JP4729025B2 - 断熱レンズセット - Google Patents
断熱レンズセット Download PDFInfo
- Publication number
- JP4729025B2 JP4729025B2 JP2007222456A JP2007222456A JP4729025B2 JP 4729025 B2 JP4729025 B2 JP 4729025B2 JP 2007222456 A JP2007222456 A JP 2007222456A JP 2007222456 A JP2007222456 A JP 2007222456A JP 4729025 B2 JP4729025 B2 JP 4729025B2
- Authority
- JP
- Japan
- Prior art keywords
- test
- probe card
- lens set
- lens
- pogo tower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000012360 testing method Methods 0.000 claims description 76
- 239000000523 sample Substances 0.000 claims description 37
- 238000009413 insulation Methods 0.000 claims description 4
- 230000001174 ascending effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
11 テスト台
12 ポゴタワー
13 チャック
14 プローブカード
15 キャビティ
16 テストヘッド
17 プローブカードホルダ
18 テストプローブ
20 断熱レンズセット
21 ネジ穴
23 Oリング
22 レンズ本体
24 レンズセット
25 レンズセット
26 排気口
28 指示素子
40 排気装置
Claims (1)
- テストヘッドを配置し、前記テストヘッド上に複数のテストプローブを配置するプローブカードと、
前記プローブカードと接続し、中空開口部が設けられるポゴタワーと、
前記ポゴタワーと前記プローブカードとの間に配置され、前記ポゴタワーと前記プローブカードとを接続し一体化させるプローブカードホルダと、
排気装置と、
前記ポゴタワーの中空開口部に配置され、かつスルーホールを設けたレンズ本体と1対の平行レンズとを含み、該レンズ本体と平行レンズとの間に真空の気密空間を形成し、更に前記排気装置と連通する排気口、及び前記気密空間の真空度を示す指示素子を含む断熱レンズセットと、
テスト対象素子を載せるために用いるチャックと、を含み、
前記断熱レンズセットによって、前記テスト対象素子の表面とプローブカードの光源照射面とを、前記ポゴタワーに入射する光線を提供する光源から熱的に隔離する、
撮像素子のテスト装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW096107169 | 2007-03-02 | ||
TW096107169A TWI334486B (en) | 2007-03-02 | 2007-03-02 | Test apparatus with heat-resistant lens kit |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008216236A JP2008216236A (ja) | 2008-09-18 |
JP4729025B2 true JP4729025B2 (ja) | 2011-07-20 |
Family
ID=39732658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007222456A Expired - Fee Related JP4729025B2 (ja) | 2007-03-02 | 2007-08-29 | 断熱レンズセット |
Country Status (3)
Country | Link |
---|---|
US (2) | US7701233B2 (ja) |
JP (1) | JP4729025B2 (ja) |
TW (1) | TWI334486B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI399547B (zh) * | 2009-07-22 | 2013-06-21 | King Yuan Electronics Co Ltd | 具同心圓探針座之半導體測試設備 |
EP3734301A1 (en) * | 2019-05-03 | 2020-11-04 | Afore Oy | Cryogenic wafer prober with movable thermal radiation shield |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4115736A (en) * | 1977-03-09 | 1978-09-19 | The United States Of America As Represented By The Secretary Of The Air Force | Probe station |
JPS5929151B2 (ja) * | 1981-08-03 | 1984-07-18 | 日本電子材料株式会社 | 半導体ウエハ−試験装置 |
JPH07111995B2 (ja) * | 1987-09-02 | 1995-11-29 | 東京エレクトロン株式会社 | プローブ装置 |
US5835997A (en) * | 1995-03-28 | 1998-11-10 | University Of South Florida | Wafer shielding chamber for probe station |
US6771086B2 (en) * | 2002-02-19 | 2004-08-03 | Lucas/Signatone Corporation | Semiconductor wafer electrical testing with a mobile chiller plate for rapid and precise test temperature control |
WO2004003618A1 (ja) * | 2002-07-01 | 2004-01-08 | Rohm Co., Ltd. | イメージセンサモジュール |
KR20050085408A (ko) * | 2002-12-06 | 2005-08-29 | 인터 액션 코포레이션 | 고체 촬상소자의 시험장치 |
US20060214673A1 (en) * | 2003-11-28 | 2006-09-28 | Shingo Tamai | Intrument for testing solid-state imaging device |
US7102159B2 (en) * | 2004-06-12 | 2006-09-05 | Macronix International Co., Ltd. | Ultra thin image sensor package structure and method for fabrication |
JP4513059B2 (ja) * | 2004-08-25 | 2010-07-28 | 横河電機株式会社 | Icテスタ |
US20060245071A1 (en) * | 2005-04-29 | 2006-11-02 | Agilent Technologies | Lens correction element, system and method |
-
2007
- 2007-03-02 TW TW096107169A patent/TWI334486B/zh not_active IP Right Cessation
- 2007-06-25 US US11/819,083 patent/US7701233B2/en not_active Expired - Fee Related
- 2007-08-29 JP JP2007222456A patent/JP4729025B2/ja not_active Expired - Fee Related
-
2010
- 2010-01-05 US US12/652,325 patent/US20100109673A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US7701233B2 (en) | 2010-04-20 |
TWI334486B (en) | 2010-12-11 |
US20080211527A1 (en) | 2008-09-04 |
US20100109673A1 (en) | 2010-05-06 |
TW200837352A (en) | 2008-09-16 |
JP2008216236A (ja) | 2008-09-18 |
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