JP4875036B2 - カーボンナノチューブの製造設備 - Google Patents
カーボンナノチューブの製造設備 Download PDFInfo
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- JP4875036B2 JP4875036B2 JP2008235603A JP2008235603A JP4875036B2 JP 4875036 B2 JP4875036 B2 JP 4875036B2 JP 2008235603 A JP2008235603 A JP 2008235603A JP 2008235603 A JP2008235603 A JP 2008235603A JP 4875036 B2 JP4875036 B2 JP 4875036B2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 117
- 239000002041 carbon nanotube Substances 0.000 title claims description 88
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims description 88
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 230000031700 light absorption Effects 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 42
- 238000000034 method Methods 0.000 description 38
- 239000003054 catalyst Substances 0.000 description 36
- 229910052799 carbon Inorganic materials 0.000 description 24
- 239000007789 gas Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 15
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- 239000012159 carrier gas Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000011065 in-situ storage Methods 0.000 description 8
- YIXJRHPUWRPCBB-UHFFFAOYSA-N magnesium nitrate Chemical compound [Mg+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O YIXJRHPUWRPCBB-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000003575 carbonaceous material Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229910002554 Fe(NO3)3·9H2O Inorganic materials 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000006229 carbon black Substances 0.000 description 4
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical group [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 4
- 238000001182 laser chemical vapour deposition Methods 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 4
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000005234 chemical deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000002270 dispersing agent Substances 0.000 description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 229910001960 metal nitrate Inorganic materials 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- KBJMLQFLOWQJNF-UHFFFAOYSA-N nickel(ii) nitrate Chemical compound [Ni+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O KBJMLQFLOWQJNF-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000001241 arc-discharge method Methods 0.000 description 1
- -1 argon ion Chemical class 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- UFMZWBIQTDUYBN-UHFFFAOYSA-N cobalt dinitrate Chemical compound [Co+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O UFMZWBIQTDUYBN-UHFFFAOYSA-N 0.000 description 1
- QGUAJWGNOXCYJF-UHFFFAOYSA-N cobalt dinitrate hexahydrate Chemical compound O.O.O.O.O.O.[Co+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O QGUAJWGNOXCYJF-UHFFFAOYSA-N 0.000 description 1
- 229910001981 cobalt nitrate Inorganic materials 0.000 description 1
- KTPIHRZQGZDLSN-UHFFFAOYSA-N cobalt;nitric acid Chemical compound [Co].O[N+]([O-])=O KTPIHRZQGZDLSN-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000001017 electron-beam sputter deposition Methods 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002048 multi walled nanotube Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002109 single walled nanotube Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/602—Nanotubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/16—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/605—Products containing multiple oriented crystallites, e.g. columnar crystallites
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
Description
100 設備
101 加熱炉
102 反応室
104 基板
108 カーボンナノチューブ
2 観測装置
21 観測筒
211 第四集光レンズ
22 観測窓
23 第一ペリクルミラー
24 第二ペリクルミラー
25 吸収シート
3 作業台
4 レーザ装置
41 レーザ素子
411 レーザビーム
42 レーザビーム放出管
421 第一集光レンズ
422 第一フィルターレンズ
423 拡散板
424 開口絞り
5 照射装置
51 ランプボックス
511 売体
512 ランプ
52 発光チューブ
521 第二集光レンズ
522 第三集光レンズ
523 第二フィルターシート
81 試料
82 混合ガス
821 カーボンを含むガス
822 キャリアガス
9 カーボンナノチューブアレイ
Claims (6)
- 観測筒と、該観測筒の一側に設置される観測窓と、前記観測筒の中に45°で斜め設置される第一ペリクルミラーと、該第一ペリクルミラーに平行に設置される第二ペリクルミラーと、を含む観測装置と、
前記観測筒の前記観測窓が設置された側に対向する一側に所定の距離で対向して設置される作業台と、
前記第一ペリクルミラーに光学的に対応し、前記観測装置に垂直に設置されるレーザ装置と、
前記第二ペリクルミラーに光学的に対応し、前記観測装置に垂直に設置される照射装置と、を含むことを特徴とするカーボンナノチューブの製造設備。 - 前記観測装置と、前記レーザ装置と、前記照射装置とは、相互に光学的に接続されていることを特徴とする、請求項1に記載のカーボンナノチューブの製造設備。
- 前記第一ペリクルミラーから所定の距離で分離させ、前記観測筒の中に第四集光レンズを設置していることを特徴とする、請求項1に記載のカーボンナノチューブの製造設備。
- 前記レーザ装置は、レーザビーム放出管及びレーザ素子を備え、
前記レーザビーム放出管は、その第一端部から第二端部まで配列した第一集光レンズと、第一フィルターシートと、拡散板と、開口絞りと、を備えることを特徴とする、請求項1又は2に記載のカーボンナノチューブの製造設備。 - 前記照射装置は、ランプボックス及び発光チューブを備えることを特徴とする、請求項1に記載のカーボンナノチューブの製造設備。
- 前記第二ペリクルミラー及び前記観測窓の間に、光吸収シートを設置していることを特徴とする、請求項1に記載のカーボンナノチューブの製造設備。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710077112.7 | 2007-09-14 | ||
CN2007100771127A CN101387008B (zh) | 2007-09-14 | 2007-09-14 | 碳纳米管生长装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009067675A JP2009067675A (ja) | 2009-04-02 |
JP4875036B2 true JP4875036B2 (ja) | 2012-02-15 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008235603A Active JP4875036B2 (ja) | 2007-09-14 | 2008-09-12 | カーボンナノチューブの製造設備 |
Country Status (3)
Country | Link |
---|---|
US (3) | US8077318B2 (ja) |
JP (1) | JP4875036B2 (ja) |
CN (1) | CN101387008B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2011219810A (ja) * | 2010-04-08 | 2011-11-04 | Showa Denko Kk | 炭素薄膜付アルミニウム材の製造方法 |
JP5906109B2 (ja) * | 2012-03-23 | 2016-04-20 | ビジョン開発株式会社 | 糸状又はシート状カーボンナノチューブの製造方法 |
CN103487142B (zh) * | 2012-06-12 | 2015-12-16 | 清华大学 | 光强分布的测量方法 |
CN103487143B (zh) * | 2012-06-12 | 2015-07-29 | 清华大学 | 光强分布的检测系统 |
CN103487139B (zh) * | 2012-06-12 | 2015-07-29 | 清华大学 | 光强分布的测量方法 |
CN103487141B (zh) * | 2012-06-12 | 2015-07-29 | 清华大学 | 光强分布的检测系统 |
US8471132B1 (en) * | 2012-10-01 | 2013-06-25 | Tsinghua University | Method for measuring intensity distribution of light |
EP3661871A4 (en) * | 2017-07-31 | 2021-03-17 | Jiangsu Cnano Technology Co., Ltd. | HEIGHT-REGULATED CARBON NANOTUBES NETWORKS |
CN113731685B (zh) * | 2021-09-26 | 2022-04-19 | 山东省建设建工(集团)有限责任公司 | 一种适用于大面积耐磨防腐金刚砂抗裂楼地面的施工装置及施工方法 |
CN115583648B (zh) * | 2022-09-05 | 2023-09-26 | 烟台大学 | 一种热激励碳纳米管表面的改性方法 |
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EP1903004A1 (en) * | 2005-05-12 | 2008-03-26 | Japan Science and Technology Agency | Carbon nanotube composition, process for producing the same, array and electronic device |
US20080233402A1 (en) * | 2006-06-08 | 2008-09-25 | Sid Richardson Carbon & Gasoline Co. | Carbon black with attached carbon nanotubes and method of manufacture |
CN101209832B (zh) * | 2006-12-29 | 2010-05-12 | 清华大学 | 碳纳米管阵列的制备方法 |
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2007
- 2007-09-14 CN CN2007100771127A patent/CN101387008B/zh active Active
- 2007-11-12 US US11/938,478 patent/US8077318B2/en active Active
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CN101387008B (zh) | 2011-05-04 |
US20100277735A1 (en) | 2010-11-04 |
US20120064258A1 (en) | 2012-03-15 |
CN101387008A (zh) | 2009-03-18 |
US8077318B2 (en) | 2011-12-13 |
JP2009067675A (ja) | 2009-04-02 |
US9394625B2 (en) | 2016-07-19 |
US20140205765A1 (en) | 2014-07-24 |
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