JP4824293B2 - フォトニック結晶発光デバイス - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0083—Periodic patterns for optical field-shaping in or on the semiconductor body or semiconductor body package, e.g. photonic bandgap structures
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- Optics & Photonics (AREA)
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Description
本発明の実施形態によれば、フォトニック結晶構造は、III窒化物発光デバイスのn型層上に形成されている。或る実施形態では、フォトニック結晶のn型層は、トンネル接合を覆って形成されている。本デバイスは、第1伝導型の第1層と、第2伝導型の第1層と、第1伝導型の層と第2伝導型の層の間の活性領域とを含んでいる。トンネル接合は、第1伝導型の第2層と、第2伝導型の第2層とを含んでおり、第1伝導型の第1層を第1伝導型の第3層から分離している。フォトニック結晶構造は、第1伝導型の第3層内に形成されている。
図1は、2002年1月28日出願の特許出願第10/059,588号「フォトニック結晶構造を使用したLEDの効率」に詳細に記載されているIII窒化物フォトニック結晶LED(PXLED)100を示しており、引例としてここに組み入れる。
以上、本発明について詳しく説明してきたが、当業者には理解頂けるように、本開示に基づいて、本明細書に記載されている本発明の概念の精神から逸脱することなく本発明に修正を施すことができる。従って、本発明の範囲は、図示し説明した特定の実施形態に限定されるものではない。
5、6、7、108、112、116 活性領域
100 III窒化物フォトニック結晶LED
102 基板
108 n型領域
104、120 接点
122 正孔
200 エピタキシャル領域
202 レジスト層、誘電層
203 絶縁層
Claims (30)
- 発光デバイスにおいて、
n型領域とp型領域の間に配置されている活性領域を含むIII窒化物半導体構造と、
前記活性領域と反対側のn型領域の表面上に形成されているフォトニック結晶構造と、を備えており、
前記フォトニック結晶構造は、前記n型領域内に形成され、前記活性領域及び前記p型領域には形成されていないことを特徴とするデバイス。 - 前記フォトニック結晶構造は、前記n型領域の厚さの周期的変動を備えていることを特徴とする、請求項1に記載のデバイス。
- 前記フォトニック結晶構造は、正孔の平面格子を備えていることを特徴とする、請求項1に記載のデバイス。
- 前記格子は、約0.1λから約10λの間の格子定数aを有しており、ここにλは前記活性領域によって放射される光の波長であることを特徴とする、請求項3に記載のデバイス。
- 前記格子は格子定数aを有しており、前記正孔は約0.1aから約0.5aの間の直径を有していることを特徴とする、請求項3に記載のデバイス。
- 前記正孔は、約0.05λから約5λの間の深さを有しており、ここにλは前記活性領域によって放射される光の波長であることを特徴とする、請求項3に記載のデバイス。
- 発光デバイスにおいて、
第1伝導型の第1層と、
第2伝導型の第1層と、
第1伝導型の層と第2伝導型の層の間に配置されている活性領域と、
前記第1伝導型の第1層より高いドーパント濃度を有する第1伝導型の第2層と、前記第2伝導型の第1層より高いドーパント濃度を有する第2伝導型の第2層と、を備えているトンネル接合と、
第1伝導型の第3層と、を備えており、
前記第1伝導型の第3層の厚さは周期的に変動し、
前記トンネル接合は、前記第2伝導型の第1層と第1伝導型の第3層の間にあり、
前記第1伝導型はn型であり、前記第2伝導型はp型であることを特徴とするデバイス。 - 前記第1伝導型の第2層は、約1018cm-3から約5x1020cm-3の範囲のドーパント濃度を有しており、
前記第2伝導型の第2層は、約1018cm-3から約5x1020cm-3の範囲ドーパント濃度を有していることを特徴とする、請求項7に記載のデバイス。 - 前記第1伝導型の第2層は、約2x1020cm-3から約4x1020cm-3の範囲のドーパント濃度を有していることを特徴とする、請求項7に記載のデバイス。
- 前記第2伝導型の第2層は、約7x1019cm-3から約9x1019cm-3の範囲のドーパント濃度を有していることを特徴とする、請求項7に記載のデバイス。
- 前記トンネル接合は、逆バイアスモードで作動するときは、約0Vから約1Vの間の範囲の電圧降下を有することを特徴とする、請求項7に記載のデバイス。
- 前記トンネル接合は、逆バイアスモードで作動するときは、約0.1Vから約1Vの間の範囲の電圧降下を有することを特徴とする、請求項7に記載のデバイス。
- 前記第1伝導型の第2層は、約1nmから約50nmの範囲の厚さを有しており、
前記第2伝導型の第2層は、約1nmから約50nmの範囲の厚さを有していることを特徴とする、請求項7に記載のデバイス。 - 前記トンネル接合は、約2nmから約100nmの範囲の厚さを有していることを特徴とする、請求項7に記載のデバイス。
- 前記活性領域は、III窒化物材料を備えていることを特徴とする、請求項7に記載のデバイス。
- 前記厚さの周期的変動は、正孔の平面格子を備えていることを特徴とする、請求項7に記載のデバイス。
- 前記平面格子は、三角形格子、四角形格子、五角形格子及びハチの巣状格子から成るグループから選択されることを特徴とする、請求項16に記載のデバイス。
- 前記平面格子は、2つ以上の格子型式を含んでいることを特徴とする、請求項16に記載のデバイス。
- 前記格子は、約0.1λから約10λの間の格子定数aを有しており、ここにλは前記活性領域によって放射される光の波長であることを特徴とする、請求項16に記載のデバイス。
- 前記格子は、約0.1λから約4λの間の格子定数aを有しており、ここにλは前記活性領域によって放射される光の波長であることを特徴とする、請求項16に記載のデバイス。
- 前記格子は格子定数aを有しており、前記正孔は約0.1aから約0.5aの間の直径を有していることを特徴とする、請求項16に記載のデバイス。
- 前記正孔は、約0.05λから約5λの間の深さを有しており、ここにλは前記活性領域によって放射される光の波長であることを特徴とする、請求項16に記載のデバイス。
- 前記正孔は、誘電体で満たされていることを特徴とする、請求項16に記載のデバイス。
- 前記誘電体は、約1から約16の間の誘電定数を有していることを特徴とする、請求項23に記載のデバイス。
- 前記第1伝導型の第3層は、少なくとも0.1ミクロンの厚さを有していることを特徴とする、請求項7に記載のデバイス。
- 前記第1伝導型の第1層に電気的に接続されている第1電極と、
前記第1伝導型の第3層に電気的に接続されている第2電極と、を更に備えていることを特徴とする、請求項7に記載のデバイス。 - 前記第2電極は、前記第1伝導型の第3層に取り付けられているシートを備えており、前記シートは、前記第1伝導型の第3層の厚い部分だけに接触していることを特徴とする、請求項26に記載のデバイス。
- 前記厚さの周期的変動は、前記第1伝導型の第3層の第1部分に形成され、前記デバイスは、前記第1伝導型の第3層の第2部分に電気的に接続されている電極を更に備えていることを特徴とする、請求項7に記載のデバイス。
- 前記周期的構造の周期と、前記活性領域によって大気中に放射される光の波長の割合は、約0.1から約5であることを特徴とする、請求項7に記載のデバイス。
- 第1伝導型の第1層を形成する段階と、
第2伝導型の第1層を形成する段階と、
第1伝導型の層と第2伝導型の層の間に活性領域を形成する段階と、
前記第1伝導型の第1層より高いドーパント濃度を有する第1伝導型の第2層と、前記第2伝導型の第1層より高いドーパント濃度を有する第2伝導型の第2層と、を備えているトンネル接合を形成する段階と、
第1伝導型の第3層を形成する段階と、
前記第1伝導型の第3層内に複数の正孔を形成する段階と、から成り、
前記トンネル接合は前記第2伝導型の第1層と前記第1伝導型の第3層の間にあり、
前記第1伝導型はn型であり、前記第2伝導型はp型であることを特徴とする方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/691,026 US7012279B2 (en) | 2003-10-21 | 2003-10-21 | Photonic crystal light emitting device |
US10/691026 | 2003-10-21 |
Publications (2)
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JP2005129939A JP2005129939A (ja) | 2005-05-19 |
JP4824293B2 true JP4824293B2 (ja) | 2011-11-30 |
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US (2) | US7012279B2 (ja) |
EP (1) | EP1526583B1 (ja) |
JP (1) | JP4824293B2 (ja) |
TW (1) | TWI378569B (ja) |
