JP4838357B2 - 真空搬送装置 - Google Patents
真空搬送装置 Download PDFInfo
- Publication number
- JP4838357B2 JP4838357B2 JP2009528938A JP2009528938A JP4838357B2 JP 4838357 B2 JP4838357 B2 JP 4838357B2 JP 2009528938 A JP2009528938 A JP 2009528938A JP 2009528938 A JP2009528938 A JP 2009528938A JP 4838357 B2 JP4838357 B2 JP 4838357B2
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- Prior art keywords
- vacuum
- cylindrical portion
- arm
- rotating shaft
- vacuum transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000033001 locomotion Effects 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 description 55
- 230000007246 mechanism Effects 0.000 description 39
- 230000032258 transport Effects 0.000 description 32
- 230000007723 transport mechanism Effects 0.000 description 22
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 238000007740 vapor deposition Methods 0.000 description 11
- 230000001965 increasing effect Effects 0.000 description 9
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 238000005245 sintering Methods 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000314 lubricant Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000011553 magnetic fluid Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910000986 non-evaporable getter Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- -1 Zr and Ti Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/06—Arms flexible
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
- B25J9/0021—All motors in base
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Description
101 真空容器
103 ハンド
104 第2アーム
105 第1アーム
106 ベース
107a,107b XY軸方向駆動軸
108a,108b Z軸方向駆動軸
111 水平搬送機構
112 鉛直搬送機構
113 水平駆動部
114 鉛直駆動部
201 回転発生器
220 回転軸
221 回転軸
223 回転軸
301 回転発生器
401 接続口
402 弁体
411 真空排気口
412 弁体
Claims (9)
- 内部を真空に排気し得る容器、
該容器の内部に並んで位置し、回転駆動力を回転運動として伝達でき且つ軸方向に直線運動可能な第一の運動伝達手段及び第二の運動伝達手段、
前記第一の運動伝達手段及び第二の運動伝達手段により前記軸方向に直線運動可能に支持されているベース、
該ベースに回転可能に取り付けられている第一の円筒部及び該第一の円筒部に一端で取り付けられている第一のアーム部を有する第一のアーム、
前記第一のアーム部の他端に回転可能に取り付けられている第二の円筒部及び該第二の円筒部に一端で取り付けられている第二のアーム部を有する第二のアーム、
前記第一の円筒部の外壁に固定されたプーリー、
前記第一の円筒部の内部に位置し、2つのプーリーを有する第一の回転軸、
前記第二の円筒部の外壁に固定されたプーリー、
前記第一の運動伝達手段と、前記第一の円筒部の外壁に固定されたプーリーとの間に架かるベルト、
前記第二の運動伝達手段と、前記第一の回転軸が有する一方のプーリーとの間に架かるベルト並びに
前記第一の回転軸が有する他方のプーリーと、前記第二の円筒部の外壁に固定されたプーリーとの間に架かるベルトを有することを特徴とする真空搬送装置。 - 前記運動伝達手段は、ボールスプラインであることを特徴とする請求項1に記載の真空搬送装置。
- 前記ベースは、更に垂直運動手段により支持されていることを特徴とする請求項1乃至2項のいずれか一項に記載の真空搬送装置。
- 前記垂直運動手段は、ボールネジであることを特徴とする請求項3に記載の真空搬送装置。
- 更に、前記第二の円筒部の内部に位置し、一端が前記第二の円筒部の外壁に固定されたプーリーに固定された第二の回転軸と、
該第二の回転軸の他端に固定されたプーリーと、
前記第二のアーム部の他端に、第三の回転軸を介して回転可能に取り付けられているハンドと、
前記第三の回転軸に固定されたプーリーと、
前記第二の回転軸の他端に固定されたプーリーと、前記第三の回転軸に固定されたプーリーとの間に架かるベルトを有することを特徴とする請求項1乃至4のいずれか一項に記載の真空搬送装置。 - 請求項1乃至5のいずれか一項に記載の真空搬送装置を有することを特徴とする真空処理装置。
- 請求項1乃至5のいずれか一項に記載の真空搬送装置を使用する工程を有することを特徴とする表示装置の製造方法。
- 前記表示装置は有機EL表示装置であることを特徴とする請求項7に記載の表示装置の製造方法。
- 前記表示装置は電子放出素子表示装置であることを特徴とする請求項7に記載の表示装置の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009528938A JP4838357B2 (ja) | 2008-01-31 | 2009-01-27 | 真空搬送装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008020915 | 2008-01-31 | ||
JP2008020915 | 2008-01-31 | ||
PCT/JP2009/051237 WO2009096373A1 (ja) | 2008-01-31 | 2009-01-27 | 真空搬送装置 |
