JP4976070B2 - 成膜装置 - Google Patents

成膜装置 Download PDF

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Publication number
JP4976070B2
JP4976070B2 JP2006190097A JP2006190097A JP4976070B2 JP 4976070 B2 JP4976070 B2 JP 4976070B2 JP 2006190097 A JP2006190097 A JP 2006190097A JP 2006190097 A JP2006190097 A JP 2006190097A JP 4976070 B2 JP4976070 B2 JP 4976070B2
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Japan
Prior art keywords
film
forming apparatus
wire
lithium
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006190097A
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English (en)
Japanese (ja)
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JP2008019458A5 (enExample
JP2008019458A (ja
Inventor
伸之 奥田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Research Institute of Innovative Technology for the Earth RITE
Original Assignee
Sumitomo Electric Industries Ltd
Research Institute of Innovative Technology for the Earth RITE
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Application filed by Sumitomo Electric Industries Ltd, Research Institute of Innovative Technology for the Earth RITE filed Critical Sumitomo Electric Industries Ltd
Priority to JP2006190097A priority Critical patent/JP4976070B2/ja
Publication of JP2008019458A publication Critical patent/JP2008019458A/ja
Publication of JP2008019458A5 publication Critical patent/JP2008019458A5/ja
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

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  • Physical Vapour Deposition (AREA)
  • Battery Electrode And Active Subsutance (AREA)
JP2006190097A 2006-07-11 2006-07-11 成膜装置 Expired - Fee Related JP4976070B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006190097A JP4976070B2 (ja) 2006-07-11 2006-07-11 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006190097A JP4976070B2 (ja) 2006-07-11 2006-07-11 成膜装置

Publications (3)

Publication Number Publication Date
JP2008019458A JP2008019458A (ja) 2008-01-31
JP2008019458A5 JP2008019458A5 (enExample) 2009-06-18
JP4976070B2 true JP4976070B2 (ja) 2012-07-18

Family

ID=39075643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006190097A Expired - Fee Related JP4976070B2 (ja) 2006-07-11 2006-07-11 成膜装置

Country Status (1)

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JP (1) JP4976070B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102656071B1 (ko) * 2018-11-27 2024-04-08 베이징 웰리온 뉴 에너지 테크놀로지 컴퍼니 리미티드 사이클 효율이 높은 전극을 제조하는 시스템, 사이클 효율이 높은 전극을 제조하는 방법 및 이의 응용
JP2023507160A (ja) * 2019-12-20 2023-02-21 シオン・パワー・コーポレーション リチウム金属電極

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0867967A (ja) * 1994-08-29 1996-03-12 Sumitomo Electric Ind Ltd 線材供給装置
JP2837367B2 (ja) * 1995-02-16 1998-12-16 日新製鋼株式会社 連続熱処理炉、連続真空蒸着設備等の区画出入口のシール装置
JP3453290B2 (ja) * 1997-12-26 2003-10-06 松下電器産業株式会社 蒸着用電極構造、蒸着装置、蒸着方法および有機発光素子の製造方法

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JP2008019458A (ja) 2008-01-31

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