JP4716323B2 - Cu配線膜構造物の製造方法 - Google Patents
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- 238000000034 method Methods 0.000 title claims description 56
- 238000004519 manufacturing process Methods 0.000 title claims description 46
- 229910018182 Al—Cu Inorganic materials 0.000 claims description 95
- 229910045601 alloy Inorganic materials 0.000 claims description 90
- 239000000956 alloy Substances 0.000 claims description 90
- 239000000758 substrate Substances 0.000 claims description 47
- 238000005530 etching Methods 0.000 claims description 38
- 238000010438 heat treatment Methods 0.000 claims description 35
- 230000015572 biosynthetic process Effects 0.000 claims description 22
- 239000000243 solution Substances 0.000 claims description 21
- 238000004140 cleaning Methods 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 14
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 13
- 239000007864 aqueous solution Substances 0.000 claims description 13
- 229910000838 Al alloy Inorganic materials 0.000 claims description 8
- 238000000137 annealing Methods 0.000 claims description 7
- 229910021645 metal ion Inorganic materials 0.000 claims description 7
- 238000009832 plasma treatment Methods 0.000 claims description 5
- 238000011282 treatment Methods 0.000 claims description 5
- ZDTVBVUHESZSGN-UHFFFAOYSA-N 1,1-diaminoethanol Chemical compound CC(N)(N)O ZDTVBVUHESZSGN-UHFFFAOYSA-N 0.000 claims description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 3
- 150000002429 hydrazines Chemical class 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- BJAARRARQJZURR-UHFFFAOYSA-N trimethylazanium;hydroxide Chemical compound O.CN(C)C BJAARRARQJZURR-UHFFFAOYSA-N 0.000 claims description 2
- 239000010408 film Substances 0.000 description 468
- 230000004888 barrier function Effects 0.000 description 50
- 238000009792 diffusion process Methods 0.000 description 41
- 238000007747 plating Methods 0.000 description 24
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 12
- 230000001681 protective effect Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 230000003405 preventing effect Effects 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 8
- 238000005275 alloying Methods 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000007772 electroless plating Methods 0.000 description 7
- 239000010410 layer Substances 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 238000011109 contamination Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 239000003870 refractory metal Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000011534 incubation Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
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- 238000001459 lithography Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920002577 polybenzoxazole Polymers 0.000 description 2
- 239000002952 polymeric resin Substances 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910020515 Co—W Inorganic materials 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WMFYOYKPJLRMJI-UHFFFAOYSA-N Lercanidipine hydrochloride Chemical compound Cl.COC(=O)C1=C(C)NC(C)=C(C(=O)OC(C)(C)CN(C)CCC(C=2C=CC=CC=2)C=2C=CC=CC=2)C1C1=CC=CC([N+]([O-])=O)=C1 WMFYOYKPJLRMJI-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- -1 TMDH Chemical class 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- GVPFVAHMJGGAJG-UHFFFAOYSA-L cobalt dichloride Chemical compound [Cl-].[Cl-].[Co+2] GVPFVAHMJGGAJG-UHFFFAOYSA-L 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- AAQNGTNRWPXMPB-UHFFFAOYSA-N dipotassium;dioxido(dioxo)tungsten Chemical compound [K+].[K+].[O-][W]([O-])(=O)=O AAQNGTNRWPXMPB-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001709 polysilazane Polymers 0.000 description 1
