JP4955574B2 - 流れを規定している構成体を持つ静電容量圧力センサ - Google Patents
流れを規定している構成体を持つ静電容量圧力センサ Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0609—Pressure pulsation damping arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring Volume Flow (AREA)
Description
Claims (24)
- 内容量室を規定し、第1の孔を規定している壁を有する本体と、
前記内容量室を第1のセクションと第2のセクションとに分割している可撓性の隔膜と、
セラミックスによって形成され、前記第1の孔中に配置された第1の構造部分を有し、流れを規定する流れ規定構成体とを具備する圧力センサであって、
前記第1の孔は、前記内容量室の外部のパーティクルが、前記第1の孔を通って進み隔膜へ達するように配置されていて、
前記第1のセクションの圧力が前記第2のセクションの圧力に対して増加すると、前記隔膜の少なくとも第1の部分が第1の方向に動き、また、前記第1のセクションの圧力が前記第2のセクションの圧力に対して減少すると、前記隔膜の前記第1の部分が第2の方向に動き、
前記隔膜の第1の部分と本体の少なくとも第1の部分とが、静電容量によって特徴付けられ、この静電容量は、前記本体の前記第1の部分に対する前記隔膜の前記第1の部分の動きに応答して変化し、
また、前記第1の構造部分は、前記壁と間隔を空けていて、前記流れ規定構成体は、少なくとも一部が、前記内容量室の前記第1のセクションからこの内容量室の外部の位置への、第1の流路を規定し、この第1の流路の少なくとも一部は、第1の位置から第2の位置に延び、この第1の流路の前記少なくとも一部は、全長と直線距離とによって特徴付けられ、この全長は、前記第1の位置から前記第1の流路の前記少なくとも一部を通り前記第2の位置までの最短距離であり、また、前記直線距離は、前記第1の位置と前記第2の位置との間の最短距離であり、前記全長は、前記直線距離の少なくとも5倍である圧力センサ。 - 前記流れ規定構成体は、中央の柱と、この中央の柱の外側に配設されたほぼらせん状の少なくとも1つのねじ山とを有する請求項1のセンサ。
- 前記流れ規定構成体は、複数の孔を規定している基部をさらに有する請求項2のセンサ。
- 前記第1の流路の前記少なくとも一部は、ほぼらせん状である請求項1のセンサ。
- 内部の溝を規定している入口チューブをさらに具備し、この内部の溝は、前記第1の流路と流体的に連通している請求項1のセンサ。
- 前記本体は、セラミックス材料で形成され、また、前記隔膜は、セラミックスの隔膜部と金属の隔膜部とを有する請求項1のセンサ。
- 前記本体の前記第1の部分は、金属フィルムで形成されている請求項1のセンサ。
- 前記本体は、セラミックス材料で形成されている請求項1のセンサ。
- 前記第1の流路の前記少なくとも一部は、滑らかな曲線によって特徴付けられる流路の一部を有する請求項1のセンサ。
- 前記本体は、第1のセラミックス部分と第2のセラミックス部分とを有し、第1の金属フィルムが、前記本体の前記第1のセラミックス部分の一部に配置され、前記本体の前記第2のセラミックス部分は、前記第1の孔を規定している前記壁を有し、
また、前記可撓性の隔膜は、セラミックスの隔膜部と、このセラミックスの隔膜部に配置された金属フィルムとを有し、前記本体の前記第1のセラミックス部分と前記本体の前記第2のセラミックス部分との間に配置され、
さらに、第1の端が、前記本体の前記第2のセラミックス部分と接続されていて、第2の端が、流体源と接続するように形成され、前記第2の端から前記第1の端へ延びた内部の溝を規定し、この内部の溝は、前記第1の孔と流体的に連通している、入口チューブを具備し、
さらに、前記流れ規定構成体は、基部と、中央の柱と、ねじとを有し、このねじは、前記中央の柱の外側に配設され、また、前記流れ規定構成体と前記本体の前記第2のセラミックス部分とは、ほぼらせん状の溝を規定し、このらせん状の溝は、前記第1の流路の少なくとも一部を有し、前記隔膜に達する前に、前記内部の溝から前記隔膜へ進む流体の少なくとも一部が、前記ほぼらせん状の溝を通過するように形成され、前記基部は、前記内部の溝から前記ほぼらせん状の溝を分離し、また、この基部は、複数の孔を規定し、これら孔は、前記ほぼらせん状の溝と前記内部の溝との間に流体的な連通を与える請求項1のセンサ。 - 前記流れ規定構成体は、少なくとも一部が、第2の流路を規定し、この第2の流路は、前記内容量室の前記第1のセクションから内容量室の外部の位置へ延び、前記第2の流路の少なくとも一部は、前記第1の位置から前記第2の位置へ延び、前記第1の流路は、前記第2の流路よりも高いコンダクタンスを有する、請求項1のセンサ。
- 前記流れ規定構成体は、中央の柱と、この中央の柱の外側に配設されたほぼらせん状の少なくとも1つのねじ山とを有する請求項11のセンサ。
- 前記流れ規定構成体は、複数の孔を規定している基部をさらに有する請求項12のセンサ。
- 前記第1の流路の前記少なくとも一部は、ほぼらせん状である請求項11のセンサ。
- 内部の溝を規定している入口チューブをさらに具備し、この内部の溝は、前記第1と第2の流路を流体的に連通している請求項11のセンサ。
- 前記本体は、セラミックス材料で形成され、前記隔膜は、セラミックスの隔膜部と金属の隔膜部とを有する請求項11のセンサ。
- 前記本体の前記第1の部分は、金属フィルムで形成されている請求項11のセンサ。
- 前記第1の流路の前記少なくとも一部は、滑らかな曲線によって特徴付けられる流路の一部を有する請求項11のセンサ。
- 前記流れ規定構成体は、前記らせん状のねじ山から第1の流路の少なくとも一部へ延びた複数の障害物をさらに有し、
前記複数の障害物は、前記第1の流路のコンダクタンスを十分に減少させない請求項2のセンサ。 - 前記流れ規定構成体は、前記ねじかららせん状の溝の少なくとも一部へ延びた複数の障害物をさらに有し、
前記複数の障害物は、前記らせん状の溝のコンダクタンスを十分に減少させない請求項10のセンサ。 - 前記流れ規定構成体は、前記らせん状のねじ山から前記第1の流路の少なくとも一部へ延びた複数の障害物をさらに有し、
前記複数の障害物は、前記第1の流路のコンダクタンスを十分に減少させない請求項12のセンサ。 - 前記本体は、セラミックス材料で形成された請求項11のセンサ。
- 前記本体は、前記第1の孔に近接した第2の孔を規定する第2の壁を有し、この第2の孔は前記第1の孔より大きく、前記基部は、この第2の孔中に配置されている請求項3のセンサ。
- 前記第2の流路の少なくとも一部が、前記少なくとも1つのほぼらせん状のねじ山と前記壁とによって規定されたギャップを有する請求項12のセンサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/036,775 | 2005-01-14 | ||
US11/036,775 US7204150B2 (en) | 2005-01-14 | 2005-01-14 | Turbo sump for use with capacitive pressure sensor |
PCT/US2006/002757 WO2006076745A1 (en) | 2005-01-14 | 2006-01-13 | A flow defining structure for use with a capacitive pressure sensor |
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JP2008527386A JP2008527386A (ja) | 2008-07-24 |
JP4955574B2 true JP4955574B2 (ja) | 2012-06-20 |
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JP2007551489A Active JP4955574B2 (ja) | 2005-01-14 | 2006-01-13 | 流れを規定している構成体を持つ静電容量圧力センサ |
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US (1) | US7204150B2 (ja) |
EP (1) | EP1839024B1 (ja) |
JP (1) | JP4955574B2 (ja) |
KR (1) | KR101316554B1 (ja) |
TW (1) | TWI354779B (ja) |
WO (1) | WO2006076745A1 (ja) |
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2005
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2020034325A (ja) * | 2018-08-28 | 2020-03-05 | 株式会社エー・アンド・デイ | 圧力センサ |
JP7002821B2 (ja) | 2018-08-28 | 2022-01-20 | 株式会社エー・アンド・デイ | 圧力センサ |
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EP1839024A1 (en) | 2007-10-03 |
US7204150B2 (en) | 2007-04-17 |
TW200637638A (en) | 2006-11-01 |
KR20070106604A (ko) | 2007-11-02 |
WO2006076745B1 (en) | 2006-09-08 |
KR101316554B1 (ko) | 2013-10-15 |
TWI354779B (en) | 2011-12-21 |
WO2006076745A1 (en) | 2006-07-20 |
US20060156824A1 (en) | 2006-07-20 |
EP1839024B1 (en) | 2012-01-11 |
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