DE19949760A1 - Interferometer - Google Patents

Interferometer

Info

Publication number
DE19949760A1
DE19949760A1 DE19949760A DE19949760A DE19949760A1 DE 19949760 A1 DE19949760 A1 DE 19949760A1 DE 19949760 A DE19949760 A DE 19949760A DE 19949760 A DE19949760 A DE 19949760A DE 19949760 A1 DE19949760 A1 DE 19949760A1
Authority
DE
Germany
Prior art keywords
reflecting surfaces
interferometer
branch
radiation
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19949760A
Other languages
German (de)
English (en)
Inventor
Jens Von Behren
Christoph Hauger
Frank Hoeller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Priority to DE19949760A priority Critical patent/DE19949760A1/de
Priority to DE50008654T priority patent/DE50008654D1/de
Priority to EP00120888A priority patent/EP1092943B1/de
Priority to JP2000310386A priority patent/JP4934244B2/ja
Publication of DE19949760A1 publication Critical patent/DE19949760A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
DE19949760A 1999-10-15 1999-10-15 Interferometer Withdrawn DE19949760A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19949760A DE19949760A1 (de) 1999-10-15 1999-10-15 Interferometer
DE50008654T DE50008654D1 (de) 1999-10-15 2000-09-26 Positionsbestimmung eines Bauteils
EP00120888A EP1092943B1 (de) 1999-10-15 2000-09-26 Positionsbestimmung eines Bauteils
JP2000310386A JP4934244B2 (ja) 1999-10-15 2000-10-11 部品の位置を検出する装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19949760A DE19949760A1 (de) 1999-10-15 1999-10-15 Interferometer

Publications (1)

Publication Number Publication Date
DE19949760A1 true DE19949760A1 (de) 2001-04-19

Family

ID=7925778

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19949760A Withdrawn DE19949760A1 (de) 1999-10-15 1999-10-15 Interferometer
DE50008654T Expired - Lifetime DE50008654D1 (de) 1999-10-15 2000-09-26 Positionsbestimmung eines Bauteils

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE50008654T Expired - Lifetime DE50008654D1 (de) 1999-10-15 2000-09-26 Positionsbestimmung eines Bauteils

Country Status (3)

Country Link
EP (1) EP1092943B1 (https=)
JP (1) JP4934244B2 (https=)
DE (2) DE19949760A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015119274A1 (de) * 2015-11-09 2017-05-11 Björn Habrich Verfahren und Vorrichtung zur Bestimmung der räumlichen Position eines Gegenstandes mittels interferometrischer Längenmessung

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2393263B (en) * 2002-09-18 2004-10-27 Teraview Ltd Apparatus for varying the path length of a beam of radiation
US7742172B2 (en) 2002-09-18 2010-06-22 Teraview Limited Apparatus for varying the path length of a beam of radiation

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2457253C2 (de) * 1974-12-04 1982-09-02 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
DE3585758D1 (en) * 1984-07-18 1992-05-07 Philips Nv Interferometer.
JPS6130724A (ja) * 1984-07-24 1986-02-13 Jeol Ltd 干渉計
DE3446014C2 (de) * 1984-12-17 1987-02-26 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Interferometer nach dem Michelson-Prinzip
JP2712061B2 (ja) * 1991-04-11 1998-02-10 本田技研工業株式会社 移動体の位置検出装置
JPH081398B2 (ja) * 1991-09-26 1996-01-10 株式会社島津製作所 回転型干渉計
US5491524A (en) * 1994-10-05 1996-02-13 Carl Zeiss, Inc. Optical coherence tomography corneal mapping apparatus
EP0877913B1 (de) * 1995-05-04 2002-10-09 Haag-Streit AG Vorrichtung zur messung der dicke transparenter gegenstände
US6243191B1 (en) * 1998-02-03 2001-06-05 Carl Zeiss Jena Gmbh Optical path length modulator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015119274A1 (de) * 2015-11-09 2017-05-11 Björn Habrich Verfahren und Vorrichtung zur Bestimmung der räumlichen Position eines Gegenstandes mittels interferometrischer Längenmessung
DE102015119274B4 (de) * 2015-11-09 2018-07-12 Björn Habrich Verfahren und Vorrichtung zur Bestimmung der räumlichen Position eines Gegenstandes mittels interferometrischer Längenmessung

Also Published As

Publication number Publication date
JP4934244B2 (ja) 2012-05-16
EP1092943B1 (de) 2004-11-17
DE50008654D1 (de) 2004-12-23
EP1092943A1 (de) 2001-04-18
JP2001153605A (ja) 2001-06-08

Similar Documents

Publication Publication Date Title
EP0987564B1 (de) Vorrichtung zur optischen Distanzmessung
EP2296002B1 (de) Optoelektronischer Scanner zur Abstandsbestimmung in Azimut- und Elevationsrichtung
EP0897121B1 (de) Vorrichtung zum Orten von in einen zu Überwachenden Raumbereich eindringenden Objekten
DE19721843C1 (de) Interferometrische Meßvorrichtung
EP3032275B1 (de) Optoelektronischer sensor und verfahren zum erfassen von objekten
DE10146692A1 (de) Hybrider Entfernungsbildsensor
EP1515157A1 (de) Optoelektronische Erfassungseinrichtung
EP1421430B1 (de) Abtastvorrichtung
DE2333281B2 (de) Verfahren zur Ermittlung der Fokussierung eines auf ein Objekt ausgesandten kohärenten Lichtstrahls
EP2473819A1 (de) Vorrichtung zur optischen distanzmessung sowie verfahren zur justierung einer solchen vorrichtung
EP1766435A1 (de) Abtastvorrichtung zum vermessen der konturen eines objektes
DE10141363A1 (de) Vorrichtung zur Abtastung einer Szene
DE19721842C2 (de) Interferometrische Meßvorrichtung
DE102011082112A1 (de) Optische Positionsmessvorrichtung
EP1092943B1 (de) Positionsbestimmung eines Bauteils
EP2690398B1 (de) Vorrichtung zum Ermitteln der Lage von mechanischen Elementen
EP3742956B1 (de) Verfahren zur erzeugung eines zweidimensionalen interferogramms mit einem freistrahl-interferometer des michelson-typs
DE102016213427A1 (de) LiDAR mit nachgeführtem Erfassungsbereich
DE10320991A1 (de) Optische Positionsmesseinrichtung
DE3517044C2 (https=)
DE2224324C2 (de) Visiergerät mit einem Fernrohr zur Beobachtung eines Zieles
DE102019120997A1 (de) Aktives optisches Sensorsystem
DE3229263C2 (de) Optisch-elektrische Meßeinrichtung zum Messen der Lage und/oder der Abmessung von Gegenständen
WO2008019937A1 (de) Michelson-interferometer
DE4006407C2 (de) Interferometrische Längen- oder Winkelmeßeinrichtung

Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee