JP4934274B2 - 光沢面測定のための協調偏光 - Google Patents

光沢面測定のための協調偏光 Download PDF

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Publication number
JP4934274B2
JP4934274B2 JP2004280788A JP2004280788A JP4934274B2 JP 4934274 B2 JP4934274 B2 JP 4934274B2 JP 2004280788 A JP2004280788 A JP 2004280788A JP 2004280788 A JP2004280788 A JP 2004280788A JP 4934274 B2 JP4934274 B2 JP 4934274B2
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JP
Japan
Prior art keywords
polarizer
cameras
optical
measurement system
polarizers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2004280788A
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English (en)
Japanese (ja)
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JP2005106820A5 (enExample
JP2005106820A (ja
Inventor
シヤオピン・チエン
ケビン・ジョージ・ハーディング
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General Electric Co
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General Electric Co
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Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JP2005106820A publication Critical patent/JP2005106820A/ja
Publication of JP2005106820A5 publication Critical patent/JP2005106820A5/ja
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Publication of JP4934274B2 publication Critical patent/JP4934274B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2004280788A 2003-09-29 2004-09-28 光沢面測定のための協調偏光 Expired - Lifetime JP4934274B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/673,598 2003-09-29
US10/673,598 US7092094B2 (en) 2003-09-29 2003-09-29 Coordinated polarization for shiny surface measurement

Publications (3)

Publication Number Publication Date
JP2005106820A JP2005106820A (ja) 2005-04-21
JP2005106820A5 JP2005106820A5 (enExample) 2007-11-15
JP4934274B2 true JP4934274B2 (ja) 2012-05-16

Family

ID=34194885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004280788A Expired - Lifetime JP4934274B2 (ja) 2003-09-29 2004-09-28 光沢面測定のための協調偏光

Country Status (3)

Country Link
US (1) US7092094B2 (enExample)
EP (1) EP1519143A1 (enExample)
JP (1) JP4934274B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100268069A1 (en) * 2009-04-16 2010-10-21 Rongguang Liang Dental surface imaging using polarized fringe projection
WO2012149243A1 (en) * 2011-04-29 2012-11-01 Siemens Healthcare Diagnostics Inc. High flux collimated illuminator and method of uniform field illumination
US9186470B2 (en) * 2012-02-08 2015-11-17 Apple Inc. Shape reflector and surface contour mapping
CN103868472B (zh) * 2013-12-23 2016-09-07 黑龙江科技大学 一种用于高反射率零件的面结构光三维测量装置与方法
DE102017213549B3 (de) * 2017-08-04 2018-09-27 Ifm Electronic Gmbh Lichtschnittsensor und Verfahren zum Betreiben eines Lichtschnittsensors
DE102021123355A1 (de) 2021-09-09 2023-03-09 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren und Vorrichtung zum Erkennen von Fehlstellen

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3173047D1 (en) * 1981-04-04 1986-01-09 Ibm Deutschland Device for the determination of the polarisation rate in a light-wave field and use of this device to interferometric and holographic measurements
JPH04127004A (ja) * 1990-09-18 1992-04-28 Jasco Corp エリプソメータ及びその使用方法
JPH04240553A (ja) * 1991-01-24 1992-08-27 Shimadzu Corp 物体特性の評価方法
JPH05142141A (ja) * 1991-11-19 1993-06-08 Katsuya Masao 薄膜測定装置
US5625446A (en) 1993-10-18 1997-04-29 United Technologies Corporation Optical measurement system for articles with varying surface reflectivity
US6028671A (en) 1996-01-31 2000-02-22 General Scanning, Inc. Method and system for suppressing unwanted reflections in an optical system
WO2001007881A1 (en) * 1999-07-27 2001-02-01 Colorado School Of Mines Parallel detecting, spectroscopic ellipsometers/polarimeters
US6597454B1 (en) 2000-05-12 2003-07-22 X-Rite, Incorporated Color measurement instrument capable of obtaining simultaneous polarized and nonpolarized data
JP2002116085A (ja) * 2000-10-05 2002-04-19 Tetsuya Hamamoto 偏光計測装置
JP2002139423A (ja) * 2000-11-01 2002-05-17 Fuji Electric Co Ltd 油膜検知装置
JP2002148186A (ja) * 2000-11-09 2002-05-22 Olympus Optical Co Ltd 偏光測定方法および装置
JP2002162344A (ja) * 2000-11-22 2002-06-07 Nec Corp 異方性薄膜評価方法および装置
US20020089747A1 (en) 2001-01-09 2002-07-11 Hay Ranald Joseph Techniques for reducing observed glare by using polarized optical transmission & reception devices
JP4558217B2 (ja) * 2001-01-12 2010-10-06 独立行政法人理化学研究所 金属試料の特性を光学的に測定する方法及び装置
US6678057B2 (en) 2001-12-19 2004-01-13 General Electric Company Method and device for reduction in noise in images from shiny parts
US7253901B2 (en) * 2002-01-23 2007-08-07 Kla-Tencor Technologies Corporation Laser-based cleaning device for film analysis tool

Also Published As

Publication number Publication date
EP1519143A1 (en) 2005-03-30
US20050068532A1 (en) 2005-03-31
JP2005106820A (ja) 2005-04-21
US7092094B2 (en) 2006-08-15

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