- 239000001508 potassium citrate Substances 0.000 description 1
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 235000015870 tripotassium citrate Nutrition 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Images
Description
プロシーディングス・オブ・セミ・テクノロジー・シンポジウム(セミコン・ジャパン2004)
基板と、
前記基板上に構成されたCu又はCu合金からなるCu配線膜と、
前記Cu配線膜上に構成されたAl−Cu合金膜
とを具備することを特徴とするCu配線膜構造によって解決される。
基板と、
前記基板上に構成されたCu又はCu合金からなるCu配線膜と、
前記Cu配線膜上に構成されたAl又はAl合金からなるAl膜と、
前記Cu配線膜と前記Al膜との境界領域に構成されたAl−Cu合金膜
とを具備することを特徴とするCu配線膜構造によって解決される。
基板上にCu配線膜を形成するCu配線膜形成工程と、
前記Cu配線膜の上にAl−Cu合金膜を形成するAl−Cu合金膜形成工程
とを具備することを特徴とするCu配線膜構造物の製造方法によって解決される。
基板上にCu配線膜を形成するCu配線膜形成工程と、
前記Cu配線膜の上にAl又はAl合金からなるAl膜を形成するAl膜形成工程と、
前記Cu配線膜と前記Al膜との境界領域にAl−Cu合金膜を形成するAl−Cu合金膜形成工程
とを具備することを特徴とするCu配線膜構造物の製造方法によって解決される。
先ず、図1(a)に示される如く、Siウェハなどの配線基板100上に、プラズマCVD等の手法によって、第1の絶縁膜(SiO(p−SiO)膜)101を形成する。この第1の絶縁膜101上に、塗布の手法によって、250nm厚の多孔質な第2の絶縁膜(LKD−5530(JSR社製の含シリコン有機化合物(methylsilsesquioxane:MSQ):比誘電率2.27)102を形成する。次に、第2の絶縁膜102の上に、塗布の手法によって、空孔を持たない100nm厚のキャップ絶縁膜(MSQ(dense−MSQ)であるLKD−2055(JSR社製):比誘電率2.83)103を形成する。
本実施例は、前記参考例と同様であるが、Al−Cu熱処理時間を短縮し、第1のAl−Cu合金膜107のLERを低減した例である。
本実施例は、2層以上の多層構造のCu配線構造の場合である。
101,201 第1の絶縁膜
102,202 第2の絶縁膜
103,203 第1のキャップ絶縁膜
104,204 第1のメタルバリア膜
105,205 第1のCu配線膜
205a Cu再付着物
106,206 Al膜
107,207 第1のAl−Cu合金膜
207a Al−Cu再付着物
108,208 第1の保護絶縁膜
209 第3の絶縁膜
211 中間絶縁膜
212 第4の絶縁膜
213 第2のキャップ絶縁膜
214 第2のメタルバリア膜
215 第2のCu配線膜
217 第2のAl−Cu合金膜
218 第2の保護絶縁膜
代 理 人 宇 高 克 己
Claims (6)
- Cu又はCu合金からなるCu配線膜が基板上に構成されたCu配線膜構造物の製造方法であって、
前記基板上にCu配線膜を形成するCu配線膜形成工程と、
前記Cu配線膜形成工程の後、前記基板温度が100℃以下の温度で、前記Cu配線膜の上に、Al又はAl合金からなるAl膜を形成するAl膜形成工程と、
前記Al膜形成工程の後、前記Al膜形成時の温度よりも高く、かつ、450℃以下の温度において、2分以内の時間に亘って、不活性雰囲気下で、熱処理することにより、前記Cu配線膜と前記Al膜との境界領域に、厚さが5〜50nmのAl−Cu合金膜を形成するAl−Cu合金膜形成工程と、
前記Al−Cu合金膜形成工程の後、金属イオンを実質的に含まないアルカリ性薬液によるエッチングにより前記Al−Cu合金膜上の前記Al膜を除去するエッチング工程
とを具備することを特徴とするCu配線膜構造物の製造方法。 - 金属イオンを実質的に含まないアルカリ性薬液は、トリメチルアンモニウムハイドレート水溶液、ジアミノエタノール水溶液、アンモニア水溶液、及び飽水ヒドラジン水溶液の群の中から選ばれる何れかであり、pHが9以上である
ことを特徴とする請求項1のCu配線膜構造物の製造方法。 - Cu配線膜形成工程の後で、Al膜形成工程の前に、該Cu配線膜の表面を清浄化する清浄化処理工程を更に具備する
ことを特徴とする請求項1又は請求項2のCu配線膜構造物の製造方法。 - 清浄化処理はプラズマ処理である
ことを特徴とする請求項3のCu配線膜構造物の製造方法。 - Al−Cu膜の上に絶縁膜が設けられる工程を更に具備する
ことを特徴とする請求項1〜請求項4いずれかのCu配線膜構造物の製造方法。 - Al−Cu合金膜形成工程における熱処理はランプアニール処理である
ことを特徴とする請求項1〜請求項5いずれかのCu配線膜構造物の製造方法。
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JP5380984B2 (ja) * | 2008-09-30 | 2014-01-08 | 富士通株式会社 | 半導体装置およびその製造方法 |
JP5517495B2 (ja) * | 2009-06-04 | 2014-06-11 | 株式会社日立製作所 | 配線部材、その製造方法及びそれを用いた電子部品 |
CN104752233A (zh) * | 2013-12-26 | 2015-07-01 | 中芯国际集成电路制造(上海)有限公司 | 一种焊垫制备方法 |
Citations (2)
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JP2000058544A (ja) * | 1998-08-04 | 2000-02-25 | Matsushita Electron Corp | 半導体装置及びその製造方法 |
JP2005050859A (ja) * | 2003-07-29 | 2005-02-24 | Renesas Technology Corp | 半導体装置の製造方法 |
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JPH09298202A (ja) * | 1996-04-30 | 1997-11-18 | Nec Corp | 配線パターンの形成方法 |
JPH1012614A (ja) * | 1996-06-24 | 1998-01-16 | Hitachi Ltd | 半導体装置用配線およびその製造方法 |
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JP2000058544A (ja) * | 1998-08-04 | 2000-02-25 | Matsushita Electron Corp | 半導体装置及びその製造方法 |
JP2005050859A (ja) * | 2003-07-29 | 2005-02-24 | Renesas Technology Corp | 半導体装置の製造方法 |
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