Families Citing this family (178)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070020578A1 (en) * | 2005-07-19 | 2007-01-25 | Scott Robert R | Dental curing light having a short wavelength LED and a fluorescing lens for converting wavelength light to curing wavelengths and related method |
US20060006375A1 (en) * | 2003-04-14 | 2006-01-12 | Chen Ou | Light Mixing LED |
US7084434B2 (en) * | 2003-04-15 | 2006-08-01 | Luminus Devices, Inc. | Uniform color phosphor-coated light-emitting diode |
US7098589B2 (en) * | 2003-04-15 | 2006-08-29 | Luminus Devices, Inc. | Light emitting devices with high light collimation |
US7083993B2 (en) | 2003-04-15 | 2006-08-01 | Luminus Devices, Inc. | Methods of making multi-layer light emitting devices |
US7166871B2 (en) | 2003-04-15 | 2007-01-23 | Luminus Devices, Inc. | Light emitting systems |
US7521854B2 (en) * | 2003-04-15 | 2009-04-21 | Luminus Devices, Inc. | Patterned light emitting devices and extraction efficiencies related to the same |
US7262550B2 (en) * | 2003-04-15 | 2007-08-28 | Luminus Devices, Inc. | Light emitting diode utilizing a physical pattern |
US6831302B2 (en) | 2003-04-15 | 2004-12-14 | Luminus Devices, Inc. | Light emitting devices with improved extraction efficiency |
US7274043B2 (en) * | 2003-04-15 | 2007-09-25 | Luminus Devices, Inc. | Light emitting diode systems |
US7667238B2 (en) * | 2003-04-15 | 2010-02-23 | Luminus Devices, Inc. | Light emitting devices for liquid crystal displays |
US7074631B2 (en) * | 2003-04-15 | 2006-07-11 | Luminus Devices, Inc. | Light emitting device methods |
US7211831B2 (en) * | 2003-04-15 | 2007-05-01 | Luminus Devices, Inc. | Light emitting device with patterned surfaces |
US7105861B2 (en) * | 2003-04-15 | 2006-09-12 | Luminus Devices, Inc. | Electronic device contact structures |
US20040259279A1 (en) * | 2003-04-15 | 2004-12-23 | Erchak Alexei A. | Light emitting device methods |
US7344903B2 (en) * | 2003-09-17 | 2008-03-18 | Luminus Devices, Inc. | Light emitting device processes |
US7341880B2 (en) * | 2003-09-17 | 2008-03-11 | Luminus Devices, Inc. | Light emitting device processes |
JP4124102B2 (ja) * | 2003-11-12 | 2008-07-23 | 松下電工株式会社 | 多重反射防止構造を備えた発光素子とその製造方法 |
WO2005064666A1 (en) | 2003-12-09 | 2005-07-14 | The Regents Of The University Of California | Highly efficient gallium nitride based light emitting diodes via surface roughening |
US7450311B2 (en) * | 2003-12-12 | 2008-11-11 | Luminus Devices, Inc. | Optical display systems and methods |
US20050173714A1 (en) * | 2004-02-06 | 2005-08-11 | Ho-Shang Lee | Lighting system with high and improved extraction efficiency |
US20050205883A1 (en) * | 2004-03-19 | 2005-09-22 | Wierer Jonathan J Jr | Photonic crystal light emitting device |
US7582910B2 (en) * | 2005-02-28 | 2009-09-01 | The Regents Of The University Of California | High efficiency light emitting diode (LED) with optimized photonic crystal extractor |
US7768023B2 (en) * | 2005-10-14 | 2010-08-03 | The Regents Of The University Of California | Photonic structures for efficient light extraction and conversion in multi-color light emitting devices |
US7345298B2 (en) * | 2005-02-28 | 2008-03-18 | The Regents Of The University Of California | Horizontal emitting, vertical emitting, beam shaped, distributed feedback (DFB) lasers by growth over a patterned substrate |
DK1779418T3 (en) * | 2004-06-17 | 2014-12-08 | Ion Optics Inc | EMITTER, DETECTOR AND SENSOR WITH photonic crystal |
JP5174458B2 (ja) * | 2004-07-08 | 2013-04-03 | イオン オプティクス インコーポレイテッド | 調整可能なフォトニック結晶 |
US20090023239A1 (en) * | 2004-07-22 | 2009-01-22 | Luminus Devices, Inc. | Light emitting device processes |
US20060038188A1 (en) | 2004-08-20 | 2006-02-23 | Erchak Alexei A | Light emitting diode systems |
US20060043400A1 (en) * | 2004-08-31 | 2006-03-02 | Erchak Alexei A | Polarized light emitting device |
US7476910B2 (en) | 2004-09-10 | 2009-01-13 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device and method for manufacturing the same |
US20060067605A1 (en) * | 2004-09-30 | 2006-03-30 | Laura Wills Mirkarimi | Photonic crystal optical temperature measuring system |
JPWO2006038665A1 (ja) * | 2004-10-01 | 2008-05-15 | 三菱電線工業株式会社 | 窒化物半導体発光素子およびその製造方法 |
