JP2006266784A5 - - Google Patents

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Publication number
JP2006266784A5
JP2006266784A5 JP2005083381A JP2005083381A JP2006266784A5 JP 2006266784 A5 JP2006266784 A5 JP 2006266784A5 JP 2005083381 A JP2005083381 A JP 2005083381A JP 2005083381 A JP2005083381 A JP 2005083381A JP 2006266784 A5 JP2006266784 A5 JP 2006266784A5
Authority
JP
Japan
Prior art keywords
piezoelectric
base
groove portion
vibrating piece
gyro element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005083381A
Other languages
English (en)
Japanese (ja)
Other versions
JP4734985B2 (ja
JP2006266784A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005083381A priority Critical patent/JP4734985B2/ja
Priority claimed from JP2005083381A external-priority patent/JP4734985B2/ja
Publication of JP2006266784A publication Critical patent/JP2006266784A/ja
Publication of JP2006266784A5 publication Critical patent/JP2006266784A5/ja
Application granted granted Critical
Publication of JP4734985B2 publication Critical patent/JP4734985B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005083381A 2005-03-23 2005-03-23 圧電振動ジャイロ素子および圧電振動片 Expired - Fee Related JP4734985B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005083381A JP4734985B2 (ja) 2005-03-23 2005-03-23 圧電振動ジャイロ素子および圧電振動片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005083381A JP4734985B2 (ja) 2005-03-23 2005-03-23 圧電振動ジャイロ素子および圧電振動片

Publications (3)

Publication Number Publication Date
JP2006266784A JP2006266784A (ja) 2006-10-05
JP2006266784A5 true JP2006266784A5 (enExample) 2008-04-24
JP4734985B2 JP4734985B2 (ja) 2011-07-27

Family

ID=37202932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005083381A Expired - Fee Related JP4734985B2 (ja) 2005-03-23 2005-03-23 圧電振動ジャイロ素子および圧電振動片

Country Status (1)

Country Link
JP (1) JP4734985B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4968298B2 (ja) 2009-09-04 2012-07-04 株式会社デンソー 振動型角速度センサ
JP2011199330A (ja) * 2010-03-17 2011-10-06 Seiko Epson Corp 振動片、振動子、発振器
JP6987623B2 (ja) * 2017-11-27 2022-01-05 京セラ株式会社 圧電素子、圧電デバイスおよび圧電素子の製造方法
WO2023090349A1 (ja) * 2021-11-16 2023-05-25 京セラ株式会社 ジャイロセンサ素子

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003133895A (ja) * 2001-10-29 2003-05-09 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP4305625B2 (ja) * 2003-02-10 2009-07-29 セイコーエプソン株式会社 振動子および物理量測定用信号発生素子

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