JP4765281B2 - 光電変換素子およびその製造方法 - Google Patents
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- JP4765281B2 JP4765281B2 JP2004241881A JP2004241881A JP4765281B2 JP 4765281 B2 JP4765281 B2 JP 4765281B2 JP 2004241881 A JP2004241881 A JP 2004241881A JP 2004241881 A JP2004241881 A JP 2004241881A JP 4765281 B2 JP4765281 B2 JP 4765281B2
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- 238000010894 electron beam technology Methods 0.000 description 5
- YFZOUMNUDGGHIW-UHFFFAOYSA-M p-chloromercuribenzoic acid Chemical compound OC(=O)C1=CC=C([Hg]Cl)C=C1 YFZOUMNUDGGHIW-UHFFFAOYSA-M 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
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- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
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- 238000004544 sputter deposition Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000005525 hole transport Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920000264 poly(3',7'-dimethyloctyloxy phenylene vinylene) Polymers 0.000 description 3
- 239000002861 polymer material Substances 0.000 description 3
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- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
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- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229920000144 PEDOT:PSS Polymers 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 210000001520 comb Anatomy 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- DZVCFNFOPIZQKX-LTHRDKTGSA-M merocyanine Chemical compound [Na+].O=C1N(CCCC)C(=O)N(CCCC)C(=O)C1=C\C=C\C=C/1N(CCCS([O-])(=O)=O)C2=CC=CC=C2O\1 DZVCFNFOPIZQKX-LTHRDKTGSA-M 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000113 methacrylic resin Substances 0.000 description 1
- 239000007773 negative electrode material Substances 0.000 description 1
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- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000013087 polymer photovoltaic Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Description
Claims (7)
- 第1基体と、
前記第1基体上に設けられた犠牲膜に形成されたストライプ状の開口部の一方の側面に第1金属を、もう一方の側面に第2金属を斜め蒸着法によって堆積させた後、前記犠牲膜とともに当該犠牲膜上に堆積された前記第1金属および前記第2金属を除去することによって形成された第1電極および第2電極と、
少なくとも前記第1電極と前記第2電極との間に配置された光電変換層と、
前記第1電極と前記第2電極と前記光電変換層とを間に挟んで、前記第1基体と対向するように配置された第2基体と
を具備し、
前記第1電極と前記第2電極とはくし型電極からなり、
前記第1電極の断面形状および前記第2電極の断面形状は、前記第1電極と前記第2電極との隣接部において、光の入射方向に向かって細くなる形状を有している
光電変換素子。 - 前記第1基体、または前記第2基体、または前記第1基体と前記第2基体は、光透過性を有する
請求項1に記載の光電変換素子。 - 前記光電変換層は、前記第1電極と前記第2電極の少なくとも一方に対して、ショットキー接合を形成する
請求項1に記載の光電変換素子。 - 前記光電変換層は、有機半導体材料からなる
請求項1に記載の光電変換素子。 - 前記光電変換層は、電子供与性材料と電子受容性材料とを有している
請求項1に記載の光電変換素子。 - 前記電子供与性材料は、ポリフェニレン-ビニレン、ポリチオフェン、または、ポリフェニレン-ビニレンもしくはポリチオフェンの誘導体を主成分としたものであり、
前記電子受容性材料は、C60もしくは側鎖にシアノ基を有するポリフェニレン-ビニレン誘導体である
請求項5に記載の光電変換素子。 - 基体表面に犠牲膜を形成する工程と、
前記犠牲膜にストライプ状の開口部を形成する工程と、
前記開口部の一方の側面に第1金属を斜め蒸着法によって堆積させる工程と、
前記開口部のもう一方の側面に第2金属を斜め蒸着法によって堆積させる工程と、
前記犠牲膜を除去することにより、前記犠牲膜とともに当該犠牲膜上に堆積された前記第1金属および第2金属を除去することによって第1電極および第2電極を形成する工程と、
前記第1電極および第2電極が形成された前記基体上に光電変換層を成膜する工程と、
