JP4869610B2 - 基板保持部材及び基板処理装置 - Google Patents
基板保持部材及び基板処理装置 Download PDFInfo
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- JP4869610B2 JP4869610B2 JP2005076555A JP2005076555A JP4869610B2 JP 4869610 B2 JP4869610 B2 JP 4869610B2 JP 2005076555 A JP2005076555 A JP 2005076555A JP 2005076555 A JP2005076555 A JP 2005076555A JP 4869610 B2 JP4869610 B2 JP 4869610B2
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- Prior art keywords
- substrate
- substrate holding
- holding surface
- region
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
Description
13 サセプタ
20 基板保持面
21 外周リング
22 凸部
R1 中心領域
R2 中間領域
R3 外周領域
W 基板
Claims (4)
- 基板を載置して保持し,基板と基板保持面との熱伝達により基板を温度制御する基板保持部材であって,
基板よりも小さい基板保持面を有し,
前記基板と基板保持面との熱伝達率は,基板保持面の材質を変えることによって設定されており,且つ基板保持面の中心領域と外周領域との間の中間領域が前記中心領域と前記外周領域に対し低くなっており,前記外周領域が前記中心領域に対して高くなっていることを特徴とする,基板保持部材。 - 基板を載置して保持し,基板と基板保持面との熱伝達により基板を温度制御する基板保持部材であって,
基板よりも小さい基板保持面を有し,
前記基板と基板保持面との熱伝達率は,基板保持面の表面粗さを変えることにより設定されており,且つ基板保持面の中心領域と外周領域との間の中間領域が前記中心領域と前記外周領域に対し低くなっており,前記外周領域が前記中心領域に対して高くなっていることを特徴とする,基板保持部材。 - 前記基板保持面の中間領域は,保持した基板の中心から見て基板の半径の80〜90%の範囲に位置していることを特徴とする,請求項1または2のいずれかに記載の基板保持部材。
- 請求項1〜3のいずれかに記載の基板保持部材を備えた基板処理装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005076555A JP4869610B2 (ja) | 2005-03-17 | 2005-03-17 | 基板保持部材及び基板処理装置 |
CNB2006100576971A CN100390957C (zh) | 2005-03-17 | 2006-02-24 | 基板保持部件及基板处理装置 |
US11/370,145 US7718007B2 (en) | 2005-03-17 | 2006-03-08 | Substrate supporting member and substrate processing apparatus |
TW095109000A TWI392043B (zh) | 2005-03-17 | 2006-03-16 | A substrate holding member and a substrate processing apparatus |
KR1020060024138A KR100735937B1 (ko) | 2005-03-17 | 2006-03-16 | 기판 유지 부재 및 기판 처리 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005076555A JP4869610B2 (ja) | 2005-03-17 | 2005-03-17 | 基板保持部材及び基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006257495A JP2006257495A (ja) | 2006-09-28 |
JP4869610B2 true JP4869610B2 (ja) | 2012-02-08 |
Family
ID=37002890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005076555A Active JP4869610B2 (ja) | 2005-03-17 | 2005-03-17 | 基板保持部材及び基板処理装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4869610B2 (ja) |
KR (1) | KR100735937B1 (ja) |
CN (1) | CN100390957C (ja) |
TW (1) | TWI392043B (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7649729B2 (en) * | 2007-10-12 | 2010-01-19 | Applied Materials, Inc. | Electrostatic chuck assembly |
JP4533925B2 (ja) | 2007-12-17 | 2010-09-01 | 財団法人高知県産業振興センター | 成膜装置及び成膜方法 |
JP4533926B2 (ja) * | 2007-12-26 | 2010-09-01 | 財団法人高知県産業振興センター | 成膜装置及び成膜方法 |
KR100943427B1 (ko) * | 2008-02-04 | 2010-02-19 | 주식회사 유진테크 | 기판지지유닛 및 기판처리장치, 그리고 기판지지유닛을제조하는 방법 |
JP2009212345A (ja) * | 2008-03-05 | 2009-09-17 | Nsk Ltd | ワークチャック、露光装置及びフラットパネル製造方法 |
JP2009212344A (ja) * | 2008-03-05 | 2009-09-17 | Nsk Ltd | ワークチャック、露光装置及びフラットパネル製造方法 |
JP5243465B2 (ja) * | 2010-01-28 | 2013-07-24 | パナソニック株式会社 | プラズマ処理装置 |
JP5670235B2 (ja) * | 2011-03-24 | 2015-02-18 | コバレントマテリアル株式会社 | 静電チャック |
KR101310109B1 (ko) * | 2011-06-13 | 2013-09-23 | 주식회사 엠와이에스 | 세라믹 몸체의 가장자리에 패드가 형성된 정전기 척 |
JP6173936B2 (ja) * | 2013-02-28 | 2017-08-02 | 東京エレクトロン株式会社 | 載置台及びプラズマ処理装置 |
US20160225652A1 (en) * | 2015-02-03 | 2016-08-04 | Applied Materials, Inc. | Low temperature chuck for plasma processing systems |
CN104950581A (zh) * | 2015-07-02 | 2015-09-30 | 武汉华星光电技术有限公司 | 烘烤装置和光刻胶层的硬化方法 |
KR101958636B1 (ko) * | 2016-10-31 | 2019-03-18 | 세메스 주식회사 | 기판 지지 장치 및 이를 가지는 기판 처리 설비, 그리고 기판 처리 방법 |
JP6818351B2 (ja) * | 2017-04-14 | 2021-01-20 | サムコ株式会社 | ウエハ処理装置 |
TWI658489B (zh) * | 2017-09-14 | 2019-05-01 | 南韓商吉佳藍科技股份有限公司 | 包括能夠旋轉之靜電吸盤之電漿基板處理裝置及利用其之基板處理方法 |
CN115513028A (zh) | 2021-06-22 | 2022-12-23 | 东京毅力科创株式会社 | 基片处理装置和静电吸盘 |
WO2023022041A1 (ja) * | 2021-08-20 | 2023-02-23 | 東京エレクトロン株式会社 | 静電チャック、基板支持器及び基板処理装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4990169A (en) * | 1988-11-14 | 1991-02-05 | Broad Research | Ice making method and/or apparatus |
US5738165A (en) * | 1993-05-07 | 1998-04-14 | Nikon Corporation | Substrate holding apparatus |
JPH0718438A (ja) * | 1993-06-17 | 1995-01-20 | Anelva Corp | 静電チャック装置 |
US5885428A (en) * | 1996-12-04 | 1999-03-23 | Applied Materials, Inc. | Method and apparatus for both mechanically and electrostatically clamping a wafer to a pedestal within a semiconductor wafer processing system |
US5841624A (en) * | 1997-06-09 | 1998-11-24 | Applied Materials, Inc. | Cover layer for a substrate support chuck and method of fabricating same |
US6215642B1 (en) * | 1999-03-11 | 2001-04-10 | Nikon Corporation Of Japan | Vacuum compatible, deformable electrostatic chuck with high thermal conductivity |
US6815646B2 (en) * | 2000-07-25 | 2004-11-09 | Ibiden Co., Ltd. | Ceramic substrate for semiconductor manufacture/inspection apparatus, ceramic heater, electrostatic clampless holder, and substrate for wafer prober |
US6492625B1 (en) * | 2000-09-27 | 2002-12-10 | Emcore Corporation | Apparatus and method for controlling temperature uniformity of substrates |
JP2002270681A (ja) * | 2001-03-07 | 2002-09-20 | Anelva Corp | 基板処理用静電吸着機構 |
US6563686B2 (en) * | 2001-03-19 | 2003-05-13 | Applied Materials, Inc. | Pedestal assembly with enhanced thermal conductivity |
US7544251B2 (en) * | 2004-10-07 | 2009-06-09 | Applied Materials, Inc. | Method and apparatus for controlling temperature of a substrate |
-
2005
- 2005-03-17 JP JP2005076555A patent/JP4869610B2/ja active Active
-
2006
- 2006-02-24 CN CNB2006100576971A patent/CN100390957C/zh active Active
- 2006-03-16 KR KR1020060024138A patent/KR100735937B1/ko active IP Right Grant
- 2006-03-16 TW TW095109000A patent/TWI392043B/zh active
Also Published As
Publication number | Publication date |
---|---|
CN100390957C (zh) | 2008-05-28 |
KR20060101302A (ko) | 2006-09-22 |
CN1835203A (zh) | 2006-09-20 |
JP2006257495A (ja) | 2006-09-28 |
KR100735937B1 (ko) | 2007-07-06 |
TWI392043B (zh) | 2013-04-01 |
TW200723430A (en) | 2007-06-16 |
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