JP4715872B2 - 遅延干渉計 - Google Patents
遅延干渉計 Download PDFInfo
- Publication number
- JP4715872B2 JP4715872B2 JP2008152240A JP2008152240A JP4715872B2 JP 4715872 B2 JP4715872 B2 JP 4715872B2 JP 2008152240 A JP2008152240 A JP 2008152240A JP 2008152240 A JP2008152240 A JP 2008152240A JP 4715872 B2 JP4715872 B2 JP 4715872B2
- Authority
- JP
- Japan
- Prior art keywords
- optical
- package
- delay interferometer
- beam splitter
- adjusting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29398—Temperature insensitivity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29349—Michelson or Michelson/Gires-Tournois configuration, i.e. based on splitting and interferometrically combining relatively delayed signals at a single beamsplitter
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Communication System (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Description
(1)従来手法では、例えば、パッケージ材質のコバール(線膨張係数6×10-6/K)に対して、Si(屈折率温度依存係数10-4)による光学位相調整板を補償材として使用する。熱膨張や屈折率の温度依存性には、容易には計測できない高次成分が含まれているため、設計では、熱膨張や屈折率の温度依存性は1次関数的なパラメータと仮定して温度補償設計を行う。
前記光学部品を接着して搭載した、0〜85℃で0.2X10-6/K以下の熱膨張係数を備えるガラス基板と、
このガラス基板に搭載された光学部品よりなる遅延干渉計ユニットと前記パッケージの底部との間に介在する弾性部材と、
を備え、
前記光学位相調整板は、前記分岐した光信号の光路の夫々に挿入されると共に、光軸方向の厚さが異なり、この厚さの差分に基づいて温度補償を実行し、
前記弾性部材は、前記ビームスプリッタ位置において、前記ガラス基板と前記パッケージの底部間、または前記ビームスプリッタと前記パッケージの底部間に介在することを特徴とする遅延干渉計。
(1)光学部品を接着して搭載したガラス基板を、ビームスプリッタ位置で弾性部材を介してパッケージに固定する構成により、パッケージの温度変動、応力の光学部品への影響を最小に抑制することができる。
2 ビームスプリッタ
3 第1リフレクタ
4 第2リフレクタ
5 入力ポート
6 第1出力ポート
7 第2出力ポート
81 第1光学位相調整板
82 第2光学位相調整板
100 低熱膨張ガラス基板
Claims (1)
- 光信号を分岐するビームスプリッタと、分岐した前記光信号を反射するリフレクタと、分岐した前記光信号の光路に挿入され、光路差について温度補償する光学位相調整板よりなる光学部品を有するマイケルソン型遅延干渉計ユニットを、コバール材のパッケージに実装した遅延干渉計において、
前記光学部品を接着して搭載した、0〜85℃で0.2X10-6/K以下の熱膨張係数を備えるガラス基板と、
このガラス基板に搭載された光学部品よりなる遅延干渉計ユニットと前記パッケージの底部との間に介在する弾性部材と、
を備え、
前記光学位相調整板は、前記分岐した光信号の光路の夫々に挿入されると共に、光軸方向の厚さが異なり、この厚さの差分に基づいて温度補償を実行し、
前記弾性部材は、前記ビームスプリッタ位置において、前記ガラス基板と前記パッケージの底部間、または前記ビームスプリッタと前記パッケージの底部間に介在することを特徴とする遅延干渉計。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008152240A JP4715872B2 (ja) | 2008-06-10 | 2008-06-10 | 遅延干渉計 |
US12/481,161 US20090303490A1 (en) | 2008-06-10 | 2009-06-09 | Delay interferometer |
EP09162396A EP2133732A3 (en) | 2008-06-10 | 2009-06-10 | Delay interferometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008152240A JP4715872B2 (ja) | 2008-06-10 | 2008-06-10 | 遅延干渉計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009302682A JP2009302682A (ja) | 2009-12-24 |
JP4715872B2 true JP4715872B2 (ja) | 2011-07-06 |
Family
ID=41010264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008152240A Expired - Fee Related JP4715872B2 (ja) | 2008-06-10 | 2008-06-10 | 遅延干渉計 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20090303490A1 (ja) |
EP (1) | EP2133732A3 (ja) |
JP (1) | JP4715872B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7444197B2 (en) * | 2004-05-06 | 2008-10-28 | Smp Logic Systems Llc | Methods, systems, and software program for validation and monitoring of pharmaceutical manufacturing processes |
US7799273B2 (en) | 2004-05-06 | 2010-09-21 | Smp Logic Systems Llc | Manufacturing execution system for validation, quality and risk assessment and monitoring of pharmaceutical manufacturing processes |
JP4893969B2 (ja) * | 2008-06-10 | 2012-03-07 | 横河電機株式会社 | 遅延干渉計 |
JP4636449B2 (ja) * | 2008-06-10 | 2011-02-23 | 横河電機株式会社 | 遅延干渉計 |
JP2012013782A (ja) * | 2010-06-29 | 2012-01-19 | Sumitomo Osaka Cement Co Ltd | 光復調器 |
JP5779339B2 (ja) * | 2010-11-24 | 2015-09-16 | 日本オクラロ株式会社 | 光モジュール |
JP2013134320A (ja) * | 2011-12-26 | 2013-07-08 | Fujitsu Telecom Networks Ltd | ラマン増幅用励起光源、ラマン増幅器および光伝送システム |