US20060223211A1 (en) * | 2004-12-02 | 2006-10-05 | The Regents Of The University Of California | Semiconductor devices based on coalesced nano-rod arrays |
US7291864B2 (en) * | 2005-02-28 | 2007-11-06 | The Regents Of The University Of California | Single or multi-color high efficiency light emitting diode (LED) by growth over a patterned substrate |
US20060204865A1 (en) * | 2005-03-08 | 2006-09-14 | Luminus Devices, Inc. | Patterned light-emitting devices |
US20070045640A1 (en) * | 2005-08-23 | 2007-03-01 | Erchak Alexei A | Light emitting devices for liquid crystal displays |
US7736945B2 (en) * | 2005-06-09 | 2010-06-15 | Philips Lumileds Lighting Company, Llc | LED assembly having maximum metal support for laser lift-off of growth substrate |
US7754507B2 (en) * | 2005-06-09 | 2010-07-13 | Philips Lumileds Lighting Company, Llc | Method of removing the growth substrate of a semiconductor light emitting device |
DE102005048408B4 (de) * | 2005-06-10 | 2015-03-19 | Osram Opto Semiconductors Gmbh | Dünnfilm-Halbleiterkörper |
US8163575B2 (en) | 2005-06-17 | 2012-04-24 | Philips Lumileds Lighting Company Llc | Grown photonic crystals in semiconductor light emitting devices |
KR100633999B1 (ko) | 2005-06-22 | 2006-10-13 | 엘지전자 주식회사 | 광결정 구조를 갖는 발광 소자의 제조 방법 |
KR20070012930A (ko) | 2005-07-25 | 2007-01-30 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
KR100706796B1 (ko) * | 2005-08-19 | 2007-04-12 | 삼성전자주식회사 | 질화물계 탑에미트형 발광소자 및 그 제조 방법 |
KR20070021671A (ko) * | 2005-08-19 | 2007-02-23 | 서울옵토디바이스주식회사 | 나노막대들의 어레이를 채택한 발광 다이오드 및 그것을제조하는 방법 |
US7348603B2 (en) * | 2005-10-17 | 2008-03-25 | Luminus Devices, Inc. | Anisotropic collimation devices and related methods |
US7391059B2 (en) * | 2005-10-17 | 2008-06-24 | Luminus Devices, Inc. | Isotropic collimation devices and related methods |
US7388233B2 (en) * | 2005-10-17 | 2008-06-17 | Luminus Devices, Inc. | Patchwork patterned devices and related methods |
WO2007047565A2 (en) * | 2005-10-17 | 2007-04-26 | Luminus Devices, Inc. | Patterned devices and related methods |
US20070085098A1 (en) * | 2005-10-17 | 2007-04-19 | Luminus Devices, Inc. | Patterned devices and related methods |
US20080099777A1 (en) * | 2005-10-19 | 2008-05-01 | Luminus Devices, Inc. | Light-emitting devices and related systems |
US8100567B2 (en) * | 2005-10-19 | 2012-01-24 | Rambus International Ltd. | Light-emitting devices and related systems |
WO2007059037A2 (en) * | 2005-11-10 | 2007-05-24 | Junxion, Inc. | Gateway network multiplexing |
KR100721454B1 (ko) * | 2005-11-10 | 2007-05-23 | 서울옵토디바이스주식회사 | 광 결정 구조체를 갖는 교류용 발광소자 및 그것을제조하는 방법 |
KR101008588B1 (ko) * | 2005-11-16 | 2011-01-17 | 주식회사 에피밸리 | 3족 질화물 반도체 발광소자 |
WO2007065005A2 (en) * | 2005-12-02 | 2007-06-07 | The Regents Of University Of California | Improved horizontal emitting, vertical emitting, beam shaped, distributed feedback (dfb) lasers fabricated by growth over a patterned substrate with multiple overgrowth |
WO2007081719A2 (en) | 2006-01-05 | 2007-07-19 | Illumitex, Inc. | Separate optical device for directing light from an led |
US7717343B2 (en) * | 2006-01-12 | 2010-05-18 | Hand Held Products, Inc. | High-efficiency illumination in data collection devices |
JP5189734B2 (ja) * | 2006-01-24 | 2013-04-24 | ローム株式会社 | 窒化物半導体発光素子 |
US7928462B2 (en) * | 2006-02-16 | 2011-04-19 | Lg Electronics Inc. | Light emitting device having vertical structure, package thereof and method for manufacturing the same |
US20070211183A1 (en) * | 2006-03-10 | 2007-09-13 | Luminus Devices, Inc. | LCD thermal management methods and systems |
US20070211184A1 (en) * | 2006-03-10 | 2007-09-13 | Luminus Devices, Inc. | Liquid crystal display systems including LEDs |
WO2007106327A2 (en) * | 2006-03-10 | 2007-09-20 | Luminus Devices, Inc. | Lcd thermal management methods and systems |
US20070211182A1 (en) * | 2006-03-10 | 2007-09-13 | Luminus Devices, Inc. | Optical system thermal management methods and systems |
KR100736623B1 (ko) * | 2006-05-08 | 2007-07-09 | 엘지전자 주식회사 | 수직형 발광 소자 및 그 제조방법 |
KR100818451B1 (ko) | 2006-07-03 | 2008-04-01 | 삼성전기주식회사 | 편광성을 갖는 반도체 발광 소자 |
WO2008027692A2 (en) * | 2006-08-02 | 2008-03-06 | Abu-Ageel Nayef M | Led-based illumination system |
DE102006046037B4 (de) | 2006-09-28 | 2024-05-29 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | LED-Halbleiterkörper und Verwendung eines LED-Halbleiterkörpers |
