JP2005106820A5 - - Google Patents

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Publication number
JP2005106820A5
JP2005106820A5 JP2004280788A JP2004280788A JP2005106820A5 JP 2005106820 A5 JP2005106820 A5 JP 2005106820A5 JP 2004280788 A JP2004280788 A JP 2004280788A JP 2004280788 A JP2004280788 A JP 2004280788A JP 2005106820 A5 JP2005106820 A5 JP 2005106820A5
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JP
Japan
Prior art keywords
camera
measurement system
light source
polarizer
optical measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004280788A
Other languages
English (en)
Japanese (ja)
Other versions
JP4934274B2 (ja
JP2005106820A (ja
Filing date
Publication date
Priority claimed from US10/673,598 external-priority patent/US7092094B2/en
Application filed filed Critical
Publication of JP2005106820A publication Critical patent/JP2005106820A/ja
Publication of JP2005106820A5 publication Critical patent/JP2005106820A5/ja
Application granted granted Critical
Publication of JP4934274B2 publication Critical patent/JP4934274B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2004280788A 2003-09-29 2004-09-28 光沢面測定のための協調偏光 Expired - Lifetime JP4934274B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/673,598 2003-09-29
US10/673,598 US7092094B2 (en) 2003-09-29 2003-09-29 Coordinated polarization for shiny surface measurement

Publications (3)

Publication Number Publication Date
JP2005106820A JP2005106820A (ja) 2005-04-21
JP2005106820A5 true JP2005106820A5 (enExample) 2007-11-15
JP4934274B2 JP4934274B2 (ja) 2012-05-16

Family

ID=34194885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004280788A Expired - Lifetime JP4934274B2 (ja) 2003-09-29 2004-09-28 光沢面測定のための協調偏光

Country Status (3)

Country Link
US (1) US7092094B2 (enExample)
EP (1) EP1519143A1 (enExample)
JP (1) JP4934274B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100268069A1 (en) * 2009-04-16 2010-10-21 Rongguang Liang Dental surface imaging using polarized fringe projection
WO2012149243A1 (en) * 2011-04-29 2012-11-01 Siemens Healthcare Diagnostics Inc. High flux collimated illuminator and method of uniform field illumination
US9186470B2 (en) * 2012-02-08 2015-11-17 Apple Inc. Shape reflector and surface contour mapping
CN103868472B (zh) * 2013-12-23 2016-09-07 黑龙江科技大学 一种用于高反射率零件的面结构光三维测量装置与方法
DE102017213549B3 (de) * 2017-08-04 2018-09-27 Ifm Electronic Gmbh Lichtschnittsensor und Verfahren zum Betreiben eines Lichtschnittsensors
DE102021123355A1 (de) 2021-09-09 2023-03-09 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren und Vorrichtung zum Erkennen von Fehlstellen

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3173047D1 (en) * 1981-04-04 1986-01-09 Ibm Deutschland Device for the determination of the polarisation rate in a light-wave field and use of this device to interferometric and holographic measurements
JPH04127004A (ja) * 1990-09-18 1992-04-28 Jasco Corp エリプソメータ及びその使用方法
JPH04240553A (ja) * 1991-01-24 1992-08-27 Shimadzu Corp 物体特性の評価方法
JPH05142141A (ja) * 1991-11-19 1993-06-08 Katsuya Masao 薄膜測定装置
US5625446A (en) 1993-10-18 1997-04-29 United Technologies Corporation Optical measurement system for articles with varying surface reflectivity
US6028671A (en) 1996-01-31 2000-02-22 General Scanning, Inc. Method and system for suppressing unwanted reflections in an optical system
WO2001007881A1 (en) * 1999-07-27 2001-02-01 Colorado School Of Mines Parallel detecting, spectroscopic ellipsometers/polarimeters
US6597454B1 (en) 2000-05-12 2003-07-22 X-Rite, Incorporated Color measurement instrument capable of obtaining simultaneous polarized and nonpolarized data
JP2002116085A (ja) * 2000-10-05 2002-04-19 Tetsuya Hamamoto 偏光計測装置
JP2002139423A (ja) * 2000-11-01 2002-05-17 Fuji Electric Co Ltd 油膜検知装置
JP2002148186A (ja) * 2000-11-09 2002-05-22 Olympus Optical Co Ltd 偏光測定方法および装置
JP2002162344A (ja) * 2000-11-22 2002-06-07 Nec Corp 異方性薄膜評価方法および装置
US20020089747A1 (en) 2001-01-09 2002-07-11 Hay Ranald Joseph Techniques for reducing observed glare by using polarized optical transmission & reception devices
JP4558217B2 (ja) * 2001-01-12 2010-10-06 独立行政法人理化学研究所 金属試料の特性を光学的に測定する方法及び装置
US6678057B2 (en) 2001-12-19 2004-01-13 General Electric Company Method and device for reduction in noise in images from shiny parts
US7253901B2 (en) * 2002-01-23 2007-08-07 Kla-Tencor Technologies Corporation Laser-based cleaning device for film analysis tool

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