JP2009528938A JP4838357B2 (ja) | 2008-01-31 | 2009-01-27 | 真空搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009096373A1 JPWO2009096373A1 (ja) | 2011-05-26 |
JP4838357B2 true JP4838357B2 (ja) | 2011-12-14 |
Family
ID=40912726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009528938A Active JP4838357B2 (ja) | 2008-01-31 | 2009-01-27 | 真空搬送装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20110135426A1 (ja) |
JP (1) | JP4838357B2 (ja) |
CN (1) | CN101689525B (ja) |
WO (1) | WO2009096373A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103862468B (zh) * | 2012-12-18 | 2016-03-30 | 上银科技股份有限公司 | 晶圆搬运机器人 |
JP6407629B2 (ja) * | 2014-08-29 | 2018-10-17 | 株式会社Screenホールディングス | 搬送装置および基板処理装置 |
EP3056320B1 (en) * | 2015-02-10 | 2018-12-05 | F. Hoffmann-La Roche AG | Robotic device and laboratory automation system comprising robotic device |
CN105858214B (zh) * | 2016-06-01 | 2018-03-13 | 武汉华星光电技术有限公司 | 基板存放设备 |
CN108015777B (zh) * | 2016-06-28 | 2019-09-13 | 泉州台商投资区仁捷机械科技有限公司 | 一种高空吊挂全玻璃幕墙擦拭清理智能装备 |
CN108081244A (zh) * | 2017-12-15 | 2018-05-29 | 沈阳工业大学 | 一种可上下移动式scara机械臂结构 |
CN112548356A (zh) * | 2020-12-16 | 2021-03-26 | 遂宁欧菲斯电子科技有限公司 | 一种自动激光打标装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0413595A (ja) * | 1990-05-01 | 1992-01-17 | Mitsubishi Electric Corp | クリーンロボット |
JPH10157847A (ja) * | 1996-11-29 | 1998-06-16 | Canon Sales Co Inc | 基板搬送ロボット装置およびこれを用いた基板処理装置ならびに半導体製造装置 |
JP2005150575A (ja) * | 2003-11-19 | 2005-06-09 | Nachi Fujikoshi Corp | ダブルアーム型ロボット |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0224075A (ja) * | 1988-07-13 | 1990-01-26 | Mitsubishi Electric Corp | 産業用ロボット |
JP2002166376A (ja) * | 2000-11-30 | 2002-06-11 | Hirata Corp | 基板搬送用ロボット |
US7578649B2 (en) * | 2002-05-29 | 2009-08-25 | Brooks Automation, Inc. | Dual arm substrate transport apparatus |
JP2005161409A (ja) * | 2003-11-28 | 2005-06-23 | Aitec Corp | 搬送ロボットのシール構造 |
KR100527669B1 (ko) * | 2003-12-19 | 2005-11-25 | 삼성전자주식회사 | 로봇 암 장치 |
JP4515133B2 (ja) * | 2004-04-02 | 2010-07-28 | 株式会社アルバック | 搬送装置及びその制御方法並びに真空処理装置 |
JP4605560B2 (ja) * | 2005-12-05 | 2011-01-05 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP4848845B2 (ja) * | 2006-06-01 | 2011-12-28 | 株式会社安川電機 | 真空ロボット、処理装置、モータの製造方法、およびモータ |
-
2009
- 2009-01-27 US US12/863,064 patent/US20110135426A1/en not_active Abandoned
- 2009-01-27 JP JP2009528938A patent/JP4838357B2/ja active Active
- 2009-01-27 WO PCT/JP2009/051237 patent/WO2009096373A1/ja active Application Filing
- 2009-01-27 CN CN200980000521.4A patent/CN101689525B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0413595A (ja) * | 1990-05-01 | 1992-01-17 | Mitsubishi Electric Corp | クリーンロボット |
JPH10157847A (ja) * | 1996-11-29 | 1998-06-16 | Canon Sales Co Inc | 基板搬送ロボット装置およびこれを用いた基板処理装置ならびに半導体製造装置 |
JP2005150575A (ja) * | 2003-11-19 | 2005-06-09 | Nachi Fujikoshi Corp | ダブルアーム型ロボット |
Also Published As
Publication number | Publication date |
---|---|
JPWO2009096373A1 (ja) | 2011-05-26 |
US20110135426A1 (en) | 2011-06-09 |
CN101689525B (zh) | 2012-08-22 |
WO2009096373A1 (ja) | 2009-08-06 |
CN101689525A (zh) | 2010-03-31 |
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