JP2008191513A5 - - Google Patents

Download PDF

Info

Publication number
JP2008191513A5
JP2008191513A5 JP2007027362A JP2007027362A JP2008191513A5 JP 2008191513 A5 JP2008191513 A5 JP 2008191513A5 JP 2007027362 A JP2007027362 A JP 2007027362A JP 2007027362 A JP2007027362 A JP 2007027362A JP 2008191513 A5 JP2008191513 A5 JP 2008191513A5
Authority
JP
Japan
Prior art keywords
movable plate
shaft
light
light reflecting
shaft member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007027362A
Other languages
English (en)
Japanese (ja)
Other versions
JP4983281B2 (ja
JP2008191513A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007027362A priority Critical patent/JP4983281B2/ja
Priority claimed from JP2007027362A external-priority patent/JP4983281B2/ja
Publication of JP2008191513A publication Critical patent/JP2008191513A/ja
Publication of JP2008191513A5 publication Critical patent/JP2008191513A5/ja
Application granted granted Critical
Publication of JP4983281B2 publication Critical patent/JP4983281B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007027362A 2007-02-06 2007-02-06 アクチュエータ、光スキャナ、および画像形成装置 Expired - Fee Related JP4983281B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007027362A JP4983281B2 (ja) 2007-02-06 2007-02-06 アクチュエータ、光スキャナ、および画像形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007027362A JP4983281B2 (ja) 2007-02-06 2007-02-06 アクチュエータ、光スキャナ、および画像形成装置

Publications (3)

Publication Number Publication Date
JP2008191513A JP2008191513A (ja) 2008-08-21
JP2008191513A5 true JP2008191513A5 (enExample) 2010-06-17
JP4983281B2 JP4983281B2 (ja) 2012-07-25

Family

ID=39751657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007027362A Expired - Fee Related JP4983281B2 (ja) 2007-02-06 2007-02-06 アクチュエータ、光スキャナ、および画像形成装置

Country Status (1)

Country Link
JP (1) JP4983281B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5402124B2 (ja) 2009-03-18 2014-01-29 セイコーエプソン株式会社 光学デバイス、光スキャナー及び画像形成装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
JPH09243942A (ja) * 1996-03-04 1997-09-19 Brother Ind Ltd 光走査装置
JPH103055A (ja) * 1996-06-18 1998-01-06 Brother Ind Ltd 光走査装置
KR100389865B1 (ko) * 2001-03-02 2003-07-04 삼성전자주식회사 마이크로미러 디바이스 및 이를 채용한 프로젝터
US6695457B2 (en) * 2001-06-02 2004-02-24 Capella Photonics, Inc. Bulk silicon mirrors with hinges underneath
JP2003075738A (ja) * 2001-08-31 2003-03-12 Hitachi Ltd 光スイッチ
JP2004102267A (ja) * 2002-08-21 2004-04-02 Canon Inc 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法
JP2005148339A (ja) * 2003-11-14 2005-06-09 Canon Inc 光偏向器
JP2005173411A (ja) * 2003-12-12 2005-06-30 Canon Inc 光偏向器
JP2005177876A (ja) * 2003-12-16 2005-07-07 Canon Inc マイクロ構造体及びその製造方法

Similar Documents

Publication Publication Date Title
CN105549200A (zh) 光学扫描装置
JP2009098447A5 (enExample)
CN101092233A (zh) 微机电系统装置
TWI558653B (zh) 微型致動器之振動結構
JP2013235213A5 (enExample)
JP2007189824A5 (enExample)
JP2008304667A5 (enExample)
JP2017020647A (ja) バランスのとれた偏心ギア設計及び方法
JP2017003719A5 (enExample)
JP2014041234A5 (enExample)
JP2012037635A5 (enExample)
JP2008191513A5 (enExample)
JP2008170902A5 (enExample)
JP2009020367A5 (enExample)
JP2010230792A5 (enExample)
JP4425308B2 (ja) 切換可能なエンボス加工装置
WO2022105146A1 (zh) 一种棱镜及多线激光雷达
TWI334056B (en) Illumination system
JP3767577B2 (ja) スキャン装置
TWI409504B (zh) 非連續投射角度多面鏡裝置
JP2005292355A5 (enExample)
JP2020013047A (ja) 駆動装置
JP2008216597A5 (enExample)
JP2014228861A (ja) 電磁式アクチュエータ
JP2013228424A5 (enExample)