JP4958631B2 - 超音波送受信デバイス及びそれを用いた超音波探触子 - Google Patents

超音波送受信デバイス及びそれを用いた超音波探触子 Download PDF

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Publication number
JP4958631B2
JP4958631B2 JP2007128020A JP2007128020A JP4958631B2 JP 4958631 B2 JP4958631 B2 JP 4958631B2 JP 2007128020 A JP2007128020 A JP 2007128020A JP 2007128020 A JP2007128020 A JP 2007128020A JP 4958631 B2 JP4958631 B2 JP 4958631B2
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Japan
Prior art keywords
insulating film
upper electrode
reception device
ultrasonic transmission
wiring
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Expired - Fee Related
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JP2007128020A
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English (en)
Japanese (ja)
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JP2008283618A5 (enExample
JP2008283618A (ja
Inventor
保廣 吉村
達也 永田
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2007128020A priority Critical patent/JP4958631B2/ja
Priority to US12/119,567 priority patent/US7944114B2/en
Priority to EP08008864A priority patent/EP2002900A3/en
Publication of JP2008283618A publication Critical patent/JP2008283618A/ja
Publication of JP2008283618A5 publication Critical patent/JP2008283618A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP2007128020A 2007-05-14 2007-05-14 超音波送受信デバイス及びそれを用いた超音波探触子 Expired - Fee Related JP4958631B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007128020A JP4958631B2 (ja) 2007-05-14 2007-05-14 超音波送受信デバイス及びそれを用いた超音波探触子
US12/119,567 US7944114B2 (en) 2007-05-14 2008-05-13 Ultrasonic transducer device and ultrasonic wave probe using same
EP08008864A EP2002900A3 (en) 2007-05-14 2008-05-13 Ultrasonic transducer device and ultrasonic wave probe using same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007128020A JP4958631B2 (ja) 2007-05-14 2007-05-14 超音波送受信デバイス及びそれを用いた超音波探触子

Publications (3)

Publication Number Publication Date
JP2008283618A JP2008283618A (ja) 2008-11-20
JP2008283618A5 JP2008283618A5 (enExample) 2010-04-02
JP4958631B2 true JP4958631B2 (ja) 2012-06-20

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Family Applications (1)

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JP2007128020A Expired - Fee Related JP4958631B2 (ja) 2007-05-14 2007-05-14 超音波送受信デバイス及びそれを用いた超音波探触子

Country Status (3)

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US (1) US7944114B2 (enExample)
EP (1) EP2002900A3 (enExample)
JP (1) JP4958631B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4958631B2 (ja) * 2007-05-14 2012-06-20 株式会社日立製作所 超音波送受信デバイス及びそれを用いた超音波探触子
JP5409251B2 (ja) * 2008-11-19 2014-02-05 キヤノン株式会社 電気機械変換装置およびその製造方法
JP5513239B2 (ja) * 2010-04-27 2014-06-04 キヤノン株式会社 電気機械変換装置及びその製造方法
JP5852461B2 (ja) 2012-02-14 2016-02-03 日立アロカメディカル株式会社 超音波探触子及びそれを用いた超音波診断装置
JP6273743B2 (ja) * 2013-09-30 2018-02-07 セイコーエプソン株式会社 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置
JP6381195B2 (ja) 2013-10-22 2018-08-29 キヤノン株式会社 静電容量型トランスデューサ及びその作製方法
CN108430651B (zh) * 2015-12-18 2020-09-01 皇家飞利浦有限公司 用于超声阵列的声学透镜
JP6606034B2 (ja) * 2016-08-24 2019-11-13 株式会社日立製作所 容量検出型超音波トランスデューサおよびそれを備えた超音波撮像装置
CN111766973B (zh) * 2020-06-11 2022-02-01 武汉华星光电半导体显示技术有限公司 一种触控显示面板和显示装置
TWI835661B (zh) * 2023-05-29 2024-03-11 友達光電股份有限公司 換能器及其製造方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07121159B2 (ja) * 1985-03-26 1995-12-20 日本電気株式会社 超音波トランスジユ−サ
US6271620B1 (en) * 1999-05-20 2001-08-07 Sen Corporation Acoustic transducer and method of making the same
ATE371813T1 (de) 1999-05-25 2007-09-15 Fabrizio Pinto Verfahren und vorrichtung für energieextraktion
US20030087292A1 (en) * 2001-10-04 2003-05-08 Shiping Chen Methods and systems for promoting interactions between probes and target molecules in fluid in microarrays
JP2004247520A (ja) * 2003-02-14 2004-09-02 Matsushita Electric Ind Co Ltd 半導体装置
WO2005087391A2 (en) * 2004-03-11 2005-09-22 Georgia Tech Research Corporation Asymmetric membrane cmut devices and fabrication methods
US20060004290A1 (en) * 2004-06-30 2006-01-05 Smith Lowell S Ultrasound transducer with additional sensors
JP4513596B2 (ja) * 2004-08-25 2010-07-28 株式会社デンソー 超音波センサ
US7489593B2 (en) * 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
JP4471856B2 (ja) * 2005-01-27 2010-06-02 株式会社日立製作所 超音波トランスデューサおよびその製造方法
JP4523879B2 (ja) * 2005-06-20 2010-08-11 株式会社日立製作所 電気・音響変換素子、アレイ型超音波トランスデューサおよび超音波診断装置
JP4682927B2 (ja) * 2005-08-03 2011-05-11 セイコーエプソン株式会社 静電型超音波トランスデューサ、超音波スピーカ、音声信号再生方法、超音波トランスデューサの電極の製造方法、超音波トランスデューサの製造方法、超指向性音響システム、および表示装置
JP4434109B2 (ja) * 2005-09-05 2010-03-17 株式会社日立製作所 電気・音響変換素子
JP4724501B2 (ja) * 2005-09-06 2011-07-13 株式会社日立製作所 超音波トランスデューサおよびその製造方法
EP1950997B1 (en) * 2005-10-18 2019-10-09 Hitachi, Ltd. Ultrasonic probe
JP4844411B2 (ja) * 2006-02-21 2011-12-28 セイコーエプソン株式会社 静電型超音波トランスデューサ、静電型超音波トランスデューサの製造方法、超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4699259B2 (ja) * 2006-03-31 2011-06-08 株式会社日立製作所 超音波トランスデューサ
JP4800170B2 (ja) * 2006-10-05 2011-10-26 株式会社日立製作所 超音波トランスデューサおよびその製造方法
JP4958631B2 (ja) * 2007-05-14 2012-06-20 株式会社日立製作所 超音波送受信デバイス及びそれを用いた超音波探触子

Also Published As

Publication number Publication date
JP2008283618A (ja) 2008-11-20
US7944114B2 (en) 2011-05-17
US20080284287A1 (en) 2008-11-20
EP2002900A2 (en) 2008-12-17
EP2002900A3 (en) 2012-05-30

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