US7697584B2 (en) * | 2006-10-02 | 2010-04-13 | Philips Lumileds Lighting Company, Llc | Light emitting device including arrayed emitters defined by a photonic crystal |
JP2010506402A (ja) | 2006-10-02 | 2010-02-25 | イルミテックス, インコーポレイテッド | Ledのシステムおよび方法 |
KR100809227B1 (ko) * | 2006-10-27 | 2008-03-05 | 삼성전기주식회사 | 질화물 반도체 발광소자 및 제조 방법 |
KR20090082923A (ko) * | 2006-11-15 | 2009-07-31 | 더 리전츠 오브 더 유니버시티 오브 캘리포니아 | 다중 추출기를 통하여 광을 고효율로 추출하는 발광 다이오드 |
US20080121903A1 (en) * | 2006-11-24 | 2008-05-29 | Sony Corporation | Method for manufacturing light-emitting diode, light-emitting diode, lightsource cell unit, light-emitting diode backlight, light-emitting diode illuminating device, light-emitting diode display, and electronic apparatus |
WO2008065373A1 (en) * | 2006-11-28 | 2008-06-05 | Luxtaltek Corporation | Pyramidal photonic crystal light emitting device |
US7615398B2 (en) | 2006-11-28 | 2009-11-10 | Luxtaltek Corporation | Pyramidal photonic crystal light emitting device |
US7700962B2 (en) * | 2006-11-28 | 2010-04-20 | Luxtaltek Corporation | Inverted-pyramidal photonic crystal light emitting device |
US8110838B2 (en) * | 2006-12-08 | 2012-02-07 | Luminus Devices, Inc. | Spatial localization of light-generating portions in LEDs |
US20080149946A1 (en) | 2006-12-22 | 2008-06-26 | Philips Lumileds Lighting Company, Llc | Semiconductor Light Emitting Device Configured To Emit Multiple Wavelengths Of Light |
DE102007018307A1 (de) * | 2007-01-26 | 2008-07-31 | Osram Opto Semiconductors Gmbh | Halbleiterchip und Verfahren zur Herstellung eines Halbleiterchips |
US8092064B2 (en) * | 2007-02-23 | 2012-01-10 | Rambus International Ltd. | Tiled illumination assembly and related methods |
JPWO2008111275A1 (ja) * | 2007-03-09 | 2010-06-24 | 三菱電機株式会社 | 照明装置及び画像投写装置 |
US8023179B2 (en) * | 2007-03-15 | 2011-09-20 | Ofs Fitel Llc | Enhanced continuum generation in nonlinear bulk optic materials |
US8110425B2 (en) * | 2007-03-20 | 2012-02-07 | Luminus Devices, Inc. | Laser liftoff structure and related methods |
KR101341374B1 (ko) * | 2007-07-30 | 2013-12-16 | 삼성전자주식회사 | 광자결정 발광소자 및 그 제조방법 |
US20090050905A1 (en) * | 2007-08-20 | 2009-02-26 | Abu-Ageel Nayef M | Highly Efficient Light-Emitting Diode |
JP5071087B2 (ja) * | 2007-12-13 | 2012-11-14 | 住友電気工業株式会社 | 半導体発光素子 |
JP5322453B2 (ja) * | 2008-02-07 | 2013-10-23 | キヤノン株式会社 | 3次元フォトニック結晶発光素子 |
JP2011512037A (ja) | 2008-02-08 | 2011-04-14 | イルミテックス, インコーポレイテッド | エミッタ層成形のためのシステムおよび方法 |
KR20090106299A (ko) * | 2008-04-05 | 2009-10-08 | 송준오 | 오믹접촉 광추출 구조층을 구비한 그룹 3족 질화물계반도체 발광다이오드 소자 및 이의 제조 방법 |
JP2009267263A (ja) * | 2008-04-28 | 2009-11-12 | Kyocera Corp | 発光装置およびその製造方法 |
DE102008035900A1 (de) * | 2008-04-30 | 2009-11-05 | Osram Opto Semiconductors Gmbh | Leuchtdiodenchip |
US20090301388A1 (en) * | 2008-06-05 | 2009-12-10 | Soraa Inc. | Capsule for high pressure processing and method of use for supercritical fluids |
US8871024B2 (en) * | 2008-06-05 | 2014-10-28 | Soraa, Inc. | High pressure apparatus and method for nitride crystal growth |
US8097081B2 (en) | 2008-06-05 | 2012-01-17 | Soraa, Inc. | High pressure apparatus and method for nitride crystal growth |
US9157167B1 (en) | 2008-06-05 | 2015-10-13 | Soraa, Inc. | High pressure apparatus and method for nitride crystal growth |
US20090320745A1 (en) * | 2008-06-25 | 2009-12-31 | Soraa, Inc. | Heater device and method for high pressure processing of crystalline materials |
US20100003492A1 (en) * | 2008-07-07 | 2010-01-07 | Soraa, Inc. | High quality large area bulk non-polar or semipolar gallium based substrates and methods |
US10147843B2 (en) * | 2008-07-24 | 2018-12-04 | Lumileds Llc | Semiconductor light emitting device including a window layer and a light-directing structure |
US8021481B2 (en) | 2008-08-07 | 2011-09-20 | Soraa, Inc. | Process and apparatus for large-scale manufacturing of bulk monocrystalline gallium-containing nitride |
US8430958B2 (en) * | 2008-08-07 | 2013-04-30 | Soraa, Inc. | Apparatus and method for seed crystal utilization in large-scale manufacturing of gallium nitride |
US8979999B2 (en) * | 2008-08-07 | 2015-03-17 | Soraa, Inc. | Process for large-scale ammonothermal manufacturing of gallium nitride boules |
