JP4734985B2 - 圧電振動ジャイロ素子および圧電振動片 - Google Patents

圧電振動ジャイロ素子および圧電振動片 Download PDF

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Publication number
JP4734985B2
JP4734985B2 JP2005083381A JP2005083381A JP4734985B2 JP 4734985 B2 JP4734985 B2 JP 4734985B2 JP 2005083381 A JP2005083381 A JP 2005083381A JP 2005083381 A JP2005083381 A JP 2005083381A JP 4734985 B2 JP4734985 B2 JP 4734985B2
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Japan
Prior art keywords
arm
groove
groove portion
vibrating arm
vibrating
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Expired - Fee Related
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JP2005083381A
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Japanese (ja)
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JP2006266784A (ja
JP2006266784A5 (enExample
Inventor
啓一 山口
誠 江口
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2005083381A priority Critical patent/JP4734985B2/ja
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Publication of JP2006266784A5 publication Critical patent/JP2006266784A5/ja
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JP2005083381A 2005-03-23 2005-03-23 圧電振動ジャイロ素子および圧電振動片 Expired - Fee Related JP4734985B2 (ja)

Priority Applications (1)

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JP2005083381A JP4734985B2 (ja) 2005-03-23 2005-03-23 圧電振動ジャイロ素子および圧電振動片

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JP2005083381A JP4734985B2 (ja) 2005-03-23 2005-03-23 圧電振動ジャイロ素子および圧電振動片

Publications (3)

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JP2006266784A JP2006266784A (ja) 2006-10-05
JP2006266784A5 JP2006266784A5 (enExample) 2008-04-24
JP4734985B2 true JP4734985B2 (ja) 2011-07-27

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JP2005083381A Expired - Fee Related JP4734985B2 (ja) 2005-03-23 2005-03-23 圧電振動ジャイロ素子および圧電振動片

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4968298B2 (ja) 2009-09-04 2012-07-04 株式会社デンソー 振動型角速度センサ
JP2011199330A (ja) * 2010-03-17 2011-10-06 Seiko Epson Corp 振動片、振動子、発振器
JP6987623B2 (ja) * 2017-11-27 2022-01-05 京セラ株式会社 圧電素子、圧電デバイスおよび圧電素子の製造方法
WO2023090349A1 (ja) * 2021-11-16 2023-05-25 京セラ株式会社 ジャイロセンサ素子

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003133895A (ja) * 2001-10-29 2003-05-09 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP4305625B2 (ja) * 2003-02-10 2009-07-29 セイコーエプソン株式会社 振動子および物理量測定用信号発生素子

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JP2006266784A (ja) 2006-10-05

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