JP2007253039A5 - - Google Patents
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- Publication number
- JP2007253039A5 JP2007253039A5 JP2006079213A JP2006079213A JP2007253039A5 JP 2007253039 A5 JP2007253039 A5 JP 2007253039A5 JP 2006079213 A JP2006079213 A JP 2006079213A JP 2006079213 A JP2006079213 A JP 2006079213A JP 2007253039 A5 JP2007253039 A5 JP 2007253039A5
- Authority
- JP
- Japan
- Prior art keywords
- valve
- fluid
- fluid mixing
- mixing device
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 48
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 8
- 230000002093 peripheral effect Effects 0.000 claims 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 6
- 238000011144 upstream manufacturing Methods 0.000 claims 3
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims 2
- 235000011114 ammonium hydroxide Nutrition 0.000 claims 2
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000011010 flushing procedure Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 230000029058 respiratory gaseous exchange Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006079213A JP4854349B2 (ja) | 2006-03-22 | 2006-03-22 | 流体混合装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006079213A JP4854349B2 (ja) | 2006-03-22 | 2006-03-22 | 流体混合装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007253039A JP2007253039A (ja) | 2007-10-04 |
| JP2007253039A5 true JP2007253039A5 (enrdf_load_stackoverflow) | 2009-04-09 |
| JP4854349B2 JP4854349B2 (ja) | 2012-01-18 |
Family
ID=38627805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006079213A Expired - Fee Related JP4854349B2 (ja) | 2006-03-22 | 2006-03-22 | 流体混合装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4854349B2 (enrdf_load_stackoverflow) |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56119255A (en) * | 1981-02-02 | 1981-09-18 | Toray Industries | Method and device for preparing mixed liquid of ratio accurately adjusted |
| JP4033925B2 (ja) * | 1996-04-03 | 2008-01-16 | 大陽日酸株式会社 | 混合ガス供給装置 |
| JP3383184B2 (ja) * | 1997-06-18 | 2003-03-04 | 株式会社アグルー・ジャパン | 希薄溶液の製造方法および装置 |
| JP2931289B1 (ja) * | 1998-03-04 | 1999-08-09 | 日本酸素株式会社 | ガス混合装置 |
| JP2000218148A (ja) * | 1999-01-29 | 2000-08-08 | Tokico Ltd | 混合装置 |
| JP3655155B2 (ja) * | 1999-12-22 | 2005-06-02 | アドバンス電気工業株式会社 | マニホールド弁構造体 |
| JP3741253B2 (ja) * | 1999-12-24 | 2006-02-01 | 富士通株式会社 | 薬品製造装置 |
| JP3995543B2 (ja) * | 2002-07-03 | 2007-10-24 | 旭有機材工業株式会社 | 流体制御弁 |
| JP4222821B2 (ja) * | 2002-11-27 | 2009-02-12 | 旭有機材工業株式会社 | 定流量弁 |
| JP4417642B2 (ja) * | 2003-03-17 | 2010-02-17 | 芝浦メカトロニクス株式会社 | 処理液の製造装置、製造方法及び基板の処理装置 |
| JP4512913B2 (ja) * | 2003-04-07 | 2010-07-28 | 旭有機材工業株式会社 | 流体混合装置 |
| JP4247386B2 (ja) * | 2003-11-28 | 2009-04-02 | 旭有機材工業株式会社 | 流量調節弁 |
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2006
- 2006-03-22 JP JP2006079213A patent/JP4854349B2/ja not_active Expired - Fee Related