JP4854349B2 - 流体混合装置 - Google Patents
流体混合装置 Download PDFInfo
- Publication number
- JP4854349B2 JP4854349B2 JP2006079213A JP2006079213A JP4854349B2 JP 4854349 B2 JP4854349 B2 JP 4854349B2 JP 2006079213 A JP2006079213 A JP 2006079213A JP 2006079213 A JP2006079213 A JP 2006079213A JP 4854349 B2 JP4854349 B2 JP 4854349B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- fluid
- flow rate
- diaphragm
- mixing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 title claims description 447
- 238000002156 mixing Methods 0.000 title claims description 164
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 104
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 85
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 72
- 238000004891 communication Methods 0.000 claims description 50
- 230000002093 peripheral effect Effects 0.000 claims description 40
- 230000007246 mechanism Effects 0.000 claims description 27
- 238000011010 flushing procedure Methods 0.000 claims description 23
- 238000011144 upstream manufacturing Methods 0.000 claims description 22
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 16
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 16
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 11
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 5
- 230000029058 respiratory gaseous exchange Effects 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 25
- 238000009434 installation Methods 0.000 description 23
- 238000004140 cleaning Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 18
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 18
- 239000004810 polytetrafluoroethylene Substances 0.000 description 18
- 239000000126 substance Substances 0.000 description 18
- 239000002033 PVDF binder Substances 0.000 description 13
- 239000010408 film Substances 0.000 description 13
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 8
- 239000004743 Polypropylene Substances 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 8
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000000644 propagated effect Effects 0.000 description 7
- 239000004237 Ponceau 6R Substances 0.000 description 6
- 230000003247 decreasing effect Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 230000000630 rising effect Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- -1 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004698 Polyethylene Substances 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000012466 permeate Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000010349 pulsation Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- SWXQKHHHCFXQJF-UHFFFAOYSA-N azane;hydrogen peroxide Chemical compound [NH4+].[O-]O SWXQKHHHCFXQJF-UHFFFAOYSA-N 0.000 description 1
- 229920006026 co-polymeric resin Polymers 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
Images
Landscapes
- Accessories For Mixers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006079213A JP4854349B2 (ja) | 2006-03-22 | 2006-03-22 | 流体混合装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006079213A JP4854349B2 (ja) | 2006-03-22 | 2006-03-22 | 流体混合装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007253039A JP2007253039A (ja) | 2007-10-04 |
| JP2007253039A5 JP2007253039A5 (enrdf_load_stackoverflow) | 2009-04-09 |
| JP4854349B2 true JP4854349B2 (ja) | 2012-01-18 |
Family
ID=38627805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006079213A Expired - Fee Related JP4854349B2 (ja) | 2006-03-22 | 2006-03-22 | 流体混合装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4854349B2 (enrdf_load_stackoverflow) |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56119255A (en) * | 1981-02-02 | 1981-09-18 | Toray Industries | Method and device for preparing mixed liquid of ratio accurately adjusted |
| JP4033925B2 (ja) * | 1996-04-03 | 2008-01-16 | 大陽日酸株式会社 | 混合ガス供給装置 |
| JP3383184B2 (ja) * | 1997-06-18 | 2003-03-04 | 株式会社アグルー・ジャパン | 希薄溶液の製造方法および装置 |
| JP2931289B1 (ja) * | 1998-03-04 | 1999-08-09 | 日本酸素株式会社 | ガス混合装置 |
| JP2000218148A (ja) * | 1999-01-29 | 2000-08-08 | Tokico Ltd | 混合装置 |
| JP3655155B2 (ja) * | 1999-12-22 | 2005-06-02 | アドバンス電気工業株式会社 | マニホールド弁構造体 |
| JP3741253B2 (ja) * | 1999-12-24 | 2006-02-01 | 富士通株式会社 | 薬品製造装置 |
| JP3995543B2 (ja) * | 2002-07-03 | 2007-10-24 | 旭有機材工業株式会社 | 流体制御弁 |
| JP4222821B2 (ja) * | 2002-11-27 | 2009-02-12 | 旭有機材工業株式会社 | 定流量弁 |
| JP4417642B2 (ja) * | 2003-03-17 | 2010-02-17 | 芝浦メカトロニクス株式会社 | 処理液の製造装置、製造方法及び基板の処理装置 |
| JP4512913B2 (ja) * | 2003-04-07 | 2010-07-28 | 旭有機材工業株式会社 | 流体混合装置 |
| JP4247386B2 (ja) * | 2003-11-28 | 2009-04-02 | 旭有機材工業株式会社 | 流量調節弁 |
-
2006
- 2006-03-22 JP JP2006079213A patent/JP4854349B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007253039A (ja) | 2007-10-04 |
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