JP2008191513A5 - - Google Patents
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- Publication number
- JP2008191513A5 JP2008191513A5 JP2007027362A JP2007027362A JP2008191513A5 JP 2008191513 A5 JP2008191513 A5 JP 2008191513A5 JP 2007027362 A JP2007027362 A JP 2007027362A JP 2007027362 A JP2007027362 A JP 2007027362A JP 2008191513 A5 JP2008191513 A5 JP 2008191513A5
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- shaft
- light
- light reflecting
- shaft member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001579 optical reflectometry Methods 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 125000006850 spacer group Chemical group 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 230000007423 decrease Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007027362A JP4983281B2 (ja) | 2007-02-06 | 2007-02-06 | アクチュエータ、光スキャナ、および画像形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007027362A JP4983281B2 (ja) | 2007-02-06 | 2007-02-06 | アクチュエータ、光スキャナ、および画像形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008191513A JP2008191513A (ja) | 2008-08-21 |
| JP2008191513A5 true JP2008191513A5 (enExample) | 2010-06-17 |
| JP4983281B2 JP4983281B2 (ja) | 2012-07-25 |
Family
ID=39751657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007027362A Expired - Fee Related JP4983281B2 (ja) | 2007-02-06 | 2007-02-06 | アクチュエータ、光スキャナ、および画像形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4983281B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5402124B2 (ja) | 2009-03-18 | 2014-01-29 | セイコーエプソン株式会社 | 光学デバイス、光スキャナー及び画像形成装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5083857A (en) * | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
| JPH09243942A (ja) * | 1996-03-04 | 1997-09-19 | Brother Ind Ltd | 光走査装置 |
| JPH103055A (ja) * | 1996-06-18 | 1998-01-06 | Brother Ind Ltd | 光走査装置 |
| KR100389865B1 (ko) * | 2001-03-02 | 2003-07-04 | 삼성전자주식회사 | 마이크로미러 디바이스 및 이를 채용한 프로젝터 |
| US6695457B2 (en) * | 2001-06-02 | 2004-02-24 | Capella Photonics, Inc. | Bulk silicon mirrors with hinges underneath |
| JP2003075738A (ja) * | 2001-08-31 | 2003-03-12 | Hitachi Ltd | 光スイッチ |
| JP2004102267A (ja) * | 2002-08-21 | 2004-04-02 | Canon Inc | 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法 |
| JP2005148339A (ja) * | 2003-11-14 | 2005-06-09 | Canon Inc | 光偏向器 |
| JP2005173411A (ja) * | 2003-12-12 | 2005-06-30 | Canon Inc | 光偏向器 |
| JP2005177876A (ja) * | 2003-12-16 | 2005-07-07 | Canon Inc | マイクロ構造体及びその製造方法 |
-
2007
- 2007-02-06 JP JP2007027362A patent/JP4983281B2/ja not_active Expired - Fee Related
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