前記光電変換層を被覆する透明保護膜を形成する工程とを備え、
前記第1電極と前記第2電極とはくし型電極からなり、
前記第1電極の断面形状および前記第2電極の断面形状は、前記第1電極と前記第2電極との隣接部において、光の入射方向に向かって細くなる形状を有している
光電変換素子の製造方法。
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JP2004241881A JP4765281B2 (ja) | 2004-08-23 | 2004-08-23 | 光電変換素子およびその製造方法 |
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JP2004241881A JP4765281B2 (ja) | 2004-08-23 | 2004-08-23 | 光電変換素子およびその製造方法 |
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JP2006060104A JP2006060104A (ja) | 2006-03-02 |
JP4765281B2 true JP4765281B2 (ja) | 2011-09-07 |
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JP2004241881A Expired - Fee Related JP4765281B2 (ja) | 2004-08-23 | 2004-08-23 | 光電変換素子およびその製造方法 |
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JP (1) | JP4765281B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008032715A1 (fr) | 2006-09-12 | 2008-03-20 | Hiroshima University | Matériau semi-conducteur organique, dispositif semi-conducteur organique utilisant celui-ci et leurs procédés de fabrication |
JP2008135657A (ja) * | 2006-11-29 | 2008-06-12 | Konica Minolta Holdings Inc | 光電変換素子、その製造方法、及び放射線画像検出器 |
JP5624286B2 (ja) * | 2009-05-28 | 2014-11-12 | ローム株式会社 | 紫外光検出素子及び紫外光検出装置 |
JP2011192761A (ja) * | 2010-03-12 | 2011-09-29 | Lintec Corp | 有機薄膜太陽電池素子及びその作製方法、並びに有機薄膜太陽電池素子形成用基板 |
WO2013169047A1 (ko) * | 2012-05-09 | 2013-11-14 | 주식회사 엘지화학 | 유기 전기화학 장치 및 이의 제조방법 |
DE102018122557A1 (de) * | 2018-09-14 | 2020-03-19 | Echovista Gmbh | Vorrichtung zur Beseitigung von Ablagerungen und/oder Niederschlag auf einem Substrat |
Family Cites Families (16)
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JPS5610977A (en) * | 1979-07-09 | 1981-02-03 | Agency Of Ind Science & Technol | Manufacture of photoelectric converter |
JPS62142368A (ja) * | 1985-12-17 | 1987-06-25 | Fuji Electric Co Ltd | 薄膜半導体装置の製造方法 |
JPS6342180A (ja) * | 1986-08-08 | 1988-02-23 | Toa Nenryo Kogyo Kk | 集積型光起電力装置の製造方法 |
JPS63234566A (ja) * | 1987-03-23 | 1988-09-29 | Mitsubishi Electric Corp | 太陽電池 |
JP3107923B2 (ja) * | 1992-09-22 | 2000-11-13 | 沖電気工業株式会社 | 太陽光を利用した発電装置 |
JP3442418B2 (ja) * | 1993-01-12 | 2003-09-02 | 三洋電機株式会社 | 光起電力素子 |
JP3813217B2 (ja) * | 1995-03-13 | 2006-08-23 | パイオニア株式会社 | 有機エレクトロルミネッセンスディスプレイパネルの製造方法 |
JP3698746B2 (ja) * | 1994-11-30 | 2005-09-21 | シャープ株式会社 | 太陽電池とその製造方法 |
JPH08287969A (ja) * | 1995-04-13 | 1996-11-01 | Murata Mfg Co Ltd | 光電池 |
JPH09260696A (ja) * | 1996-03-19 | 1997-10-03 | Daido Hoxan Inc | 太陽電池 |
JP3302262B2 (ja) * | 1996-06-10 | 2002-07-15 | ティーディーケイ株式会社 | 有機エレクトロ・ルミネッセンス表示装置及びその製造方法 |
JPH1093117A (ja) * | 1996-09-11 | 1998-04-10 | Oki Electric Ind Co Ltd | 光電変換装置 |
JPH11204267A (ja) * | 1998-01-14 | 1999-07-30 | Sharp Corp | エレクトロルミネッセンスディスプレイパネル及びその製造方法 |
JP3441361B2 (ja) * | 1998-03-17 | 2003-09-02 | 株式会社東芝 | 光電変換素子 |
JP4074803B2 (ja) * | 2002-10-28 | 2008-04-16 | シャープ株式会社 | 光電変換素子の製造方法 |
JP4216059B2 (ja) * | 2002-12-04 | 2009-01-28 | シャープ株式会社 | Iii・v族化合物半導体太陽電池の製造方法 |
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