JP4732524B2 - 密閉容器及び該密閉容器の蓋開閉システム - Google Patents

密閉容器及び該密閉容器の蓋開閉システム Download PDF

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Publication number
JP4732524B2
JP4732524B2 JP2009006602A JP2009006602A JP4732524B2 JP 4732524 B2 JP4732524 B2 JP 4732524B2 JP 2009006602 A JP2009006602 A JP 2009006602A JP 2009006602 A JP2009006602 A JP 2009006602A JP 4732524 B2 JP4732524 B2 JP 4732524B2
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Prior art keywords
lid
opening
pod
latch mechanism
latch
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JP2009006602A
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English (en)
Japanese (ja)
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JP2010087455A (ja
Inventor
宏 五十嵐
俊彦 宮嶋
勉 岡部
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TDK Corp
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TDK Corp
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2009006602A 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム Active JP4732524B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009006602A JP4732524B2 (ja) 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008229238 2008-09-08
JP2008229238 2008-09-08
JP2009006602A JP4732524B2 (ja) 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム

Related Child Applications (1)

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JP2011093561A Division JP5263633B2 (ja) 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム

Publications (2)

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JP2010087455A JP2010087455A (ja) 2010-04-15
JP4732524B2 true JP4732524B2 (ja) 2011-07-27

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Family Applications (2)

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JP2009006602A Active JP4732524B2 (ja) 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム
JP2011093561A Active JP5263633B2 (ja) 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム

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JP2011093561A Active JP5263633B2 (ja) 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム

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JP (2) JP4732524B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8528947B2 (en) * 2008-09-08 2013-09-10 Tdk Corporation Closed container and lid opening/closing system therefor
JP5270298B2 (ja) * 2008-10-28 2013-08-21 信越ポリマー株式会社 基板収納容器
JP4624458B2 (ja) * 2008-11-11 2011-02-02 Ｔｄｋ株式会社 密閉容器及び該密閉容器の蓋開閉システム
JP4748816B2 (ja) * 2008-11-28 2011-08-17 Ｔｄｋ株式会社 密閉容器の蓋開閉システム
JP4919123B2 (ja) * 2010-03-08 2012-04-18 Ｔｄｋ株式会社 処理基板収納ポッド及び処理基板収納ポッドの蓋開閉システム
KR102346007B1 (ko) * 2020-09-14 2022-01-03 김진국 음식물 쓰레기 처리기
JP7654147B1 (ja) * 2024-09-27 2025-03-31 平田機工株式会社 作業装置、その制御方法、コンピュータ可読式記憶媒体およびコンピュータプログラム製品
CN119121397B (zh) * 2024-11-08 2025-05-13 浙江丽水中欣晶圆半导体科技有限公司 硅基外延片厚度均匀性控制装置及控制方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11145269A (ja) * 1997-11-11 1999-05-28 Starlite Co Ltd 密閉式基板用カセット及びそれを用いたデバイスの製造方法
JP2000255677A (ja) * 1999-03-11 2000-09-19 Toshiba Corp 基板収納用容器と基板収納用容器の蓋体の開閉方法
JP3954287B2 (ja) * 1999-06-28 2007-08-08 東京エレクトロン株式会社 ウェハキャリア用蓋体の着脱装置
JP4223715B2 (ja) * 2001-12-04 2009-02-12 ミライアル株式会社 薄板用収納・保管容器
JP2003297896A (ja) * 2002-03-29 2003-10-17 Hitachi Kokusai Electric Inc 半導体製造装置
JP2004235516A (ja) * 2003-01-31 2004-08-19 Trecenti Technologies Inc ウエハ収納治具のパージ方法、ロードポートおよび半導体装置の製造方法

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Publication number Publication date
JP2011151417A (ja) 2011-08-04
JP5263633B2 (ja) 2013-08-14
JP2010087455A (ja) 2010-04-15

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