US10036099B2 (en) | 2008-08-07 | 2018-07-31 | Slt Technologies, Inc. | Process for large-scale ammonothermal manufacturing of gallium nitride boules |
KR20100028412A (ko) * | 2008-09-04 | 2010-03-12 | 삼성전자주식회사 | 나노 막대를 이용한 발광 다이오드 및 그 제조 방법 |
US7976630B2 (en) | 2008-09-11 | 2011-07-12 | Soraa, Inc. | Large-area seed for ammonothermal growth of bulk gallium nitride and method of manufacture |
US7741134B2 (en) * | 2008-09-15 | 2010-06-22 | Bridgelux, Inc. | Inverted LED structure with improved light extraction |
US20100295088A1 (en) * | 2008-10-02 | 2010-11-25 | Soraa, Inc. | Textured-surface light emitting diode and method of manufacture |
US8455894B1 (en) * | 2008-10-17 | 2013-06-04 | Soraa, Inc. | Photonic-crystal light emitting diode and method of manufacture |
TW201034256A (en) | 2008-12-11 | 2010-09-16 | Illumitex Inc | Systems and methods for packaging light-emitting diode devices |
US8987156B2 (en) | 2008-12-12 | 2015-03-24 | Soraa, Inc. | Polycrystalline group III metal nitride with getter and method of making |
US9543392B1 (en) | 2008-12-12 | 2017-01-10 | Soraa, Inc. | Transparent group III metal nitride and method of manufacture |
US8878230B2 (en) * | 2010-03-11 | 2014-11-04 | Soraa, Inc. | Semi-insulating group III metal nitride and method of manufacture |
US8461071B2 (en) * | 2008-12-12 | 2013-06-11 | Soraa, Inc. | Polycrystalline group III metal nitride with getter and method of making |
USRE47114E1 (en) | 2008-12-12 | 2018-11-06 | Slt Technologies, Inc. | Polycrystalline group III metal nitride with getter and method of making |
US20100147210A1 (en) * | 2008-12-12 | 2010-06-17 | Soraa, Inc. | high pressure apparatus and method for nitride crystal growth |
TWI407586B (zh) * | 2008-12-15 | 2013-09-01 | Everlight Electronics Co Ltd | 一種覆晶結構的發光二極體裝置 |
AU2009335047B2 (en) | 2008-12-30 | 2015-12-03 | Ultradent Products, Inc. | Dental curing light having unibody design that acts as a heat sink |
KR101064082B1 (ko) * | 2009-01-21 | 2011-09-08 | 엘지이노텍 주식회사 | 발광 소자 |
JP2010177354A (ja) | 2009-01-28 | 2010-08-12 | Sumitomo Electric Ind Ltd | 半導体発光素子および半導体発光素子の製造方法 |
US20110100291A1 (en) * | 2009-01-29 | 2011-05-05 | Soraa, Inc. | Plant and method for large-scale ammonothermal manufacturing of gallium nitride boules |
JP2010192645A (ja) * | 2009-02-18 | 2010-09-02 | Toshiba Corp | 半導体発光素子及びその製造方法 |
US8247886B1 (en) | 2009-03-09 | 2012-08-21 | Soraa, Inc. | Polarization direction of optical devices using selected spatial configurations |
US8217410B2 (en) * | 2009-03-27 | 2012-07-10 | Wisconsin Alumni Research Foundation | Hybrid vertical cavity light emitting sources |
US8299473B1 (en) | 2009-04-07 | 2012-10-30 | Soraa, Inc. | Polarized white light devices using non-polar or semipolar gallium containing materials and transparent phosphors |
US7952106B2 (en) * | 2009-04-10 | 2011-05-31 | Everlight Electronics Co., Ltd. | Light emitting diode device having uniform current distribution and method for forming the same |
US8791499B1 (en) | 2009-05-27 | 2014-07-29 | Soraa, Inc. | GaN containing optical devices and method with ESD stability |
US8449128B2 (en) | 2009-08-20 | 2013-05-28 | Illumitex, Inc. | System and method for a lens and phosphor layer |
US8585253B2 (en) | 2009-08-20 | 2013-11-19 | Illumitex, Inc. | System and method for color mixing lens array |
US9000466B1 (en) | 2010-08-23 | 2015-04-07 | Soraa, Inc. | Methods and devices for light extraction from a group III-nitride volumetric LED using surface and sidewall roughening |
US20110062472A1 (en) | 2009-09-17 | 2011-03-17 | Koninklijke Philips Electronics N.V. | Wavelength-converted semiconductor light emitting device |
US9293644B2 (en) | 2009-09-18 | 2016-03-22 | Soraa, Inc. | Power light emitting diode and method with uniform current density operation |
US8933644B2 (en) | 2009-09-18 | 2015-01-13 | Soraa, Inc. | LED lamps with improved quality of light |
KR101368906B1 (ko) | 2009-09-18 | 2014-02-28 | 소라, 인코포레이티드 | 전력 발광 다이오드 및 전류 밀도 작동 방법 |
US9583678B2 (en) | 2009-09-18 | 2017-02-28 | Soraa, Inc. | High-performance LED fabrication |
US8435347B2 (en) | 2009-09-29 | 2013-05-07 | Soraa, Inc. | High pressure apparatus with stackable rings |
US9175418B2 (en) | 2009-10-09 | 2015-11-03 | Soraa, Inc. | Method for synthesis of high quality large area bulk gallium based crystals |
