JP4907691B2 - イオンの注入による窒化物半導体の形成方法及びこれを利用して製造した電子素子 - Google Patents
イオンの注入による窒化物半導体の形成方法及びこれを利用して製造した電子素子 Download PDFInfo
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- JP4907691B2 JP4907691B2 JP2009108661A JP2009108661A JP4907691B2 JP 4907691 B2 JP4907691 B2 JP 4907691B2 JP 2009108661 A JP2009108661 A JP 2009108661A JP 2009108661 A JP2009108661 A JP 2009108661A JP 4907691 B2 JP4907691 B2 JP 4907691B2
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- 150000004767 nitrides Chemical class 0.000 title claims description 101
- 238000005468 ion implantation Methods 0.000 title claims description 66
- 238000000034 method Methods 0.000 title claims description 51
- 239000004065 semiconductor Substances 0.000 title claims description 22
- 239000010409 thin film Substances 0.000 claims description 119
- 229910052751 metal Inorganic materials 0.000 claims description 81
- 239000002184 metal Substances 0.000 claims description 81
- 239000000758 substrate Substances 0.000 claims description 77
- 150000002500 ions Chemical class 0.000 claims description 26
- 229910052757 nitrogen Inorganic materials 0.000 claims description 10
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 8
- 229910052594 sapphire Inorganic materials 0.000 claims description 8
- 239000010980 sapphire Substances 0.000 claims description 8
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229910002704 AlGaN Inorganic materials 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 claims description 3
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- 229910052790 beryllium Inorganic materials 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 230000005669 field effect Effects 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 229910052744 lithium Inorganic materials 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 229910052712 strontium Inorganic materials 0.000 claims description 3
- 229910052717 sulfur Inorganic materials 0.000 claims description 3
- 229910052714 tellurium Inorganic materials 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 58
- 229910002601 GaN Inorganic materials 0.000 description 38
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 38
- 229910052710 silicon Inorganic materials 0.000 description 38
- 239000010703 silicon Substances 0.000 description 38
- 239000013078 crystal Substances 0.000 description 17
- 230000008569 process Effects 0.000 description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- 238000001878 scanning electron micrograph Methods 0.000 description 5
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000005253 cladding Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000003917 TEM image Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 238000004020 luminiscence type Methods 0.000 description 3
- -1 nitrogen ion Chemical class 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 208000012868 Overgrowth Diseases 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000002017 high-resolution X-ray diffraction Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02658—Pretreatments
