JP4888241B2 - マイクロレンズアレイ付き部品の製造方法 - Google Patents

マイクロレンズアレイ付き部品の製造方法 Download PDF

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Publication number
JP4888241B2
JP4888241B2 JP2007159836A JP2007159836A JP4888241B2 JP 4888241 B2 JP4888241 B2 JP 4888241B2 JP 2007159836 A JP2007159836 A JP 2007159836A JP 2007159836 A JP2007159836 A JP 2007159836A JP 4888241 B2 JP4888241 B2 JP 4888241B2
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Japan
Prior art keywords
substrate
microlens array
component
microlens
mark
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Expired - Fee Related
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JP2007159836A
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Japanese (ja)
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JP2008310213A5 (enExample
JP2008310213A (ja
Inventor
淳 斎藤
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Seiko Epson Corp
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Seiko Epson Corp
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JP2007159836A 2007-06-18 2007-06-18 マイクロレンズアレイ付き部品の製造方法 Expired - Fee Related JP4888241B2 (ja)

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JP2007159836A JP4888241B2 (ja) 2007-06-18 2007-06-18 マイクロレンズアレイ付き部品の製造方法

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JP2007159836A JP4888241B2 (ja) 2007-06-18 2007-06-18 マイクロレンズアレイ付き部品の製造方法

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JP2008310213A JP2008310213A (ja) 2008-12-25
JP2008310213A5 JP2008310213A5 (enExample) 2010-07-08
JP4888241B2 true JP4888241B2 (ja) 2012-02-29

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JP2007159836A Expired - Fee Related JP4888241B2 (ja) 2007-06-18 2007-06-18 マイクロレンズアレイ付き部品の製造方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021020611A1 (ko) * 2019-07-29 2021-02-04 엘지전자 주식회사 마이크로 렌즈 어레이 및 그 제조 방법

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5141150B2 (ja) * 2007-09-20 2013-02-13 大日本印刷株式会社 両面賦型シートの製造方法、両面賦型シートの製造装置、両面賦型シート
CN103718066B (zh) * 2011-07-29 2016-04-27 株式会社V技术 微透镜阵列及使用微透镜阵列的扫描曝光装置
JPWO2013191034A1 (ja) * 2012-06-22 2016-05-26 コニカミノルタ株式会社 ウエハレンズ、ウエハレンズ用の成形型及びウエハレンズの製造方法
JP6145990B2 (ja) * 2012-10-29 2017-06-14 セイコーエプソン株式会社 マイクロレンズアレイ基板の製造方法
JP2014165333A (ja) * 2013-02-25 2014-09-08 Kyocera Corp 光照射デバイス、光照射モジュールおよび印刷装置
KR101626749B1 (ko) * 2014-11-14 2016-06-02 해성옵틱스(주) 어레이렌즈 제조장치와 어레이렌즈 제조방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11352468A (ja) * 1998-06-05 1999-12-24 Sony Corp アライメントマークおよびアライメントマークの認識方法
JP2002006114A (ja) * 2000-06-27 2002-01-09 Seiko Epson Corp マイクロレンズ基板の製造方法、マイクロレンズ基板、電気光学装置、液晶パネル用対向基板、液晶パネル、および投射型表示装置
JP2002192534A (ja) * 2000-12-27 2002-07-10 Seiko Epson Corp マイクロレンズアレイ、その製造方法及びその製造用原盤並びに光学装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021020611A1 (ko) * 2019-07-29 2021-02-04 엘지전자 주식회사 마이크로 렌즈 어레이 및 그 제조 방법
US11668860B2 (en) 2019-07-29 2023-06-06 Lg Electronics Inc. Micro-lens array and method of manufacturing the same

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JP2008310213A (ja) 2008-12-25

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