JP4934244B2 - 部品の位置を検出する装置 - Google Patents

部品の位置を検出する装置 Download PDF

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Publication number
JP4934244B2
JP4934244B2 JP2000310386A JP2000310386A JP4934244B2 JP 4934244 B2 JP4934244 B2 JP 4934244B2 JP 2000310386 A JP2000310386 A JP 2000310386A JP 2000310386 A JP2000310386 A JP 2000310386A JP 4934244 B2 JP4934244 B2 JP 4934244B2
Authority
JP
Japan
Prior art keywords
rotating mirror
light beam
light
branch
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000310386A
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English (en)
Japanese (ja)
Other versions
JP2001153605A5 (https=
JP2001153605A (ja
Inventor
ベーレン イェンズ・フォン
クリストフ・ハウガー
フランク・ヘラー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of JP2001153605A publication Critical patent/JP2001153605A/ja
Publication of JP2001153605A5 publication Critical patent/JP2001153605A5/ja
Application granted granted Critical
Publication of JP4934244B2 publication Critical patent/JP4934244B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP2000310386A 1999-10-15 2000-10-11 部品の位置を検出する装置 Expired - Fee Related JP4934244B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19949760A DE19949760A1 (de) 1999-10-15 1999-10-15 Interferometer
DE19949760.5 1999-10-15

Publications (3)

Publication Number Publication Date
JP2001153605A JP2001153605A (ja) 2001-06-08
JP2001153605A5 JP2001153605A5 (https=) 2007-12-13
JP4934244B2 true JP4934244B2 (ja) 2012-05-16

Family

ID=7925778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000310386A Expired - Fee Related JP4934244B2 (ja) 1999-10-15 2000-10-11 部品の位置を検出する装置

Country Status (3)

Country Link
EP (1) EP1092943B1 (https=)
JP (1) JP4934244B2 (https=)
DE (2) DE19949760A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2393263B (en) * 2002-09-18 2004-10-27 Teraview Ltd Apparatus for varying the path length of a beam of radiation
US7742172B2 (en) 2002-09-18 2010-06-22 Teraview Limited Apparatus for varying the path length of a beam of radiation
DE102015119274B4 (de) * 2015-11-09 2018-07-12 Björn Habrich Verfahren und Vorrichtung zur Bestimmung der räumlichen Position eines Gegenstandes mittels interferometrischer Längenmessung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2457253C2 (de) * 1974-12-04 1982-09-02 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
DE3585758D1 (en) * 1984-07-18 1992-05-07 Philips Nv Interferometer.
JPS6130724A (ja) * 1984-07-24 1986-02-13 Jeol Ltd 干渉計
DE3446014C2 (de) * 1984-12-17 1987-02-26 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Interferometer nach dem Michelson-Prinzip
JP2712061B2 (ja) * 1991-04-11 1998-02-10 本田技研工業株式会社 移動体の位置検出装置
JPH081398B2 (ja) * 1991-09-26 1996-01-10 株式会社島津製作所 回転型干渉計
US5491524A (en) * 1994-10-05 1996-02-13 Carl Zeiss, Inc. Optical coherence tomography corneal mapping apparatus
EP0877913B1 (de) * 1995-05-04 2002-10-09 Haag-Streit AG Vorrichtung zur messung der dicke transparenter gegenstände
US6243191B1 (en) * 1998-02-03 2001-06-05 Carl Zeiss Jena Gmbh Optical path length modulator

Also Published As

Publication number Publication date
EP1092943B1 (de) 2004-11-17
DE50008654D1 (de) 2004-12-23
EP1092943A1 (de) 2001-04-18
DE19949760A1 (de) 2001-04-19
JP2001153605A (ja) 2001-06-08

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