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table further characterised by the doping material
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/26—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys
- H01L29/267—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys in different semiconductor regions, e.g. heterojunctions
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
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- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Led Devices (AREA)
- Recrystallisation Techniques (AREA)
- Semiconductor Lasers (AREA)
- Chemical Vapour Deposition (AREA)
Description
更に、本発明の一実施例に係る電子素子は、前述の金属窒化物薄膜を含む窒化物半導体を個別素子に切断し、それぞれの素子を分離して製造したチップと、上記チップが実装されるリードフレームと、上記リードフレームと連結されるカソードと、上記カソードと離隔して備えられ、金ワイヤーにより上記チップと連結されるアノードと、上記チップ、リードフレーム、及び上記金ワイヤーが連結された上記アノードの上部を保護し光を発散するレンズ役割をするエポキシとを備えることを特徴とする。
ここで、シリコン基板にライン/スペースパターンを形成する際に、シリコン結晶の[1−10]方位と垂直にライン/スペースパターンを形成する場合、金属窒化物薄膜の水平成長速度が非常に遅くなるので、パターン形成方向を正確に遵守しなければならない。
以下、シリコン基板に窒化ガリウム薄膜を形成する場合を例として説明する。
125 AlN層、130 金属窒化物薄膜、
135 金属窒化物薄膜、140 素子構造層
Claims (14)
- 1E17イオン/cm2超過、5E18イオン/cm2以下のイオン注入ドーズ量及び30〜50keVのイオン注入エネルギーを用いて、基板の表面にイオン注入処理したラインパターンと、イオン注入処理していないスペースパターンを反復形成した領域を形成する段階と、
上記基板の全面に、InxAlyGa1-x-yN層(0.3≧x≧0、y≧0.1、x+y≦1)を形成する段階と、
上記InxAlyGa1-x-yN層を含む上記基板の全面に、金属窒化物薄膜を形成し、上記スペースパターンの上部から上記ラインパターンの上部へ上記窒化物が水平成長されながら、金属窒化物薄膜が形成されるようにする段階と
を備えることを特徴とする窒化物半導体の形成方法。 - 上記基板は、Si基板、サファイア基板、SiC 基板、GaAs基板、InP基板、及びGe基板のうち、選択された一つを利用することを特徴とする請求項1に記載の窒化物半導体の形成方法。
- 上記ラインパターンに注入されるイオンは、N、C、B、Be、Li、Mg、O、F、S、P、As、Sr、Te、及びこれらの化合物のうち、選択されたいずれか一つを利用することを特徴とする請求項1に記載の窒化物半導体の形成方法。
- 上記領域は、上記基板の表面から50nm〜1μmの深さまで形成されることを特徴とする請求項1に記載の窒化物半導体の形成方法。
- 上記領域は、上記基板の表面から50nm〜200nmの深さまで形成されることを特徴とする請求項1に記載の窒化物半導体の形成方法。
- 上記金属窒化物薄膜は、GaN,InGaAlN,InGaN,AlGaN、及びAlNのうち、選択される一つ以上の物質から形成されることを特徴とする請求項1に記載の窒化物半導体の形成方法。
- 上記金属窒化物薄膜は、MOCVD(metal organic chemical vapor deposition)、MBE(molecular beam epitaxy)、HVPE(hydride vapor phase epitaxy)、及びALD(atomic layer deposition)のうち、選択された一つの方法により形成されることを特徴とする請求項1に記載の窒化物半導体の形成方法。
- 上記金属窒化物薄膜のXRD(X−ray Defractometry)半幅値は、820arcsec以下となるように成長させることを特徴とする請求項1に記載の窒化物半導体の形成方法。
- 上記金属窒化物薄膜の上部には、下部クラッド層、活性層、及び上部クラッド層を順次に形成する段階を更に備えることを特徴とする請求項1に記載の窒化物半導体の形成方法。
- 請求項1において形成された金属窒化物薄膜を含む窒化物半導体を利用して製造された光素子。
- 上記光素子は、発光ダイオードまたはレーザーダイオード(Laser diode)のうちのいずれか一つであることを特徴とする請求項10に記載の光素子。
- 請求項1において形成された金属窒化物薄膜を含む窒化物半導体を利用して製造された電子素子。
- 上記電子素子は、HEMT(Heterojunction Field−Effect Transistors)またはHBT(Heterojunction Bipolar Transistor)のうちのいずれか一つであることを特徴とする請求項12に記載の電子素子。
- 請求項1において形成された金属窒化物薄膜を含む窒化物半導体を個別素子に切断し、それぞれの素子を分離して製造したチップと、
上記チップが実装されるリードフレームと、
上記リードフレームと連結されるカソードと、
上記カソードと離隔して備えられ、金ワイヤーにより、上記チップと連結されるアノードと、
上記チップ、リードフレーム、及び上記金ワイヤーが連結された上記アノードの上部を保護し光を発散するレンズの役割をするエポキシと
を備えることを特徴とする電子素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2008-0091436 | 2008-09-18 | ||
KR1020080091436A KR100988126B1 (ko) | 2008-09-18 | 2008-09-18 | 이온주입을 통한 질화물 반도체 형성 방법 및 이를 이용하여 제조한 발광다이오드 |
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JP2010074133A JP2010074133A (ja) | 2010-04-02 |
JP4907691B2 true JP4907691B2 (ja) | 2012-04-04 |
