JP2008019458A5 - - Google Patents

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Publication number
JP2008019458A5
JP2008019458A5 JP2006190097A JP2006190097A JP2008019458A5 JP 2008019458 A5 JP2008019458 A5 JP 2008019458A5 JP 2006190097 A JP2006190097 A JP 2006190097A JP 2006190097 A JP2006190097 A JP 2006190097A JP 2008019458 A5 JP2008019458 A5 JP 2008019458A5
Authority
JP
Japan
Prior art keywords
film
forming apparatus
lithium
film forming
polymer resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006190097A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008019458A (ja
JP4976070B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006190097A priority Critical patent/JP4976070B2/ja
Priority claimed from JP2006190097A external-priority patent/JP4976070B2/ja
Publication of JP2008019458A publication Critical patent/JP2008019458A/ja
Publication of JP2008019458A5 publication Critical patent/JP2008019458A5/ja
Application granted granted Critical
Publication of JP4976070B2 publication Critical patent/JP4976070B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006190097A 2006-07-11 2006-07-11 成膜装置 Expired - Fee Related JP4976070B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006190097A JP4976070B2 (ja) 2006-07-11 2006-07-11 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006190097A JP4976070B2 (ja) 2006-07-11 2006-07-11 成膜装置

Publications (3)

Publication Number Publication Date
JP2008019458A JP2008019458A (ja) 2008-01-31
JP2008019458A5 true JP2008019458A5 (enExample) 2009-06-18
JP4976070B2 JP4976070B2 (ja) 2012-07-18

Family

ID=39075643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006190097A Expired - Fee Related JP4976070B2 (ja) 2006-07-11 2006-07-11 成膜装置

Country Status (1)

Country Link
JP (1) JP4976070B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102656071B1 (ko) * 2018-11-27 2024-04-08 베이징 웰리온 뉴 에너지 테크놀로지 컴퍼니 리미티드 사이클 효율이 높은 전극을 제조하는 시스템, 사이클 효율이 높은 전극을 제조하는 방법 및 이의 응용
JP2023507160A (ja) * 2019-12-20 2023-02-21 シオン・パワー・コーポレーション リチウム金属電極

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0867967A (ja) * 1994-08-29 1996-03-12 Sumitomo Electric Ind Ltd 線材供給装置
JP2837367B2 (ja) * 1995-02-16 1998-12-16 日新製鋼株式会社 連続熱処理炉、連続真空蒸着設備等の区画出入口のシール装置
JP3453290B2 (ja) * 1997-12-26 2003-10-06 松下電器産業株式会社 蒸着用電極構造、蒸着装置、蒸着方法および有機発光素子の製造方法

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