JP4809578B2 - 位置測定装置 - Google Patents

位置測定装置 Download PDF

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Publication number
JP4809578B2
JP4809578B2 JP2003185349A JP2003185349A JP4809578B2 JP 4809578 B2 JP4809578 B2 JP 4809578B2 JP 2003185349 A JP2003185349 A JP 2003185349A JP 2003185349 A JP2003185349 A JP 2003185349A JP 4809578 B2 JP4809578 B2 JP 4809578B2
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JP
Japan
Prior art keywords
optical fiber
light source
mode laser
measuring device
position measuring
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003185349A
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English (en)
Japanese (ja)
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JP2004101512A5 (enExample
JP2004101512A (ja
Inventor
ヴオルフガング・ホルツアプフェル
ウド・リンネマン
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JP2004101512A publication Critical patent/JP2004101512A/ja
Publication of JP2004101512A5 publication Critical patent/JP2004101512A5/ja
Application granted granted Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G01D5/34723—Scale reading or illumination devices involving light-guides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Semiconductor Lasers (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
JP2003185349A 2002-08-03 2003-06-27 位置測定装置 Expired - Fee Related JP4809578B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10235669.6 2002-08-03
DE10235669.6A DE10235669B4 (de) 2002-08-03 2002-08-03 Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2004101512A JP2004101512A (ja) 2004-04-02
JP2004101512A5 JP2004101512A5 (enExample) 2006-08-10
JP4809578B2 true JP4809578B2 (ja) 2011-11-09

Family

ID=30128719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003185349A Expired - Fee Related JP4809578B2 (ja) 2002-08-03 2003-06-27 位置測定装置

Country Status (4)

Country Link
US (1) US7046368B2 (enExample)
JP (1) JP4809578B2 (enExample)
CN (1) CN1285879C (enExample)
DE (1) DE10235669B4 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE50105554D1 (de) * 2000-09-14 2005-04-14 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
DE102004053082A1 (de) * 2004-11-03 2006-05-04 Dr. Johannes Heidenhain Gmbh Positionsmesssystem
DE102006041357A1 (de) 2005-11-09 2007-05-10 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung
US7502122B2 (en) * 2006-07-31 2009-03-10 Mitutoyo Corporation Fiber-optic miniature encoder for fine pitch scales
US7924433B2 (en) * 2008-09-08 2011-04-12 Agilent Technologies, Inc. Displacement measurement system and method of use
CN102197286B (zh) * 2008-10-23 2014-09-03 株式会社尼康 编码器
DE102010063253A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011076178B4 (de) 2011-05-20 2022-03-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
EP2589982A1 (de) * 2011-11-03 2013-05-08 Leica Geosystems AG Laserdiode als Interferometer-Laserstrahlquelle in einem Lasertracker
CN102564321B (zh) * 2011-12-22 2014-02-19 清华大学 一种基于外腔调制稳频的激光回馈位移测量方法及系统
DE102012016410B9 (de) * 2012-08-21 2020-01-09 Toptica Photonics Ag Konfokalmikroskop
DE102013210999A1 (de) * 2013-06-13 2014-12-18 Dr. Johannes Heidenhain Gmbh Messeinrichtung
TWI627379B (zh) * 2013-10-07 2018-06-21 德商強那斯海登翰博士有限公司 光學位置測量裝置
DE102014211004A1 (de) * 2014-06-10 2015-12-17 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN115371561B (zh) * 2022-09-22 2024-11-19 承德建龙特殊钢有限公司 一种穿孔机顶头脱落检测装置及方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60207389A (ja) * 1984-03-31 1985-10-18 Agency Of Ind Science & Technol 半導体レ−ザ装置
JPS61240691A (ja) * 1985-04-17 1986-10-25 Sumitomo Electric Ind Ltd 光源
JPS63277925A (ja) * 1987-05-11 1988-11-15 Canon Inc 測長装置
JPH01199115A (ja) * 1988-02-04 1989-08-10 Matsushita Electric Ind Co Ltd 光電式エンコーダ
JPH0718714B2 (ja) * 1988-05-10 1995-03-06 キヤノン株式会社 エンコーダー
JPH01291480A (ja) * 1988-05-19 1989-11-24 Fujitsu Ltd 外部共振器付半導体レーザ
US5198873A (en) * 1988-10-19 1993-03-30 Canon Kabushiki Kaisha Encoder utilizing interference using multi-mode semiconductor laser
JP2547826B2 (ja) * 1988-10-19 1996-10-23 キヤノン株式会社 マルチモード半導体レーザを使用する干渉計測装置
US5161165A (en) * 1991-09-26 1992-11-03 Hewlett-Packard Company Multimode stabilized external cavity laser
US5386426A (en) * 1992-09-10 1995-01-31 Hughes Aircraft Company Narrow bandwidth laser array system
JPH06347848A (ja) * 1993-06-08 1994-12-22 Hitachi Metals Ltd 第二高調波発生装置
JP3304696B2 (ja) * 1995-04-17 2002-07-22 株式会社先進材料利用ガスジェネレータ研究所 光学式センサ
JPH09252158A (ja) * 1996-03-18 1997-09-22 Matsushita Electric Ind Co Ltd 波長安定化半導体レーザ及び波長可変半導体レーザ及び光ピックアップ
JP3450180B2 (ja) * 1998-04-20 2003-09-22 日本電気株式会社 波長可変レーザー
JP2000321021A (ja) * 1999-05-10 2000-11-24 Canon Inc 干渉装置、変位測定装置、及びそれを用いた情報記録又は／及び再生装置
JP2000353856A (ja) * 1999-06-11 2000-12-19 Nec Corp 半導体レーザモジュ−ル
DE50105554D1 (de) * 2000-09-14 2005-04-14 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
DE10054062A1 (de) * 2000-10-31 2002-05-16 Heidenhain Gmbh Dr Johannes Verfahren zur Positionsbestimmung und Positionsmesseinrichtung zur Ausführung des Verfahrens
JP2002176224A (ja) * 2000-12-07 2002-06-21 Fuji Photo Film Co Ltd レーザー光源

Also Published As

Publication number Publication date
DE10235669A1 (de) 2004-02-12
US7046368B2 (en) 2006-05-16
CN1479074A (zh) 2004-03-03
DE10235669B4 (de) 2016-11-17
US20040090636A1 (en) 2004-05-13
CN1285879C (zh) 2006-11-22
JP2004101512A (ja) 2004-04-02

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