置
JPH103055A (ja) * 1996-06-18 1998-01-06 Brother Ind Ltd 光走査装置
KR100389865B1 (ko) * 2001-03-02 2003-07-04 삼성전자주식회사 마이크로미러 디바이스 및 이를 채용한 프로젝터
US6695457B2 (en) * 2001-06-02 2004-02-24 Capella Photonics, Inc. Bulk silicon mirrors with hinges underneath
JP2003075738A (ja) * 2001-08-31 2003-03-12 Hitachi Ltd 光スイッチ
JP2004102267A (ja) * 2002-08-21 2004-04-02 Canon Inc 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法
JP2005148339A (ja) * 2003-11-14 2005-06-09 Canon Inc 光偏向器
JP2005173411A (ja) * 2003-12-12 2005-06-30 Canon Inc 光偏向器
JP2005177876A (ja) * 2003-12-16 2005-07-07 Canon Inc マイクロ構造体及びその製造方法

Also Published As

Publication number Publication date
JP2008191513A (ja) 2008-08-21

Similar Documents

Publication Publication Date Title
CN100549758C (zh) 执行器件、光扫描仪以及图像形成装置
US8553305B2 (en) Light deflecting element, light deflector, and image forming device
TW201239393A (en) Actuator, optical scanner, and image forming apparatus
JP4983266B2 (ja) 光学デバイス、光スキャナ、および画像形成装置
JP2011095290A (ja) 光偏向素子、光偏向器、及び画像形成装置
JP4337862B2 (ja) 光学デバイス、光スキャナ、および画像形成装置
JP2004243721A (ja) 画像形成装置
JP4983281B2 (ja) アクチュエータ、光スキャナ、および画像形成装置
JP5023907B2 (ja) アクチュエータ、光スキャナ、および画像形成装置
JP4910668B2 (ja) 光学デバイス、光スキャナ、および画像形成装置
JP4525652B2 (ja) アクチュエータ、光スキャナ、および画像形成装置
JP2009069341A (ja) アクチュエータ、光スキャナ、および画像形成装置
JP2006154315A (ja) 静電櫛歯型揺動体装置、及びその作製方法
JP2008145542A (ja) 光学デバイス、光スキャナ、および画像形成装置
JP4720725B2 (ja) 光学デバイス、光スキャナ、および画像形成装置
JP2008145543A (ja) 光学デバイス、光スキャナ、および画像形成装置
JP2011070056A (ja) 光偏向器、光偏向器の製造方法、及び画像形成装置
JP2004279655A (ja) 画像形成装置
JP2008145544A (ja) 光学デバイス、光スキャナ、および画像形成装置
JP5109398B2 (ja) アクチュエータ、光スキャナ、および画像形成装置
JP4720729B2 (ja) 光学デバイス、光スキャナ、および画像形成装置
JP2008209438A (ja) 光学デバイス、光スキャナ、および画像形成装置
JP2008164873A (ja) アクチュエータ、光スキャナ、および画像形成装置
JP2009069339A (ja) アクチュエータ、アクチュエータの製造方法、光スキャナ、および画像形成装置
JP2004255726A (ja) 画像形成装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100202

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100430

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111007

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111018

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111215

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120110

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120307

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120327

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120409

R150 Certificate of patent or registration of utility model

Ref document number: 4983281

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150511

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees