JP2020034325A - 圧力センサ - Google Patents
圧力センサ Download PDFInfo
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- JP2020034325A JP2020034325A JP2018159093A JP2018159093A JP2020034325A JP 2020034325 A JP2020034325 A JP 2020034325A JP 2018159093 A JP2018159093 A JP 2018159093A JP 2018159093 A JP2018159093 A JP 2018159093A JP 2020034325 A JP2020034325 A JP 2020034325A
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- diaphragm
- pressure sensor
- cylindrical portion
- protection member
- hole
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- 230000001681 protective effect Effects 0.000 claims abstract description 17
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 abstract description 20
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 239000012530 fluid Substances 0.000 description 6
- 239000000567 combustion gas Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims (5)
- 筒状部と、前記筒状部の一端に塞ぐように設けられたダイヤフラムと、前記ダイヤフラムに取り付けられた複数の歪みゲージと、を備えた圧力センサにおいて、
前記筒状部の他端を塞ぐように設けられるとともに、前記筒状部の内側に一部が挿入されて、前記筒状部の内周面との間および前記ダイヤフラムとの間に隙間を形成する保護部材を備え、
前記保護部材には、前記筒状部の内周面に向けて開口される横穴が形成されるとともに、その横穴を前記ダイヤフラムの反対側の面に連通させる縦穴が形成されることを特徴とする圧力センサ。 - 前記ダイヤフラムには、前記保護部材側の面に凹凸が形成され、前記保護部材には、前記ダイヤフラムに対向する面に前記凹凸に合わせた凸凹が形成されることを特徴とする請求項1に記載の圧力センサ。
- 前記縦穴は、前記筒状部の中心軸に沿って形成されることを特徴とする請求項1または2に記載の圧力センサ。
- 前記横穴は、前記筒状部の中心軸に直交するように形成されることを特徴とする請求項1から3のいずれか1に記載の圧力センサ。
- 前記保護部材は、前記筒状部と同じ材質で形成されることを特徴とする請求項1から4のいずれか1に記載の圧力センサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2018159093A JP7002821B2 (ja) | 2018-08-28 | 2018-08-28 | 圧力センサ |
Applications Claiming Priority (1)
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JP2018159093A JP7002821B2 (ja) | 2018-08-28 | 2018-08-28 | 圧力センサ |
Publications (2)
Publication Number | Publication Date |
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JP2020034325A true JP2020034325A (ja) | 2020-03-05 |
JP7002821B2 JP7002821B2 (ja) | 2022-01-20 |
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JP2018159093A Active JP7002821B2 (ja) | 2018-08-28 | 2018-08-28 | 圧力センサ |
Country Status (1)
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JP (1) | JP7002821B2 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4955574B2 (ja) * | 2005-01-14 | 2012-06-20 | エム ケー エス インストルメンツ インコーポレーテッド | 流れを規定している構成体を持つ静電容量圧力センサ |
JP2014137275A (ja) * | 2013-01-16 | 2014-07-28 | Tokyo Electron Ltd | 圧力測定器及びその圧力測定器を備える基板処理装置 |
US9733143B2 (en) * | 2014-09-19 | 2017-08-15 | Robert Bosch Gmbh | Sensor for recording a pressure of a fluid medium |
-
2018
- 2018-08-28 JP JP2018159093A patent/JP7002821B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4955574B2 (ja) * | 2005-01-14 | 2012-06-20 | エム ケー エス インストルメンツ インコーポレーテッド | 流れを規定している構成体を持つ静電容量圧力センサ |
JP2014137275A (ja) * | 2013-01-16 | 2014-07-28 | Tokyo Electron Ltd | 圧力測定器及びその圧力測定器を備える基板処理装置 |
JP5993312B2 (ja) * | 2013-01-16 | 2016-09-14 | 東京エレクトロン株式会社 | 圧力測定器及びその圧力測定器を備える基板処理装置 |
US9733143B2 (en) * | 2014-09-19 | 2017-08-15 | Robert Bosch Gmbh | Sensor for recording a pressure of a fluid medium |
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JP7002821B2 (ja) | 2022-01-20 |
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