US9279658B1 (en) * | 2013-03-14 | 2016-03-08 | Exelis, Inc. | System and method for setting up secondary reflective optic |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04216504A (ja) * | 1990-12-17 | 1992-08-06 | Fujitsu Ltd | 光導波路モジュール |
JP2003232957A (ja) * | 2002-02-07 | 2003-08-22 | Furukawa Electric Co Ltd:The | 光モジュール |
JP2004085966A (ja) * | 2002-08-28 | 2004-03-18 | Hitachi Cable Ltd | 導波路型光モジュール |
JP2004094242A (ja) * | 2002-08-15 | 2004-03-25 | Hoya Corp | 光モジュール |
JP2005128440A (ja) * | 2003-10-27 | 2005-05-19 | Fujitsu Ltd | 電気回路を内蔵する光導波路モジュール及びその製造方法 |
JP2006246471A (ja) * | 2005-02-28 | 2006-09-14 | Lucent Technol Inc | 光差分位相シフト・キー信号を復調する方法および装置。 |
JP2007086301A (ja) * | 2005-09-21 | 2007-04-05 | Fujikura Ltd | フィルタモジュールのパッケージ方法 |
JP2007151026A (ja) * | 2005-11-30 | 2007-06-14 | Yokogawa Electric Corp | 復調器 |
JP2007201939A (ja) * | 2006-01-27 | 2007-08-09 | Fujitsu Ltd | 差動m位相偏移変調信号の復調用干渉計 |
JP2007306371A (ja) * | 2006-05-12 | 2007-11-22 | Yokogawa Electric Corp | 遅延干渉計及び復調器 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3334460A1 (de) * | 1983-09-23 | 1985-04-11 | Fa. Carl Zeiss, 7920 Heidenheim | Mehrkoordinaten-messmaschine |
US5317383A (en) * | 1992-09-18 | 1994-05-31 | Shell Oil Company | Array retroreflector apparatus for remote seismic sensing |
US5327216A (en) * | 1992-09-18 | 1994-07-05 | Shell Oil Company | Apparatus for remote seismic sensing of array signals using side-by-side retroreflectors |
US5289434A (en) * | 1992-09-18 | 1994-02-22 | Shell Oil Company | Retroreflector apparatus for remote seismic sensing |
US5555470A (en) * | 1993-10-12 | 1996-09-10 | The Regents Of The University Of Michigan | Single wave linear interferometric force transducer |
JP3618450B2 (ja) * | 1995-11-15 | 2005-02-09 | 株式会社ソキア | 多軸レーザ干渉測長機 |
JP3689949B2 (ja) * | 1995-12-19 | 2005-08-31 | 株式会社ニコン | 投影露光装置、及び該投影露光装置を用いたパターン形成方法 |
US6330065B1 (en) * | 1997-10-02 | 2001-12-11 | Zygo Corporation | Gas insensitive interferometric apparatus and methods |
US6141101A (en) * | 1997-11-12 | 2000-10-31 | Plx, Inc. | Monolithic optical assembly |
US6512588B1 (en) * | 1999-05-05 | 2003-01-28 | Zygo Corporation | Method and system for correcting an interferometric angle measurement for the effects of dispersion |
US7057741B1 (en) * | 1999-06-18 | 2006-06-06 | Kla-Tencor Corporation | Reduced coherence symmetric grazing incidence differential interferometer |
US6541759B1 (en) * | 2000-06-20 | 2003-04-01 | Zygo Corporation | Interferometry system having a dynamic beam-steering assembly for measuring angle and distance and employing optical fibers for remote photoelectric detection |
TWI259898B (en) * | 2002-01-24 | 2006-08-11 | Zygo Corp | Method and apparatus for compensation of time-varying optical properties of gas in interferometry |
CA2491700A1 (en) * | 2004-12-24 | 2006-06-24 | Dicos Technologies Inc. | High coherence frequency stabilized semiconductor laser |
US7292347B2 (en) * | 2005-08-01 | 2007-11-06 | Mitutoyo Corporation | Dual laser high precision interferometer |
WO2007070428A1 (en) * | 2005-12-09 | 2007-06-21 | Massachusetts Institute Of Technology | Carrier-envelope phase shift using linear media |
DE102006001732A1 (de) * | 2006-01-13 | 2007-07-19 | Robert Bosch Gmbh | Interferometrische Messvorrichtung |
KR100781985B1 (ko) * | 2006-07-14 | 2007-12-06 | 삼성전자주식회사 | 변위 간섭계 시스템 및 그가 채용되는 노광설비 |
CA2660055A1 (en) * | 2006-08-03 | 2008-02-07 | Nabtesco Corporation | Optical path switching device |
US7564567B2 (en) * | 2006-09-25 | 2009-07-21 | Massachusetts Institute Of Technology | Sensor for measuring a vibrating surface obscured from view |
JP2008202959A (ja) * | 2007-02-16 | 2008-09-04 | Sony Corp | 振動検出装置 |
US8083359B2 (en) * | 2007-11-20 | 2011-12-27 | Mks Instruments, Inc. | Corner cube retroreflector mount |
