JP4713192B2 - 薄膜トランジスタの作製方法 - Google Patents

薄膜トランジスタの作製方法 Download PDF

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Publication number
JP4713192B2
JP4713192B2 JP2005083179A JP2005083179A JP4713192B2 JP 4713192 B2 JP4713192 B2 JP 4713192B2 JP 2005083179 A JP2005083179 A JP 2005083179A JP 2005083179 A JP2005083179 A JP 2005083179A JP 4713192 B2 JP4713192 B2 JP 4713192B2
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semiconductor layer
mask
forming
conductivity type
impurity
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Japanese (ja)
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JP2005311335A5 (enExample
JP2005311335A (ja
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将文 森末
厳 藤井
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Publication of JP2005311335A5 publication Critical patent/JP2005311335A5/ja
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  • Electroluminescent Light Sources (AREA)
  • Thin Film Transistor (AREA)
JP2005083179A 2004-03-25 2005-03-23 薄膜トランジスタの作製方法 Expired - Fee Related JP4713192B2 (ja)

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JP2005083179A JP4713192B2 (ja) 2004-03-25 2005-03-23 薄膜トランジスタの作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004088848 2004-03-25
JP2004088848 2004-03-25
JP2005083179A JP4713192B2 (ja) 2004-03-25 2005-03-23 薄膜トランジスタの作製方法

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JP2005311335A JP2005311335A (ja) 2005-11-04
JP2005311335A5 JP2005311335A5 (enExample) 2008-03-21
JP4713192B2 true JP4713192B2 (ja) 2011-06-29

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8900970B2 (en) 2006-04-28 2014-12-02 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a semiconductor device using a flexible substrate
CN100461433C (zh) 2007-01-04 2009-02-11 北京京东方光电科技有限公司 一种tft阵列结构及其制造方法
JP5429454B2 (ja) * 2009-04-17 2014-02-26 ソニー株式会社 薄膜トランジスタの製造方法および薄膜トランジスタ
KR102153034B1 (ko) 2009-12-04 2020-09-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
CN102629609A (zh) * 2011-07-22 2012-08-08 京东方科技集团股份有限公司 阵列基板及其制作方法、液晶面板、显示装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0341732A (ja) * 1989-07-07 1991-02-22 Seiko Epson Corp 半導体装置の製造方法
JP2869893B2 (ja) * 1989-11-07 1999-03-10 カシオ計算機株式会社 半導体パネル
GB9930217D0 (en) * 1999-12-21 2000-02-09 Univ Cambridge Tech Solutiion processed transistors
JP2002185005A (ja) * 2000-12-15 2002-06-28 Matsushita Electric Ind Co Ltd 混成ｔｆｔアレー基板とその製造方法
JP2003124215A (ja) * 2001-10-15 2003-04-25 Seiko Epson Corp パターン形成方法、半導体デバイス、電気回路、表示体モジュール、カラーフィルタおよび発光素子
JP3864413B2 (ja) * 2002-04-22 2006-12-27 セイコーエプソン株式会社 トランジスタの製造方法

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