JP4909023B2 - 変位検出装置 - Google Patents

変位検出装置 Download PDF

Info

Publication number
JP4909023B2
JP4909023B2 JP2006315391A JP2006315391A JP4909023B2 JP 4909023 B2 JP4909023 B2 JP 4909023B2 JP 2006315391 A JP2006315391 A JP 2006315391A JP 2006315391 A JP2006315391 A JP 2006315391A JP 4909023 B2 JP4909023 B2 JP 4909023B2
Authority
JP
Japan
Prior art keywords
light
displacement
reflected
light shielding
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006315391A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008128871A (ja
JP2008128871A5 (enExample
Inventor
英法 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2006315391A priority Critical patent/JP4909023B2/ja
Publication of JP2008128871A publication Critical patent/JP2008128871A/ja
Publication of JP2008128871A5 publication Critical patent/JP2008128871A5/ja
Application granted granted Critical
Publication of JP4909023B2 publication Critical patent/JP4909023B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Optical Transform (AREA)
JP2006315391A 2006-11-22 2006-11-22 変位検出装置 Expired - Fee Related JP4909023B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006315391A JP4909023B2 (ja) 2006-11-22 2006-11-22 変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006315391A JP4909023B2 (ja) 2006-11-22 2006-11-22 変位検出装置

Publications (3)

Publication Number Publication Date
JP2008128871A JP2008128871A (ja) 2008-06-05
JP2008128871A5 JP2008128871A5 (enExample) 2010-01-14
JP4909023B2 true JP4909023B2 (ja) 2012-04-04

Family

ID=39554838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006315391A Expired - Fee Related JP4909023B2 (ja) 2006-11-22 2006-11-22 変位検出装置

Country Status (1)

Country Link
JP (1) JP4909023B2 (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638048B2 (ja) * 1988-01-22 1994-05-18 株式会社ミツトヨ 反射型エンコーダ
JPH03287015A (ja) * 1990-04-04 1991-12-17 Mitsutoyo Corp 反射型光学式変位検出器
JPH0898838A (ja) * 1994-09-30 1996-04-16 Toshiba Corp エンコーダ装置、超音波プローブおよび超音波検査装置
JP4280447B2 (ja) * 2001-02-20 2009-06-17 キヤノン株式会社 反射スケールおよびそれを用いた変位検出装置

Also Published As

Publication number Publication date
JP2008128871A (ja) 2008-06-05

Similar Documents

Publication Publication Date Title
JP6001960B2 (ja) 配光特性測定装置および配光特性測定方法
JP5064049B2 (ja) バックグラウンドノイズを低減した反射型エンコーダ
JP2009236774A (ja) 三次元測距装置
WO2014057726A1 (ja) 位置検出装置、レンズ鏡筒、撮像装置
JP6973398B2 (ja) レンズ装置
US20130020475A1 (en) Optical wheel, rotary encoder, linear encoder and method for generating a zeroing signal of a rotary encoder
JPH06174999A (ja) レンズ初期位置検出装置
JP2005517169A (ja) パターン化領域を有している少なくとも１つの表面の位置を突き止めるための方法および装置
JP2005517168A (ja) 光学的な角度及びトルクセンサ
JP4909023B2 (ja) 変位検出装置
EP2093542B1 (en) Displacement detecting device and optical instrument having the same
GB2224581A (en) Apparatus for detecting open f number in zoom lens camera
US11662545B2 (en) Optical apparatus and image pickup apparatus using the same
CN101336391B (zh) 用于成像系统中的光学部件的位置检测的方法和设备
WO2011142462A1 (ja) 帯状部材の形状測定方法とその装置
US6487370B2 (en) Lens drive control apparatus
JP7188555B2 (ja) 光学制御装置および、これを含むヘッドアップディスプレイ装置
JP2002287006A (ja) レンズ位置識別装置
JP2008209304A (ja) 位置検出装置及びこれを用いたレンズ操作装置
JPH0894906A (ja) レンズ装置
JP2005195738A (ja) 共焦点光学系及び高さ測定装置
JPH1158053A (ja) レーザ加工装置
JP4632423B2 (ja) 位置制御装置、位置制御方法及び光学装置
JP2020106498A (ja) ロータリエンコーダ
KR100425770B1 (ko) 미소 반사체의 회전각도 측정장치

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091120

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091120

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20100218

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20100630

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110729

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110802

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111003

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120110

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150120

Year of fee payment: 3

R151 Written notification of patent or utility model registration

Ref document number: 4909023

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150120

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees