JP4864114B2 - 水晶振動子 - Google Patents

水晶振動子 Download PDF

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Publication number
JP4864114B2
JP4864114B2 JP2009097897A JP2009097897A JP4864114B2 JP 4864114 B2 JP4864114 B2 JP 4864114B2 JP 2009097897 A JP2009097897 A JP 2009097897A JP 2009097897 A JP2009097897 A JP 2009097897A JP 4864114 B2 JP4864114 B2 JP 4864114B2
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JP
Japan
Prior art keywords
axis
crystal
mode
cut
crystal piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009097897A
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English (en)
Japanese (ja)
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JP2010251959A5 (enExample
JP2010251959A (ja
Inventor
利夫 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2009097897A priority Critical patent/JP4864114B2/ja
Priority to CN201010147434.6A priority patent/CN101867353B/zh
Priority to TW099111364A priority patent/TWI496416B/zh
Priority to US12/759,482 priority patent/US7973457B2/en
Publication of JP2010251959A publication Critical patent/JP2010251959A/ja
Publication of JP2010251959A5 publication Critical patent/JP2010251959A5/ja
Application granted granted Critical
Publication of JP4864114B2 publication Critical patent/JP4864114B2/ja
Active legal-status Critical Current
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2009097897A 2009-04-14 2009-04-14 水晶振動子 Active JP4864114B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009097897A JP4864114B2 (ja) 2009-04-14 2009-04-14 水晶振動子
CN201010147434.6A CN101867353B (zh) 2009-04-14 2010-04-12 晶体单元
TW099111364A TWI496416B (zh) 2009-04-14 2010-04-13 結晶體單元
US12/759,482 US7973457B2 (en) 2009-04-14 2010-04-13 Crystal Unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009097897A JP4864114B2 (ja) 2009-04-14 2009-04-14 水晶振動子

Publications (3)

Publication Number Publication Date
JP2010251959A JP2010251959A (ja) 2010-11-04
JP2010251959A5 JP2010251959A5 (enExample) 2011-06-16
JP4864114B2 true JP4864114B2 (ja) 2012-02-01

Family

ID=42933811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009097897A Active JP4864114B2 (ja) 2009-04-14 2009-04-14 水晶振動子

Country Status (4)

Country Link
US (1) US7973457B2 (enExample)
JP (1) JP4864114B2 (enExample)
CN (1) CN101867353B (enExample)
TW (1) TWI496416B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150049782A1 (en) * 2013-08-14 2015-02-19 Keysight Technologies, Inc. Thermal Substitution Power Measurement System with RF Self-Heating Temperature Sensor
JP6412384B2 (ja) * 2014-09-25 2018-10-24 株式会社アルバック 水晶振動子、この水晶振動子を有するセンサヘッド、成膜制御装置、および成膜制御装置の製造方法
WO2021053519A1 (en) 2019-09-16 2021-03-25 Rakon Limited Doubly rotated quartz crystal resonators with reduced sensitivity to acceleration

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122516A (en) * 1980-03-04 1981-09-26 Nec Corp Quartz oscillator
US4375604A (en) * 1981-02-27 1983-03-01 The United States Of America As Represented By The Secretary Of The Army Method of angle correcting doubly rotated crystal resonators
US4701661A (en) * 1985-05-28 1987-10-20 Frequency Electronics, Inc. Piezoelectric resonators having a lateral field excited SC cut quartz crystal element
JP2531304Y2 (ja) * 1991-01-31 1997-04-02 日本電波工業株式会社 Ｓｃカットの水晶振動子
JPH11177376A (ja) * 1997-12-12 1999-07-02 Nippon Dempa Kogyo Co Ltd Ｓｃカットの水晶振動子
JPH11225040A (ja) * 1998-02-05 1999-08-17 Nippon Dempa Kogyo Co Ltd Ｓｃカットの水晶振動子
JP2000040937A (ja) * 1998-07-21 2000-02-08 Nippon Dempa Kogyo Co Ltd Ｓｃカットの水晶振動子
FR2785473B1 (fr) * 1998-10-30 2001-01-26 Thomson Csf Filtre faibles pertes a ondes acoustiques de surface sur substrat de quartz de coupe optimisee
JP2003324332A (ja) * 2002-02-28 2003-11-14 Toyo Commun Equip Co Ltd ２回回転ｙカット水晶振動子とこれを用いた発振器
JP2004007420A (ja) * 2002-03-26 2004-01-08 Seiko Epson Corp 圧電振動片、圧電振動子および圧電デバイス
US7011887B2 (en) * 2002-09-02 2006-03-14 Nihon Dempa Kogyo Co., Ltd. IT-cut quartz crystal unit
JP3980972B2 (ja) * 2002-09-02 2007-09-26 日本電波工業株式会社 短冊形のｉｔカットの水晶振動子
JP4069773B2 (ja) * 2003-03-19 2008-04-02 セイコーエプソン株式会社 圧電振動片、圧電振動子および圧電デバイス
WO2005008887A1 (ja) * 2003-07-18 2005-01-27 Nihon Dempa Kogyo Co., Ltd. Ｓｃカット水晶振動子
JP4628878B2 (ja) 2005-06-07 2011-02-09 日本電波工業株式会社 水晶発振回路
JP4967707B2 (ja) * 2006-05-01 2012-07-04 セイコーエプソン株式会社 圧電振動子およびその製造方法

Also Published As

Publication number Publication date
TWI496416B (zh) 2015-08-11
TW201101683A (en) 2011-01-01
US7973457B2 (en) 2011-07-05
US20100259131A1 (en) 2010-10-14
JP2010251959A (ja) 2010-11-04
CN101867353B (zh) 2014-03-19
CN101867353A (zh) 2010-10-20

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