JP4794902B2 - 表面計測方法および装置 - Google Patents

表面計測方法および装置 Download PDF

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Publication number
JP4794902B2
JP4794902B2 JP2005137969A JP2005137969A JP4794902B2 JP 4794902 B2 JP4794902 B2 JP 4794902B2 JP 2005137969 A JP2005137969 A JP 2005137969A JP 2005137969 A JP2005137969 A JP 2005137969A JP 4794902 B2 JP4794902 B2 JP 4794902B2
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Prior art keywords
measurement
measured
calibration
data
focus adjustment
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Japanese (ja)
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JP2006317199A (ja
JP2006317199A5 (enExample
Inventor
亮 寺尾
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Canon Inc
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Canon Inc
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Priority to JP2005137969A priority Critical patent/JP4794902B2/ja
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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2005137969A 2005-05-11 2005-05-11 表面計測方法および装置 Expired - Fee Related JP4794902B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005137969A JP4794902B2 (ja) 2005-05-11 2005-05-11 表面計測方法および装置

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Application Number Priority Date Filing Date Title
JP2005137969A JP4794902B2 (ja) 2005-05-11 2005-05-11 表面計測方法および装置

Publications (3)

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JP2006317199A JP2006317199A (ja) 2006-11-24
JP2006317199A5 JP2006317199A5 (enExample) 2008-06-26
JP4794902B2 true JP4794902B2 (ja) 2011-10-19

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JP2005137969A Expired - Fee Related JP4794902B2 (ja) 2005-05-11 2005-05-11 表面計測方法および装置

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305741B2 (ja) * 2008-05-29 2013-10-02 キヤノン株式会社 測定方法
JP2010133860A (ja) 2008-12-05 2010-06-17 Canon Inc 形状算出方法
JP2010160051A (ja) * 2009-01-08 2010-07-22 Mitsutoyo Corp 画像機器の校正用パターン
JP5798823B2 (ja) * 2011-07-22 2015-10-21 株式会社ミツトヨ レーザ干渉測定装置の横座標校正治具および横座標校正方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3349235B2 (ja) * 1993-12-24 2002-11-20 オリンパス光学工業株式会社 干渉測定方法
DE19502472A1 (de) * 1995-01-27 1996-08-01 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Aufnehmen eines Objektes
JP2000097669A (ja) * 1998-09-18 2000-04-07 Canon Inc 光波干渉計装置、及び該装置におけるデータ処理方法
JP2000097619A (ja) * 1998-09-21 2000-04-07 Nikon Corp 干渉計のフォーカス調整方法およびフォーカス調整装置
JP2001201325A (ja) * 2000-01-18 2001-07-27 Nikon Corp 三次元形状観察装置

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JP2006317199A (ja) 2006-11-24

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