JP4905507B2 - プローブカード - Google Patents

プローブカード Download PDF

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Publication number
JP4905507B2
JP4905507B2 JP2009151767A JP2009151767A JP4905507B2 JP 4905507 B2 JP4905507 B2 JP 4905507B2 JP 2009151767 A JP2009151767 A JP 2009151767A JP 2009151767 A JP2009151767 A JP 2009151767A JP 4905507 B2 JP4905507 B2 JP 4905507B2
Authority
JP
Japan
Prior art keywords
wiring board
probe
holding member
probe card
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009151767A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011009481A (ja
Inventor
洋 茂木
亮 源馬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaichi Electronics Co Ltd
Original Assignee
Yamaichi Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaichi Electronics Co Ltd filed Critical Yamaichi Electronics Co Ltd
Priority to JP2009151767A priority Critical patent/JP4905507B2/ja
Priority to TW99106744A priority patent/TWI404938B/zh
Publication of JP2011009481A publication Critical patent/JP2011009481A/ja
Application granted granted Critical
Publication of JP4905507B2 publication Critical patent/JP4905507B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2009151767A 2009-06-26 2009-06-26 プローブカード Expired - Fee Related JP4905507B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009151767A JP4905507B2 (ja) 2009-06-26 2009-06-26 プローブカード
TW99106744A TWI404938B (zh) 2009-06-26 2010-03-09 探針卡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009151767A JP4905507B2 (ja) 2009-06-26 2009-06-26 プローブカード

Publications (2)

Publication Number Publication Date
JP2011009481A JP2011009481A (ja) 2011-01-13
JP4905507B2 true JP4905507B2 (ja) 2012-03-28

Family

ID=43565793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009151767A Expired - Fee Related JP4905507B2 (ja) 2009-06-26 2009-06-26 プローブカード

Country Status (2)

Country Link
JP (1) JP4905507B2 (zh)
TW (1) TWI404938B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI443341B (zh) * 2011-07-28 2014-07-01 Star Techn Inc 半導體元件測試裝置
CN103185819B (zh) 2011-12-27 2016-08-17 联咏科技股份有限公司 探针卡及其制作方法
TWI464410B (zh) * 2011-12-27 2014-12-11 Novatek Microelectronics Corp 探針卡及其製作方法
CN103901240B (zh) * 2014-03-24 2017-05-24 上海华力微电子有限公司 探针卡识别芯片安装方法
KR101754991B1 (ko) * 2015-08-13 2017-07-06 (주)엠투엔 프로브 카드
US10705118B2 (en) * 2017-03-23 2020-07-07 Ford Global Technologies, Llc Power module testing apparatus
KR102062470B1 (ko) * 2018-12-26 2020-02-17 고기돈 Ｒｆ 칩 테스트를 위한 캔틸레버 프루브를 구비한 필름 타입 프루브 카드

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6171367A (ja) * 1984-09-17 1986-04-12 Hiyuuguru Electron Kk 固定ブロ−ブカ−ド
JPH0250449A (ja) * 1988-08-12 1990-02-20 Hitachi Ltd ウエハ検査システム
JPH0677296A (ja) * 1992-05-29 1994-03-18 Eejingu Tesuta Kaihatsu Kyodo Kumiai 集積回路素子ウエハー用測定電極
JP4313861B2 (ja) * 1997-08-01 2009-08-12 キヤノン株式会社 プローブアレイの製造方法
SE522869C2 (sv) * 2001-08-08 2004-03-16 Energy Ceiling Co Ltd Platta för värmande och/eller kylande undertak
JP2004125548A (ja) * 2002-10-01 2004-04-22 Micronics Japan Co Ltd プローブカード
JP4709707B2 (ja) * 2006-07-28 2011-06-22 旺▲夕▼科技股▲分▼有限公司 高周波プローブカード
TWM358968U (en) * 2008-12-31 2009-06-11 Universal Scient Ind Co Ltd Probe device

Also Published As

Publication number Publication date
JP2011009481A (ja) 2011-01-13
TW201100811A (en) 2011-01-01
TWI404938B (zh) 2013-08-11

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