JP5349260B2 (ja) | 2009-11-19 | 2013-11-20 | 株式会社東芝 | 半導体発光装置及びその製造方法 |
US20110186874A1 (en) * | 2010-02-03 | 2011-08-04 | Soraa, Inc. | White Light Apparatus and Method |
US8905588B2 (en) | 2010-02-03 | 2014-12-09 | Sorra, Inc. | System and method for providing color light sources in proximity to predetermined wavelength conversion structures |
US20110182056A1 (en) * | 2010-06-23 | 2011-07-28 | Soraa, Inc. | Quantum Dot Wavelength Conversion for Optical Devices Using Nonpolar or Semipolar Gallium Containing Materials |
US8740413B1 (en) | 2010-02-03 | 2014-06-03 | Soraa, Inc. | System and method for providing color light sources in proximity to predetermined wavelength conversion structures |
US10147850B1 (en) | 2010-02-03 | 2018-12-04 | Soraa, Inc. | System and method for providing color light sources in proximity to predetermined wavelength conversion structures |
EP2381488A1 (en) * | 2010-04-22 | 2011-10-26 | Imec | Method of manufacturing a light emitting diode |
US8154052B2 (en) | 2010-05-06 | 2012-04-10 | Koninklijke Philips Electronics N.V. | Light emitting device grown on wavelength converting substrate |
US8692261B2 (en) | 2010-05-19 | 2014-04-08 | Koninklijke Philips N.V. | Light emitting device grown on a relaxed layer |
US8536022B2 (en) | 2010-05-19 | 2013-09-17 | Koninklijke Philips N.V. | Method of growing composite substrate using a relaxed strained layer |
US9564320B2 (en) | 2010-06-18 | 2017-02-07 | Soraa, Inc. | Large area nitride crystal and method for making it |
US9450143B2 (en) | 2010-06-18 | 2016-09-20 | Soraa, Inc. | Gallium and nitrogen containing triangular or diamond-shaped configuration for optical devices |
CN102386200B (zh) * | 2010-08-27 | 2014-12-31 | 财团法人工业技术研究院 | 发光单元阵列与投影系统 |
US8729559B2 (en) | 2010-10-13 | 2014-05-20 | Soraa, Inc. | Method of making bulk InGaN substrates and devices thereon |
CN102487111B (zh) * | 2010-12-04 | 2014-08-27 | 展晶科技(深圳)有限公司 | 半导体发光芯片制造方法 |
US8786053B2 (en) | 2011-01-24 | 2014-07-22 | Soraa, Inc. | Gallium-nitride-on-handle substrate materials and devices and method of manufacture |
US8872217B2 (en) | 2011-04-15 | 2014-10-28 | Luminus Devices, Inc. | Electronic device contact structures |
WO2013008556A1 (ja) | 2011-07-12 | 2013-01-17 | 丸文株式会社 | 発光素子及びその製造方法 |
US8492185B1 (en) | 2011-07-14 | 2013-07-23 | Soraa, Inc. | Large area nonpolar or semipolar gallium and nitrogen containing substrate and resulting devices |
US8686431B2 (en) | 2011-08-22 | 2014-04-01 | Soraa, Inc. | Gallium and nitrogen containing trilateral configuration for optical devices |
US9694158B2 (en) | 2011-10-21 | 2017-07-04 | Ahmad Mohamad Slim | Torque for incrementally advancing a catheter during right heart catheterization |
US10029955B1 (en) | 2011-10-24 | 2018-07-24 | Slt Technologies, Inc. | Capsule for high pressure, high temperature processing of materials and methods of use |
US8912025B2 (en) | 2011-11-23 | 2014-12-16 | Soraa, Inc. | Method for manufacture of bright GaN LEDs using a selective removal process |
US8482104B2 (en) | 2012-01-09 | 2013-07-09 | Soraa, Inc. | Method for growth of indium-containing nitride films |
US9269876B2 (en) | 2012-03-06 | 2016-02-23 | Soraa, Inc. | Light emitting diodes with low refractive index material layers to reduce light guiding effects |
US8971368B1 (en) | 2012-08-16 | 2015-03-03 | Soraa Laser Diode, Inc. | Laser devices having a gallium and nitrogen containing semipolar surface orientation |
US9978904B2 (en) | 2012-10-16 | 2018-05-22 | Soraa, Inc. | Indium gallium nitride light emitting devices |
US8802471B1 (en) | 2012-12-21 | 2014-08-12 | Soraa, Inc. | Contacts for an n-type gallium and nitrogen substrate for optical devices |
US8994033B2 (en) | 2013-07-09 | 2015-03-31 | Soraa, Inc. | Contacts for an n-type gallium and nitrogen substrate for optical devices |
US9929311B2 (en) | 2013-07-17 | 2018-03-27 | Marubun Corporation | Semiconductor light emitting element and method for producing the same |
TWI597863B (zh) * | 2013-10-22 | 2017-09-01 | 晶元光電股份有限公司 | 發光元件及其製造方法 |
US9196763B2 (en) | 2013-10-30 | 2015-11-24 | Terahertz Device Corporation | Efficient light extraction from weakly-coupled dielectric buttes |