JP4636449B2 (ja) * | 2008-06-10 | 2011-02-23 | 横河電機株式会社 | 遅延干渉計 |
JP4893969B2 (ja) * | 2008-06-10 | 2012-03-07 | 横河電機株式会社 | 遅延干渉計 |
JP4895052B2 (ja) * | 2008-06-10 | 2012-03-14 | 横河電機株式会社 | 遅延干渉計 |
JP4461491B2 (ja) * | 2008-06-10 | 2010-05-12 | 横河電機株式会社 | 光学位相調整板 |
US7995208B2 (en) * | 2008-08-06 | 2011-08-09 | Ftrx Llc | Monolithic interferometer with optics of different material |
-
2008
- 2008-06-10 JP JP2008152240A patent/JP4715872B2/ja not_active Expired - Fee Related
-
2009
- 2009-06-09 US US12/481,161 patent/US20090303490A1/en not_active Abandoned
- 2009-06-10 EP EP09162396A patent/EP2133732A3/en not_active Withdrawn
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04216504A (ja) * | 1990-12-17 | 1992-08-06 | Fujitsu Ltd | 光導波路モジュール |
JP2003232957A (ja) * | 2002-02-07 | 2003-08-22 | Furukawa Electric Co Ltd:The | 光モジュール |
JP2004094242A (ja) * | 2002-08-15 | 2004-03-25 | Hoya Corp | 光モジュール |
JP2004085966A (ja) * | 2002-08-28 | 2004-03-18 | Hitachi Cable Ltd | 導波路型光モジュール |
JP2005128440A (ja) * | 2003-10-27 | 2005-05-19 | Fujitsu Ltd | 電気回路を内蔵する光導波路モジュール及びその製造方法 |
JP2006246471A (ja) * | 2005-02-28 | 2006-09-14 | Lucent Technol Inc | 光差分位相シフト・キー信号を復調する方法および装置。 |
JP2007086301A (ja) * | 2005-09-21 | 2007-04-05 | Fujikura Ltd | フィルタモジュールのパッケージ方法 |
JP2007151026A (ja) * | 2005-11-30 | 2007-06-14 | Yokogawa Electric Corp | 復調器 |
JP2007201939A (ja) * | 2006-01-27 | 2007-08-09 | Fujitsu Ltd | 差動m位相偏移変調信号の復調用干渉計 |
JP2007306371A (ja) * | 2006-05-12 | 2007-11-22 | Yokogawa Electric Corp | 遅延干渉計及び復調器 |
Also Published As
Publication number | Publication date |
---|---|
EP2133732A2 (en) | 2009-12-16 |
US20090303490A1 (en) | 2009-12-10 |
EP2133732A3 (en) | 2010-07-14 |
JP2009302682A (ja) | 2009-12-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4715872B2 (ja) | 遅延干渉計 | |
JP4655996B2 (ja) | 遅延干渉計及び復調器 | |
US10545289B1 (en) | Planar optical head for free space optical communications, coherent LIDAR, and other applications | |
EP2111678B1 (en) | Temperature stabilizing packaging for optoelectronic components in a transmitter module | |
US7585117B2 (en) | Optical module | |
US4998256A (en) | Semiconductor laser apparatus | |
JP2001517811A (ja) | 統合型波長選択送信装置 | |
JP4104802B2 (ja) | エアギャップ型エタロンを用いた利得等化装置、波長特性可変装置および光増幅器 | |
WO2013091401A1 (zh) | 一种波长选择开关中波长漂移的补偿方法及其装置 | |
US6816315B1 (en) | Optical path length tuner | |
JPWO2020162446A1 (ja) | 光モジュール | |
US20110317170A1 (en) | Wedge pair for phase shifting | |
US11060913B2 (en) | Tuneable filter | |
JP6593547B1 (ja) | 光モジュール | |
JP2009109393A (ja) | 干渉計及び波長測定装置 | |
US20210018663A1 (en) | Tunable filter and optical communication apparatus | |
JP2010011102A (ja) | 遅延干渉計 | |
GB2570440A (en) | Optical source and method of assembling an optical source | |
EP2133657B1 (en) | Optical phase shifting plate | |
EP1186915A2 (en) | Optical filter which counteracts a tendancy to shift optical wavelengh with change in temperature | |
JP4473917B2 (ja) | 光信号処理装置 | |
US20110228281A1 (en) | Interference cavity for controlling optical path |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100422 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100506 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100616 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20101014 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110113 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20110120 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110301 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110314 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140408 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |