JP2007333722A5 - - Google Patents

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Publication number
JP2007333722A5
JP2007333722A5 JP2007020632A JP2007020632A JP2007333722A5 JP 2007333722 A5 JP2007333722 A5 JP 2007333722A5 JP 2007020632 A JP2007020632 A JP 2007020632A JP 2007020632 A JP2007020632 A JP 2007020632A JP 2007333722 A5 JP2007333722 A5 JP 2007333722A5
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JP
Japan
Prior art keywords
light
optical member
optical
scale
encoder according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007020632A
Other languages
English (en)
Japanese (ja)
Other versions
JP4924884B2 (ja
JP2007333722A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2007020632A external-priority patent/JP4924884B2/ja
Priority to JP2007020632A priority Critical patent/JP4924884B2/ja
Priority to US11/798,255 priority patent/US7601947B2/en
Priority to AT07108393T priority patent/ATE460646T1/de
Priority to DE602007005184T priority patent/DE602007005184D1/de
Priority to EP07108393A priority patent/EP1865292B1/en
Publication of JP2007333722A publication Critical patent/JP2007333722A/ja
Publication of JP2007333722A5 publication Critical patent/JP2007333722A5/ja
Publication of JP4924884B2 publication Critical patent/JP4924884B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007020632A 2006-05-19 2007-01-31 エンコーダ Expired - Fee Related JP4924884B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007020632A JP4924884B2 (ja) 2006-05-19 2007-01-31 エンコーダ
US11/798,255 US7601947B2 (en) 2006-05-19 2007-05-11 Encoder that optically detects positional information of a scale
EP07108393A EP1865292B1 (en) 2006-05-19 2007-05-16 Encoder
DE602007005184T DE602007005184D1 (de) 2006-05-19 2007-05-16 Kodierer
AT07108393T ATE460646T1 (de) 2006-05-19 2007-05-16 Kodierer

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006139658 2006-05-19
JP2006139658 2006-05-19
JP2007020632A JP4924884B2 (ja) 2006-05-19 2007-01-31 エンコーダ

Publications (3)

Publication Number Publication Date
JP2007333722A JP2007333722A (ja) 2007-12-27
JP2007333722A5 true JP2007333722A5 (enExample) 2010-07-29
JP4924884B2 JP4924884B2 (ja) 2012-04-25

Family

ID=38610770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007020632A Expired - Fee Related JP4924884B2 (ja) 2006-05-19 2007-01-31 エンコーダ

Country Status (4)

Country Link
EP (1) EP1865292B1 (enExample)
JP (1) JP4924884B2 (enExample)
AT (1) ATE460646T1 (enExample)
DE (1) DE602007005184D1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5212840B2 (ja) 2007-10-05 2013-06-19 株式会社ニコン エンコーダ
CN102197286B (zh) * 2008-10-23 2014-09-03 株式会社尼康 编码器
WO2010089824A1 (ja) * 2009-02-06 2010-08-12 株式会社ニコン エンコーダ
JP2011053142A (ja) * 2009-09-03 2011-03-17 Nikon Corp 波長検出装置、圧力検出装置、除振装置、および露光装置
US9970788B2 (en) * 2012-08-20 2018-05-15 Dmg Mori Seiki Co., Ltd. Scale measuring device, method for generating position information, and device with multi-axis stage
JP2014119446A (ja) * 2012-12-17 2014-06-30 Mitsutoyo Corp 光学エンコーダ用の照明部
DE102013203713A1 (de) * 2013-03-05 2014-02-13 Carl Zeiss Smt Gmbh Inkrementalgeber und Lithographievorrichtung
DE102015203188A1 (de) * 2015-02-23 2016-08-25 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP7252809B2 (ja) * 2019-03-28 2023-04-05 株式会社ミツトヨ 光電式エンコーダおよび光電式エンコーダにおける演算方法
CN115839761B (zh) * 2022-08-18 2025-09-16 中国航空工业集团公司北京长城计量测试技术研究所 光栅测量动态量标准信号模拟方法、装置和计算系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2736583C2 (de) * 1977-08-13 1985-11-07 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Verfahren und Einrichtungen zur Gewinnung von gegeneinander phasenverschobenen Steuersignalen für einen Vor-Rückwärtszähler
JP3034899B2 (ja) * 1990-04-09 2000-04-17 日本電信電話株式会社 エンコーダ
JP4938926B2 (ja) * 2000-10-10 2012-05-23 株式会社ミツトヨ 光学式エンコーダ
JP4337415B2 (ja) * 2003-06-10 2009-09-30 株式会社ニコン エンコーダ
JP4506271B2 (ja) 2004-05-13 2010-07-21 株式会社ニコン 光電式エンコーダ
JP2005326232A (ja) 2004-05-13 2005-11-24 Sendai Nikon:Kk 光電式エンコーダ

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