US9419189B1 (en) | 2013-11-04 | 2016-08-16 | Soraa, Inc. | Small LED source with high brightness and high efficiency |
CN105934833B (zh) * | 2014-03-06 | 2017-09-15 | 丸文株式会社 | 深紫外led及其制造方法 |
US9711679B2 (en) * | 2014-03-11 | 2017-07-18 | Terahertz Device Corporation | Front-side emitting mid-infrared light emitting diode fabrication methods |
US9929317B2 (en) | 2015-01-16 | 2018-03-27 | Marubun Corporation | Deep ultraviolet LED and method for manufacturing the same |
EP3346509B1 (en) | 2015-09-03 | 2021-06-30 | Marubun Corporation | Deep-ultraviolet led and method for manufacturing same |
WO2017168811A1 (ja) | 2016-03-30 | 2017-10-05 | 丸文株式会社 | 深紫外led及びその製造方法 |
US10174438B2 (en) | 2017-03-30 | 2019-01-08 | Slt Technologies, Inc. | Apparatus for high pressure reaction |
US11211525B2 (en) | 2017-05-01 | 2021-12-28 | Ohio State Innovation Foundation | Tunnel junction ultraviolet light emitting diodes with enhanced light extraction efficiency |
CN107204287B (zh) * | 2017-05-25 | 2019-06-07 | 京东方科技集团股份有限公司 | 一种刻蚀方法以及阵列基板制作方法 |
US11309454B2 (en) | 2018-01-26 | 2022-04-19 | Marubun Corporation | Deep ultraviolet LED and method for producing the same |
US11695100B2 (en) * | 2020-01-21 | 2023-07-04 | Nanosys, Inc. | Light emitting diode containing a grating and methods of making the same |
Family Cites Families (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR940007451B1 (ko) * | 1991-09-06 | 1994-08-18 | 주식회사 금성사 | 박막트랜지스터 제조방법 |
JP2780744B2 (ja) * | 1992-11-06 | 1998-07-30 | 信越半導体株式会社 | GaAlAs発光素子の製造方法 |
US5338944A (en) * | 1993-09-22 | 1994-08-16 | Cree Research, Inc. | Blue light-emitting diode with degenerate junction structure |
JPH07176788A (ja) | 1993-12-17 | 1995-07-14 | Sharp Corp | 発光ダイオード |
US5679152A (en) * | 1994-01-27 | 1997-10-21 | Advanced Technology Materials, Inc. | Method of making a single crystals Ga*N article |
US6033682A (en) | 1995-01-13 | 2000-03-07 | Somerset Pharmaceuticals, Inc. | S(+) desmethylselegiline and its use in therapeutic methods and pharmaceutical compositions |
US5779924A (en) * | 1996-03-22 | 1998-07-14 | Hewlett-Packard Company | Ordered interface texturing for a light emitting device |
DE19640594B4 (de) * | 1996-10-01 | 2016-08-04 | Osram Gmbh | Bauelement |
US5955749A (en) * | 1996-12-02 | 1999-09-21 | Massachusetts Institute Of Technology | Light emitting device utilizing a periodic dielectric structure |
EP0874405A3 (en) | 1997-03-25 | 2004-09-15 | Mitsubishi Cable Industries, Ltd. | GaN group crystal base member having low dislocation density, use thereof and manufacturing methods thereof |
JP3898445B2 (ja) | 1997-12-08 | 2007-03-28 | 三菱電線工業株式会社 | 発光素子 |
US6071795A (en) * | 1998-01-23 | 2000-06-06 | The Regents Of The University Of California | Separation of thin films from transparent substrates by selective optical processing |
US6091085A (en) * | 1998-02-19 | 2000-07-18 | Agilent Technologies, Inc. | GaN LEDs with improved output coupling efficiency |
US6335548B1 (en) * | 1999-03-15 | 2002-01-01 | Gentex Corporation | Semiconductor radiation emitter package |
US6307218B1 (en) * | 1998-11-20 | 2001-10-23 | Lumileds Lighting, U.S., Llc | Electrode structures for light emitting devices |
US6363096B1 (en) * | 1999-08-30 | 2002-03-26 | Lucent Technologies Inc. | Article comprising a plastic laser |
US6534798B1 (en) * | 1999-09-08 | 2003-03-18 | California Institute Of Technology | Surface plasmon enhanced light emitting diode and method of operation for the same |
JP2001244066A (ja) * | 2000-03-01 | 2001-09-07 | Seiko Epson Corp | 発光装置 |
JP4492986B2 (ja) * | 2000-04-24 | 2010-06-30 | パナソニック株式会社 | 半導体面発光素子 |
JP4131618B2 (ja) * | 2000-05-22 | 2008-08-13 | 日本碍子株式会社 | フォトニックデバイス用基板の製造方法 |
US6526082B1 (en) * | 2000-06-02 | 2003-02-25 | Lumileds Lighting U.S., Llc | P-contact for GaN-based semiconductors utilizing a reverse-biased tunnel junction |
JP2002022981A (ja) * | 2000-07-05 | 2002-01-23 | Nec Corp | フォトニック結晶多層基板およびその製造方法 |
US7301199B2 (en) | 2000-08-22 | 2007-11-27 | President And Fellows Of Harvard College | Nanoscale wires and related devices |
JP5013650B2 (ja) * | 2000-08-22 | 2012-08-29 | プレジデント・アンド・フェローズ・オブ・ハーバード・カレッジ | ドープされた細長い半導体、そのような半導体の成長、そのような半導体を含んだデバイス、およびそのようなデバイスの製造 |
JP4724281B2 (ja) * | 2000-09-14 | 2011-07-13 | キヤノン株式会社 | 表示装置 |
