JP4902150B2 - 膜転写方法 - Google Patents

膜転写方法 Download PDF

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Publication number
JP4902150B2
JP4902150B2 JP2005221119A JP2005221119A JP4902150B2 JP 4902150 B2 JP4902150 B2 JP 4902150B2 JP 2005221119 A JP2005221119 A JP 2005221119A JP 2005221119 A JP2005221119 A JP 2005221119A JP 4902150 B2 JP4902150 B2 JP 4902150B2
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Japan
Prior art keywords
film
substrate
gan
transfer method
separation layer
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JP2005221119A
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Japanese (ja)
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JP2007036131A (ja
JP2007036131A5 (enrdf_load_stackoverflow
Inventor
詩男 王
正剛 赤池
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Canon Inc
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Canon Inc
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Priority to JP2005221119A priority Critical patent/JP4902150B2/ja
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Publication of JP2007036131A5 publication Critical patent/JP2007036131A5/ja
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Publication of JP4902150B2 publication Critical patent/JP4902150B2/ja
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  • Led Devices (AREA)
  • Laser Beam Processing (AREA)
JP2005221119A 2005-07-29 2005-07-29 膜転写方法 Expired - Fee Related JP4902150B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005221119A JP4902150B2 (ja) 2005-07-29 2005-07-29 膜転写方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005221119A JP4902150B2 (ja) 2005-07-29 2005-07-29 膜転写方法

Publications (3)

Publication Number Publication Date
JP2007036131A JP2007036131A (ja) 2007-02-08
JP2007036131A5 JP2007036131A5 (enrdf_load_stackoverflow) 2008-02-14
JP4902150B2 true JP4902150B2 (ja) 2012-03-21

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JP2005221119A Expired - Fee Related JP4902150B2 (ja) 2005-07-29 2005-07-29 膜転写方法

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JP (1) JP4902150B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4944470B2 (ja) * 2006-03-28 2012-05-30 パナソニック株式会社 発光素子の製造方法
WO2019244460A1 (ja) * 2018-06-19 2019-12-26 株式会社ブイ・テクノロジー 半導体素子形成サファイア基板、及び前記半導体素子形成サファイア基板の製造方法、並びに前記半導体素子の転写方法
JP2019220666A (ja) * 2018-06-19 2019-12-26 株式会社ブイ・テクノロジー 半導体素子形成サファイア基板、及び前記半導体素子形成サファイア基板の製造方法、並びに前記半導体素子の転写方法
US11177250B2 (en) * 2019-09-17 2021-11-16 Tokyo Electron Limited Method for fabrication of high density logic and memory for advanced circuit architecture

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004072052A (ja) * 2002-08-09 2004-03-04 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法

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