JP2008128871A5 - - Google Patents

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Publication number
JP2008128871A5
JP2008128871A5 JP2006315391A JP2006315391A JP2008128871A5 JP 2008128871 A5 JP2008128871 A5 JP 2008128871A5 JP 2006315391 A JP2006315391 A JP 2006315391A JP 2006315391 A JP2006315391 A JP 2006315391A JP 2008128871 A5 JP2008128871 A5 JP 2008128871A5
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JP
Japan
Prior art keywords
light
scale
reflected light
measurement object
displacement detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006315391A
Other languages
English (en)
Japanese (ja)
Other versions
JP4909023B2 (ja
JP2008128871A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006315391A priority Critical patent/JP4909023B2/ja
Priority claimed from JP2006315391A external-priority patent/JP4909023B2/ja
Publication of JP2008128871A publication Critical patent/JP2008128871A/ja
Publication of JP2008128871A5 publication Critical patent/JP2008128871A5/ja
Application granted granted Critical
Publication of JP4909023B2 publication Critical patent/JP4909023B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006315391A 2006-11-22 2006-11-22 変位検出装置 Expired - Fee Related JP4909023B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006315391A JP4909023B2 (ja) 2006-11-22 2006-11-22 変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006315391A JP4909023B2 (ja) 2006-11-22 2006-11-22 変位検出装置

Publications (3)

Publication Number Publication Date
JP2008128871A JP2008128871A (ja) 2008-06-05
JP2008128871A5 true JP2008128871A5 (enExample) 2010-01-14
JP4909023B2 JP4909023B2 (ja) 2012-04-04

Family

ID=39554838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006315391A Expired - Fee Related JP4909023B2 (ja) 2006-11-22 2006-11-22 変位検出装置

Country Status (1)

Country Link
JP (1) JP4909023B2 (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638048B2 (ja) * 1988-01-22 1994-05-18 株式会社ミツトヨ 反射型エンコーダ
JPH03287015A (ja) * 1990-04-04 1991-12-17 Mitsutoyo Corp 反射型光学式変位検出器
JPH0898838A (ja) * 1994-09-30 1996-04-16 Toshiba Corp エンコーダ装置、超音波プローブおよび超音波検査装置
JP4280447B2 (ja) * 2001-02-20 2009-06-17 キヤノン株式会社 反射スケールおよびそれを用いた変位検出装置

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