US20030016895A1 (en) * | 2001-07-23 | 2003-01-23 | Motorola, Inc. | Structure and method for fabricating semiconductor structures and devices utilizing photonic crystals |
US7055987B2 (en) | 2001-09-13 | 2006-06-06 | Lucea Ag | LED-luminous panel and carrier plate |
US7279718B2 (en) * | 2002-01-28 | 2007-10-09 | Philips Lumileds Lighting Company, Llc | LED including photonic crystal structure |
JP4118061B2 (ja) * | 2002-02-07 | 2008-07-16 | 三洋電機株式会社 | 半導体の形成方法および半導体素子 |
CN1286228C (zh) * | 2002-02-08 | 2006-11-22 | 松下电器产业株式会社 | 半导体发光元件及其制造方法 |
US20030222263A1 (en) * | 2002-06-04 | 2003-12-04 | Kopin Corporation | High-efficiency light-emitting diodes |
US7072547B2 (en) * | 2002-06-18 | 2006-07-04 | Massachusetts Institute Of Technology | Waveguide coupling into photonic crystal waveguides |
US6829281B2 (en) * | 2002-06-19 | 2004-12-07 | Finisar Corporation | Vertical cavity surface emitting laser using photonic crystals |
AUPS335502A0 (en) | 2002-07-03 | 2002-07-25 | Uscom Pty Ltd | Pacemaker evaluation method and apparatus |
US7335908B2 (en) | 2002-07-08 | 2008-02-26 | Qunano Ab | Nanostructures and methods for manufacturing the same |
KR101030068B1 (ko) | 2002-07-08 | 2011-04-19 | 니치아 카가쿠 고교 가부시키가이샤 | 질화물 반도체 소자의 제조방법 및 질화물 반도체 소자 |
US6704343B2 (en) * | 2002-07-18 | 2004-03-09 | Finisar Corporation | High power single mode vertical cavity surface emitting laser |
US6878969B2 (en) * | 2002-07-29 | 2005-04-12 | Matsushita Electric Works, Ltd. | Light emitting device |
JP2004111766A (ja) * | 2002-09-20 | 2004-04-08 | Toshiba Corp | 窒化ガリウム系半導体素子及びその製造方法 |
EP1547139A4 (en) | 2002-09-30 | 2009-08-26 | Nanosys Inc | MACRO-ELECTRONIC SUBSTRATE WITH HIGH NANO-ACTIVATION SURFACE AREA AND USES THEREOF |
AU2003282548A1 (en) | 2002-10-10 | 2004-05-04 | Nanosys, Inc. | Nano-chem-fet based biosensors |
JP4748924B2 (ja) * | 2002-12-05 | 2011-08-17 | 日本碍子株式会社 | 半導体積層構造 |
US6770353B1 (en) * | 2003-01-13 | 2004-08-03 | Hewlett-Packard Development Company, L.P. | Co-deposited films with nano-columnar structures and formation process |
JP4263121B2 (ja) * | 2003-03-27 | 2009-05-13 | 三洋電機株式会社 | 発光素子および照明装置 |
US7262550B2 (en) * | 2003-04-15 | 2007-08-28 | Luminus Devices, Inc. | Light emitting diode utilizing a physical pattern |
US7166871B2 (en) * | 2003-04-15 | 2007-01-23 | Luminus Devices, Inc. | Light emitting systems |
US7211831B2 (en) * | 2003-04-15 | 2007-05-01 | Luminus Devices, Inc. | Light emitting device with patterned surfaces |
US7521854B2 (en) * | 2003-04-15 | 2009-04-21 | Luminus Devices, Inc. | Patterned light emitting devices and extraction efficiencies related to the same |
US7098589B2 (en) * | 2003-04-15 | 2006-08-29 | Luminus Devices, Inc. | Light emitting devices with high light collimation |
US6831302B2 (en) * | 2003-04-15 | 2004-12-14 | Luminus Devices, Inc. | Light emitting devices with improved extraction efficiency |
US6958494B2 (en) * | 2003-08-14 | 2005-10-25 | Dicon Fiberoptics, Inc. | Light emitting diodes with current spreading layer |
US20050173714A1 (en) * | 2004-02-06 | 2005-08-11 | Ho-Shang Lee | Lighting system with high and improved extraction efficiency |
US7250635B2 (en) * | 2004-02-06 | 2007-07-31 | Dicon Fiberoptics, Inc. | Light emitting system with high extraction efficency |
US7808011B2 (en) * | 2004-03-19 | 2010-10-05 | Koninklijke Philips Electronics N.V. | Semiconductor light emitting devices including in-plane light emitting layers |
US20050205883A1 (en) * | 2004-03-19 | 2005-09-22 | Wierer Jonathan J Jr | Photonic crystal light emitting device |
US8163575B2 (en) * | 2005-06-17 | 2012-04-24 | Philips Lumileds Lighting Company Llc | Grown photonic crystals in semiconductor light emitting devices |
-
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- 2003-10-21 US US10/691,026 patent/US7012279B2/en not_active Expired - Lifetime
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JP2005129939A (ja) | 2005-05-19 |
TW200525782A (en) | 2005-08-01 |
US20050082545A1 (en) | 2005-04-21 |
EP1526583B1 (en) | 2018-05-16 |
US20060151794A1 (en) | 2006-07-13 |
US7012279B2 (en) | 2006-03-14 |
EP1526583A2 (en) | 2005-04-27 |
TWI378569B (en) | 2012-12-01 |
EP1526583A3 (en) | 2005-07-27 |
US7294862B2 (en) | 2007-11-13 |
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