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US (1) | US7977223B2 (ja) |
JP (1) | JP4907691B2 (ja) |
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KR101762177B1 (ko) | 2010-12-17 | 2017-07-27 | 삼성전자 주식회사 | 반도체 소자 및 반도체 소자 제조 방법 |
TWI462285B (zh) * | 2010-12-30 | 2014-11-21 | Lextar Electronics Corp | 半導體結構及其製造方法 |
KR101052637B1 (ko) * | 2011-03-17 | 2011-07-28 | 일진머티리얼즈 주식회사 | 결함의 관통 억제 효과가 우수한 질화물 반도체 소자 및 그 제조 방법 |
US8969181B2 (en) * | 2011-04-11 | 2015-03-03 | Varian Semiconductor Equipment Associates, Inc. | Method for epitaxial layer overgrowth |
US9023722B2 (en) * | 2011-05-13 | 2015-05-05 | Varian Semiconductor Equipment Associates, Inc. | Compound semiconductor growth using ion implantation |
US8835287B2 (en) * | 2011-05-13 | 2014-09-16 | Varian Semiconductor Equipment Associates, Inc. | Method of implanting a workpiece to improve growth of a compound semiconductor |
KR20130062736A (ko) | 2011-12-05 | 2013-06-13 | 삼성전자주식회사 | 실리콘 기판, 이를 채용한 에피 구조체 및 실리콘 기판의 제조 방법 |
KR102288118B1 (ko) | 2012-02-23 | 2021-08-11 | 센서 일렉트로닉 테크놀로지, 인크 | 반도체에 대한 오믹 접촉부 |
US20140367693A1 (en) * | 2013-06-14 | 2014-12-18 | Epistar Corporation | Light-emitting device and the manufacturing method thereof |
US9362452B2 (en) * | 2013-06-14 | 2016-06-07 | Epistar Corporation | Light-emitting device and the manufacturing method thereof |
KR102185686B1 (ko) * | 2014-03-12 | 2020-12-02 | 엘지이노텍 주식회사 | 에피택셜층의 성장 방법 및 반도체 구조물 |
US9711683B2 (en) * | 2014-09-26 | 2017-07-18 | Epistar Corporation | Semiconductor device and the method of manufacturing the same |
KR102365836B1 (ko) * | 2015-02-09 | 2022-02-22 | 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 | 발광 소자 및 이를 포함하는 발광 소자 어레이 |
CN112701030B (zh) * | 2020-12-28 | 2021-11-23 | 瀚天天成电子科技(厦门)有限公司 | 一种降低碳化硅外延片生长缺陷的方法及碳化硅衬底 |
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JPH08222812A (ja) * | 1995-02-17 | 1996-08-30 | Matsushita Electric Ind Co Ltd | 窒化ガリウム系化合物半導体の結晶成長方法 |
JPH11274563A (ja) * | 1998-03-18 | 1999-10-08 | Ricoh Co Ltd | 半導体装置および半導体発光素子 |
JP2000077336A (ja) * | 1998-08-28 | 2000-03-14 | Sony Corp | 半導体成長用基板およびその製造方法ならびに半導体装置 |
JP4127463B2 (ja) * | 2001-02-14 | 2008-07-30 | 豊田合成株式会社 | Iii族窒化物系化合物半導体の結晶成長方法及びiii族窒化物系化合物半導体発光素子の製造方法 |
JP3562478B2 (ja) * | 2001-03-16 | 2004-09-08 | 日亜化学工業株式会社 | 窒化物半導体の成長方法及びそれを用いた素子 |
US7105865B2 (en) * | 2001-09-19 | 2006-09-12 | Sumitomo Electric Industries, Ltd. | AlxInyGa1−x−yN mixture crystal substrate |
KR100858923B1 (ko) * | 2006-09-29 | 2008-09-17 | 고려대학교 산학협력단 | 질화갈륨 박막 제조용 단결정 기판, 질화갈륨 박막제조방법 및 질화갈륨 박막 제조용 단결정 기판으로 제조된질화갈륨 박막을 포함하는 발광다이오드 및레이저다이오드 |
KR100936869B1 (ko) * | 2007-12-10 | 2010-01-14 | 고려대학교 산학협력단 | 질화물 반도체소자 및 그 제조방법 |
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2008
- 2008-09-18 KR KR1020080091436A patent/KR100988126B1/ko active IP Right Grant
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KR100988126B1 (ko) | 2010-10-18 |
US7977223B2 (en) | 2011-07-12 |
KR20100032513A (ko) | 2010-03-26 |
US20100065865A1 (en) | 2010-03-18 |
JP2010074133A (ja) | 2010-04-02 |
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