ATE460646T1 - Kodierer - Google Patents

Kodierer

Info

Publication number
ATE460646T1
ATE460646T1 AT07108393T AT07108393T ATE460646T1 AT E460646 T1 ATE460646 T1 AT E460646T1 AT 07108393 T AT07108393 T AT 07108393T AT 07108393 T AT07108393 T AT 07108393T AT E460646 T1 ATE460646 T1 AT E460646T1
Authority
AT
Austria
Prior art keywords
light
incident
optical path
path length
phase difference
Prior art date
Application number
AT07108393T
Other languages
German (de)
English (en)
Inventor
Susumu Makinouchi
Toru Imai
Akihiro Watanabe
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of ATE460646T1 publication Critical patent/ATE460646T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Valve Device For Special Equipments (AREA)
  • Amplifiers (AREA)
AT07108393T 2006-05-19 2007-05-16 Kodierer ATE460646T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006139658 2006-05-19
JP2007020632A JP4924884B2 (ja) 2006-05-19 2007-01-31 エンコーダ

Publications (1)

Publication Number Publication Date
ATE460646T1 true ATE460646T1 (de) 2010-03-15

Family

ID=38610770

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07108393T ATE460646T1 (de) 2006-05-19 2007-05-16 Kodierer

Country Status (4)

Country Link
EP (1) EP1865292B1 (enExample)
JP (1) JP4924884B2 (enExample)
AT (1) ATE460646T1 (enExample)
DE (1) DE602007005184D1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5212840B2 (ja) 2007-10-05 2013-06-19 株式会社ニコン エンコーダ
CN102197286B (zh) * 2008-10-23 2014-09-03 株式会社尼康 编码器
WO2010089824A1 (ja) * 2009-02-06 2010-08-12 株式会社ニコン エンコーダ
JP2011053142A (ja) * 2009-09-03 2011-03-17 Nikon Corp 波長検出装置、圧力検出装置、除振装置、および露光装置
US9970788B2 (en) * 2012-08-20 2018-05-15 Dmg Mori Seiki Co., Ltd. Scale measuring device, method for generating position information, and device with multi-axis stage
JP2014119446A (ja) * 2012-12-17 2014-06-30 Mitsutoyo Corp 光学エンコーダ用の照明部
DE102013203713A1 (de) * 2013-03-05 2014-02-13 Carl Zeiss Smt Gmbh Inkrementalgeber und Lithographievorrichtung
DE102015203188A1 (de) * 2015-02-23 2016-08-25 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP7252809B2 (ja) * 2019-03-28 2023-04-05 株式会社ミツトヨ 光電式エンコーダおよび光電式エンコーダにおける演算方法
CN115839761B (zh) * 2022-08-18 2025-09-16 中国航空工业集团公司北京长城计量测试技术研究所 光栅测量动态量标准信号模拟方法、装置和计算系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2736583C2 (de) * 1977-08-13 1985-11-07 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Verfahren und Einrichtungen zur Gewinnung von gegeneinander phasenverschobenen Steuersignalen für einen Vor-Rückwärtszähler
JP3034899B2 (ja) * 1990-04-09 2000-04-17 日本電信電話株式会社 エンコーダ
JP4938926B2 (ja) * 2000-10-10 2012-05-23 株式会社ミツトヨ 光学式エンコーダ
JP4337415B2 (ja) * 2003-06-10 2009-09-30 株式会社ニコン エンコーダ
JP4506271B2 (ja) 2004-05-13 2010-07-21 株式会社ニコン 光電式エンコーダ
JP2005326232A (ja) 2004-05-13 2005-11-24 Sendai Nikon:Kk 光電式エンコーダ

Also Published As

Publication number Publication date
JP4924884B2 (ja) 2012-04-25
DE602007005184D1 (de) 2010-04-22
EP1865292B1 (en) 2010-03-10
EP1865292A1 (en) 2007-12-12
JP2007333722A (ja) 2007-12-27

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties